1. Ukuthuthukisa UkuqukethwePukubola
Iyini i-CMP ku-Semiconductor?
Ukupholisha ngomshini kwamakhemikhali (i-CMP), okwaziwa nangokuthi ukuhleleka ngomshini kwamakhemikhali, kumelela omunye wemisebenzi yeyunithi eyinselele kakhulu kwezobuchwepheshe kanye nebaluleke kakhulu ngokwezimali ekwakhiweni kwe-semiconductor yesimanje. Le nqubo ekhethekile isebenza njengenqubo ehlanganisiwe ebalulekile, ilungisa ngokucophelela izindawo ze-wafer ngokusebenzisa ukusetshenziswa okuhlangene kokuchoboza kwamakhemikhali kanye nokuhuzuka ngokomzimba okulawulwa kakhulu. Isetshenziswa kakhulu emjikelezweni wokukhiqiza, i-CMP ibalulekile ekulungiseleleni ama-wafer e-semiconductor wezendlalelo ezilandelayo, okwenza ngqo ukuhlanganiswa okuphezulu okudingekayo yizakhiwo zedivayisi ezithuthukisiwe.
Inqubo ye-CMP ku-Semiconductor
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Isidingo esijulile sokuthiukupholisha ngomshini kwamakhemikhalikusekelwe ezidingweni zomzimba ze-lithography yanamuhla. Njengoba isekethe ehlanganisiwe ifaka ukuncipha kanye nezingqimba eziningi zihlangana ziqonde phezulu, ikhono lenqubo lokususa izinto ngokulinganayo nokwakha ubuso obuyindilinga emhlabeni wonke liba yinto ebaluleke kakhulu. Ikhanda lokupholisha elinamandla lenzelwe ukujikeleza ngezimbazo ezahlukene, lilinganise ngokucophelela i-topography engajwayelekile kuyo yonke i-wafer. Ukuze kudluliselwe amaphethini ngempumelelo, ikakhulukazi ngamasu asezingeni eliphezulu njenge-Extreme Ultraviolet (EUV) lithography, yonke indawo ecutshungulwayo kumele iwele ekujuleni okuncane kakhulu kwensimu—umkhawulo wejometri odinga ukuthamba kwezinga le-Angstrom kwezobuchwepheshe besimanje obungaphansi kwama-22 nm. Ngaphandle kwamandla okupholisha weinqubo ye-semiconductor ye-cmp, izinyathelo ezilandelayo ze-photolithography zingabangela ukwehluleka kokuqondanisa, ukuphazamiseka kwephethini, kanye nohambo oluyinhlekelele lokukhiqiza.
Ukwamukelwa kabanzi kwe-CMP kwabangelwa kakhulu ukushintsha kwemboni kusuka kuma-conductor e-aluminium avamile kuya kuma-connector ethusi asebenza kahle kakhulu. I-Copper metallization isebenzisa inqubo yokwenza amaphethini okwengeza, inqubo ye-Damascene, encike kakhulu emandleni ahlukile e-CMP okususa ithusi eliningi ngokukhetha nangokulinganayo futhi imise njalo isenzo sokususa ngqo endaweni ephakathi kwensimbi nesendlalelo sokuvimbela i-oxide. Lokhu kususwa kwezinto ezikhethiwe kakhulu kugcizelela ibhalansi ebucayi yamakhemikhali neyemishini echaza inqubo, ibhalansi ephazamiseka ngokushesha ngisho nokushintshashintsha okuncane endaweni yokupholisha.
Imisebenzi ye-CMP ku-Semiconductor Process
Isidingo esiyimpoqo sokwehluka kwesimo sezulu okuphansi kakhulu akuyona inhloso engaphandle kodwa iyimfuneko yokusebenza eqondile yokusebenza kwedivayisi okuthembekile, ukuqinisekisa ukugeleza kwamanje okufanele, ukuhlakazeka kokushisa, kanye nokuqondana kokusebenza ezakhiweni ezinezingqimba eziningi. Isibopho esiyinhloko se-CMP ukuphathwa kwesimo sezulu, ukusungula ukulingana okudingekayo kuzo zonke izinyathelo zokucubungula ezibalulekile ezilandelayo.
Isicelo esithile sinquma ukukhethwa kwezinto zokwakha kanye nezinto ezihambisanayoukwakheka kwe-slurryIzinqubo ze-CMP zakhiwe ukuze ziphathe izinto ezahlukahlukene, okuhlanganisa i-tungsten, ithusi, i-silicon dioxide (i-SiO2)2), kanye ne-silicon nitride (SiN). Ama-slurry alungiselelwe ngokucophelela ukuze kube nokusebenza kahle kwe-planarization ephezulu kanye nokukhetha okungavamile kwezinto kuzo zonke izinhlelo zokusebenza, kufaka phakathi i-Shallow Trench Isolation (STI) kanye ne-Interlayer Dielectrics (ILD). Isibonelo, i-slurry ye-ceria esebenza kahle kakhulu isetshenziswa ngqo ezinhlelweni zokusebenza ze-ILD ngenxa yokusebenza kwayo okuphezulu ekuthambekeni kwesinyathelo, ukufana, kanye nokunciphisa imvamisa yamaphutha. Uhlobo olukhethekile kakhulu lwala ma-slurry luqinisekisa ukuthi ukungazinzi kwenqubo okuvela ekushintsheni kwamandla oketshezi lwe-polishing medium kuzophula ngokushesha izidingo eziyisisekelo zokususwa kwezinto ezikhethiwe.
2. Indima Ebalulekile Yempilo Ye-CMP Slurry
Inqubo ye-CMP ku-Semiconductor
Ukusebenza kahle okuqhubekayo kwe-inqubo ye-cmp yokupholisha ngomshini yamakhemikhaliKuncike ngokuphelele ekulethweni okuqhubekayo kanye nokusebenza kahle kwe-slurry, esebenza njengendawo ebalulekile evumela ukusabela kwamakhemikhali okudingekayo kanye nokuhuzuka komshini. Lolu ketshezi oluyinkimbinkimbi, oluchazwa njengokumiswa kwe-colloidal, kumele lulethe njalo nangokulinganayo izingxenye zalo ezibalulekile, okuhlanganisa ama-chemical agents (ama-oxidizer, ama-accelerator, kanye nama-corrosion inhibitors) kanye nezinhlayiya ezi-abrasive ezinobukhulu obuncane, endaweni ye-dynamic wafer.
Ukwakheka kodaka kuklanyelwe ukuvusa ukusabela kwamakhemikhali athile: inqubo engcono kakhulu incike ekwakheni ungqimba lwe-oxide olungancibiliki, olungancibiliki ezintweni eziqondiwe, olube selususwa ngomshini yizinhlayiya eziklwebhayo. Le ndlela inikeza ukukhetha okuphezulu kwendawo okudingekile okubalulekile ukuze kuhlelwe kahle, kugxilwe isenzo sokususa ezindaweni eziphakeme noma ezivezwayo. Ngokuphambene nalokho, uma ukusabela kwamakhemikhali kukhiqiza isimo se-oxide esincibilikayo, ukususwa kwezinto kuyi-isotropic, ngaleyo ndlela kususwe ukukhetha okudingekayo kwendawo. Izingxenye zomzimba zedaka ngokuvamile zakhiwa izinhlayiya eziklwebhayo (isb., i-silica, i-ceria) ezinobukhulu obusukela ku-30 kuya ku-200 nm, ezimiswe ekugxilweni okuphakathi kuka-0.3 no-12 weight percentage.
I-CMP Slurry Semiconductor
Ukugcina impilo yeI-semiconductor ye-slurry ye-CMPidinga ukuchazwa nokulawulwa okungapheli kuyo yonke impilo yayo, njengoba noma yikuphi ukuwohloka ngesikhathi sokuphathwa noma ukujikeleza kwegazi kungaholela ekulahlekelweni okukhulu kwezezimali. Ikhwalithi ye-wafer yokugcina epholishiwe, echazwa ubushelefu bayo obuncane kanye namazinga okukhubazeka, ihlobene ngqo nobuqotho bokusatshalaliswa kosayizi wezinhlayiya ze-slurry (PSD) kanye nokuqina okuphelele.
Uhlobo olukhethekile lwezinto ezahlukahlukeneizinhlobo ze-slurry ze-cmpkusho ukuthi izinhlayiya ezincane ezinobukhulu obuncane ziqiniswa amandla abuthakathaka kagesi axoshayo ngaphakathi kokumiswa. Ama-slurries avame ukuhlinzekwa ngesimo esigxilile futhi adinga ukuxutshwa okunembile nokuhlanganiswa namanzi nama-oxidizer endaweni yokwenziwa. Okubaluleke kakhulu, ukuthembela ezilinganisweni zokuxuba ezigxilile kunephutha elikhulu ngoba izinto ezigxilile ezingenayo zibonisa ukwehluka kobuningi be-batch-to-batch.
Ukuze kulawulwe inqubo, ngenkathi ukuhlaziywa okuqondile kwe-PSD kanye ne-zeta potential (ukuzinza kwe-colloidal) kubalulekile, lawa masu avame ukubekwa ekuhlaziyweni okungaxhunyiwe ku-inthanethi ngezikhathi ezithile. Iqiniso lokusebenza lendawo ye-HVM lidinga impendulo yesikhathi sangempela, esheshayo. Ngenxa yalokho, ubuningi kanye ne-viscosity kusebenza njengezindlela zokuvikela ezisebenza kahle kakhulu nezisebenzayo zempilo ye-slurry. Ubuningi buhlinzeka ngesilinganiso esisheshayo nesiqhubekayo sokuhlushwa okuphelele kwe-abrasive solids endaweni ephakathi. Ubuningi bubaluleke ngokulinganayo, busebenza njengesibonakaliso esibucayi kakhulu sesimo se-colloidal soketshezi kanye nobuqotho bokushisa. Ubuningi obungazinzile buvame ukusayina inhlayiya e-abrasiveukuhlangananoma ukuhlanganiswa kabusha, ikakhulukazi ngaphansi kwezimo zokugunda eziguquguqukayo. Ngakho-ke, ukuqapha okuqhubekayo nokulawula kwalezi zinhlaka ezimbili ze-rheological kunikeza i-feedback loop esheshayo, esebenzisekayo edingekayo ukuqinisekisa ukuthi i-slurry igcina isimo sayo samakhemikhali nesimo somzimba esibekiwe endaweni yokusetshenziswa.
3. Ukuhlaziywa Kokwehluleka Kwemishini: Abashayeli Abaphelele Beziphambeko
Imiphumela Emibi Ebangelwa Ukuguquguquka Kobuningi Be-CMP Nokugoba
Ukuguquguquka kwenqubo kubhekwa njengomuntu oyedwa omkhulu obangela ingozi ekukhiqizweni okuphezului-cmp ekukhiqizweni kwe-semiconductorIzici ze-slurry, ezibizwa ngokuthi "impilo ye-slurry," zisengozini enkulu yezinguquko ezibangelwa ukucheba kokupompa, ukushintshashintsha kwezinga lokushisa, kanye nokungahambisani kokuxuba. Ukwehluleka okuvela ohlelweni lokugeleza kwe-slurry kuhlukile ezinkingeni zemishini kuphela, kodwa kokubili kuphumela ekuqhekekeni okubalulekile kwe-wafer futhi kuvame ukutholakala sekwephuzile kakhulu yizinhlelo zokugcina ze-post-process.
Ukuba khona kwezinhlayiya ezinkulu kakhulu noma ama-agglomerate ku-i-semiconductor ye-cmpIzinto ezibonakalayo zihlobene kakhulu nokudalwa kwemiklwebhe emincane kanye nezinye iziphambeko ezibulalayo ebusweni be-wafer epholishiwe. Ukuguquguquka kwemingcele ebalulekile ye-rheological—ukugcwala kanye nobuningi—kuyizinkomba eziqhubekayo neziholayo zokuthi ubuqotho be-slurry buye baphazamiseka, okuqala indlela yokwakheka kwesiphambeko.
Ukuguquguquka kobungqingili obuthambile (isb., okuholela ekuhlanganiseni, ukugunda okushintshiwe)
I-Viscosity iyisici se-thermodynamic esilawula ukuziphatha kokugeleza kanye nokuguquguquka kokungqubuzana esibonakalayo sokupholisha, okwenza kube bucayi kakhulu ekucindezelekeni kwemvelo kanye nokwemishini.
Ukusebenza kwamakhemikhali kanye nokusebenza ngokomzimba kwe-i-semiconductor ye-viscosity ethambileuhlelo luncike kakhulu ekulawulweni kwezinga lokushisa. Ucwaningo luqinisekisa ukuthi ngisho nokushintsha okuncane okungu-5°C ekushiseni kwenqubo kungaholela ekunciphiseni cishe okungu-10% kokuthamba kwe-slurry. Lolu shintsho ku-rheology luthinta ngqo ubukhulu befilimu ye-hydrodynamic ehlukanisa i-wafer nephedi yokupholisha. Ukuthamba okunciphile kuholela ekugcotshweni okunganele, okuholela ekungqubuzaneni okuphezulu komshini, imbangela eyinhloko yokuklwebheka okuncane kanye nokusetshenziswa kwephedi okusheshayo.
Indlela yokuwohloka okubucayi ihilela ukuhlanganiswa kwezinhlayiya ezibangelwa ukucheba. Ama-slurry asekelwe ku-silica agcina ukuhlukaniswa kwezinhlayiya ngamandla abucayi okuxosha ngogesi. Lapho i-slurry ihlangabezana nokucindezeleka okuphezulu kokucheba—okuvame ukudalwa amaphampu avamile e-centrifugal noma ukujikeleza okubanzi ku-loop yokusabalalisa—la mandla anganqotshwa, okuholela ekusheshiseni nasekungalungiseki.ukuhlanganaizinhlayiya ezihudulayo. Ama-aggregates amakhulu avelayo asebenza njengamathuluzi okugaya amancane, adala ngqo imihuzuko emincane ebhubhisayo ebusweni be-wafer. I-viscometry yesikhathi sangempela iyindlela edingekayo yokuphendula ukuze kutholakale lezi zenzakalo, enikeza ukuqinisekiswa okubalulekile "kobumnene" besistimu yokupompa nokusabalalisa ngaphambi kokuba kwenzeke ukukhiqizwa kweziphambeko ezinkulu.
Ukwehluka okubangelwa ukuthambekela kokuthambekela nakho kuphazamisa kakhulu ukusebenza kahle kokuthambekela ...
Ukuguquguquka kobuningi be-slurry
Ubuningi be-slurry buyisibonakaliso esisheshayo nesithembekile sokuhlushwa okuphelele kwezinto eziqinile ezilenga ngaphakathi koketshezi. Ukuguquguquka kobuningi kubonisa ukulethwa kwe-slurry okungafani, okuhlobene ngokwemvelo nezinguquko ezingeni lokususwa kwezinto (MRR) kanye nokwakheka kwesici.
Izindawo zokusebenza zidinga ukuqinisekiswa okuguquguqukayo kokwakheka kwe-slurry. Ukuthembela kuphela ekungezeni inani elithile lamanzi kanye ne-oxidizer kuma-batches ahlanganisiwe angenayo akwanele, njengoba ubuningi bezinto zokusetshenziswa buvame ukuhlukahluka, okuholela emiphumeleni yenqubo engaguquki ekhanda lamathuluzi. Ngaphezu kwalokho, izinhlayiya ezihuquzelayo, ikakhulukazi izinhlayiya ze-ceria ezihlungiwe kakhulu, zingaphansi kokuthungwa uma ijubane lokugeleza noma ukuzinza kwe-colloidal kunganele. Lokhu kuzinza kudala ama-gradients obuningi bendawo kanye nokuhlanganiswa kwezinto ngaphakathi kwemigqa yokugeleza, okuphazamisa kakhulu ikhono lokuletha umthwalo ohuquzelayo oqhubekayo.
How DinqwabaDukuxoshwaAffi-ect Mani-ufaci-turingProcess?.
Imiphumela eqondile yobuningi be-slurry obungazinzile ibonakala njengeziphambeko ezibalulekile zomzimba ebusweni obucwebezelisiwe:
Amanani Okususwa Okungalingani (i-WIWNU):Ukwehluka kobuningi kuhumushela ngqo ekuhlukeni kokuhlushwa kwezinhlayiya ezisebenzayo ezivuvukalayo ezivezwa esibonakalayo sokupholisha. Ubuningi obuphansi kunokucacisiwe bubonisa ukuhlushwa okuncishisiwe kokuvuvuka, okuholela ekuncipheni kwe-MRR futhi kukhiqize ukungavumelani okungamukeleki ngaphakathi kwe-wafer (WIWNU). I-WIWNU iphazamisa isidingo sokuhlela esiyisisekelo. Ngokuphambene nalokho, ukuhlushwa okuphezulu kwendawo kwandisa umthwalo wezinhlayiya osebenzayo, okuholela ekususweni kwezinto ngokweqile. Ukulawulwa okuqinile kobuningi kuqinisekisa ukulethwa okuqhubekayo kokuvuvuka, okuhambisana kakhulu namandla okungqubuzana azinzile kanye ne-MRR ebikezelwayo.
Ukugoba Ngenxa Yezinhlobo Ezihlukahlukene Zokuguguleka Ezitholakala Endaweni:Ukugxila okuphezulu kwezinto eziqinile ezirhabaxa endaweni, okuvame ukubangelwa ukuqina noma ukuxubana okunganele, kuholela emithwalweni ephezulu yendawo ngayinye phezu kobuso be-wafer. Lapho izinhlayiya ezirhabaxa, ikakhulukazi i-ceria, zinamathela ngokuqinile kungqimba lwengilazi ye-oxide, futhi kukhona ukucindezeleka kobuso, umthwalo womshini ungabangela ukuba ungqimba lwengilazi luqhekeke, okuholela ekujuleni nasekubukhalini.ukugobaAmaphutha. Lokhu kuhlukahluka kokuhluza kungabangelwa ukuhlunga okuphazamisekile, okuvumela ama-aggregate amakhulu kakhulu (izinhlayiya ezingaphezu kuka-$0.5\\mu m$) ukuba adlule, okubangelwa ukumiswa kwezinhlayiya okungekuhle. Ukuqapha ubuningi kuhlinzeka ngesistimu yesixwayiso esibalulekile nesihambisanayo kubabali bezinhlayiya, okuvumela onjiniyela bezinqubo ukuthi babone ukuqala kokuhlanganiswa kokuhluza nokusimamisa umthwalo wokuhluza.
Ukwakheka Kwezinsalela Ezivela Ekumisweni Kwezinhlayiyana Ezimbi:Uma ukumiswa kungazinzile, okuholela ekuguqukeni kobuningi obukhulu, izinto eziqinile zizovame ukuqongelela ekwakhiweni kokugeleza, okuholela emagagasini obuningi kanye nokuhlanganiswa kwezinto ohlelweni lokusabalalisa.17Ngaphezu kwalokho, ngesikhathi sokupholisha, i-slurry kumele ithwale ngempumelelo kokubili imikhiqizo yokusabela kwamakhemikhali kanye nemfucumfucu yokuguga kwemishini. Uma ukumiswa kwezinhlayiya noma amandla oketshezi kungalungile ngenxa yokungazinzi, lezi zinsalela azisuswa kahle ebusweni be-wafer, okuholela ezinhlayiya ze-post-CMP kanye namakhemikhali.insalelaAmaphutha. Ukumiswa kwezinhlayiya okuzinzile, okuqinisekiswa ukuqapha okuqhubekayo kwe-rheological, kuyimpoqo ekukhishweni kwezinto ezihlanzekile neziqhubekayo.
Funda Ngamamitha Obuningi Engeziwe
Amamitha Ezinqubo Engeziwe Ku-inthanethi
4. Ukuphakama Kobuchwepheshe Kwe-Inline Metrology
Ama-Densitometers nama-Viscometers e-Lonnmeter Inline
Ukuze kuqiniswe ngempumelelo inqubo ye-CMP eguquguqukayo, ukulinganisa okuqhubekayo, okungangenisi uhlaselo lwezici zempilo ye-slurry kubalulekile.Ama-Densitometers nama-Viscometers e-Lonnmeter InlineSebenzisa ubuchwepheshe bezinzwa eziphendulayo obuthuthuke kakhulu, uletha ukusebenza okuphezulu uma kuqhathaniswa namadivayisi e-metrology endabuko, avame ukubambezeleka. Leli khono lenza ukuqapha kobuningi obungenamthungo nokuqhubekayo kuhlanganiswe ngqo endleleni yokugeleza, okubaluleke kakhulu ekuhlangabezaneni nezindinganiso zobumsulwa obuqinile kanye nokunemba kokuxubana kwama-node enqubo yesimanje ye-sub-28nm.
Chaza izimiso zabo zobuchwepheshe eziyinhloko, ukunemba kokulinganisa, isivinini sokuphendula, ukuzinza, ukuthembeka ezindaweni ezinzima ze-CMP, futhi ubahlukanise nezindlela zendabuko zokungaxhunyiwe ku-inthanethi.
Ukuzenzakalela kwenqubo okuphumelelayo kudinga izinzwa ezenzelwe ukusebenza ngokwethembeka ngaphansi kwezimo eziguquguqukayo zokugeleza okuphezulu, ukucindezela okuphezulu, kanye nokuchayeka kwamakhemikhali anamandla, okunikeza impendulo esheshayo yezinhlelo zokulawula.
Izimiso Zobuchwepheshe Eziyinhloko: Inzuzo Ye-Resonator
Amathuluzi e-Lonnmeter asebenzisa ubuchwepheshe obuqinile bokuqaqamba obuklanyelwe ngqo ukunciphisa ubuthakathaka obungokwemvelo bama-densitometer e-U-tube ajwayelekile, anama-narrow-bore, adume kakhulu ngokusetshenziswa ngaphakathi komugqa ngama-abrasive colloidal suspension.
Ukulinganiswa Kobuningi:Iimitha yobuningi be-slurryisebenzisa isici sokudlidliza esishibilikisiwe ngokuphelele, ngokuvamile i-fork assembly noma i-co-axial resonator. Lesi sici sivuselelwa nge-piezo-electrically ukuze sinyakaze ngemvamisa yaso yemvelo. Izinguquko ekubuneni koketshezi oluzungezile zibangela ukushintsha okunembile kule mvamisa yemvelo, okuvumela ukunqunywa kobukhulu obuqondile nobunokwethenjelwa kakhulu.
Ukulinganiswa kokuqina:II-viscometer ye-slurry eqhubekayoisebenzisa inzwa eqinile enyakazisa ngaphakathi koketshezi. Umklamo uqinisekisa ukuthi ukulinganiswa kwe-viscosity kuhlukaniswe nemiphumela yokugeleza koketshezi oluningi, okunikeza isilinganiso sangaphakathi se-rheology yezinto.
Ukusebenza Nokuqina Kokusebenza
I-Inline resonant metrology inikeza izibalo zokusebenza ezibalulekile ezibalulekile ekulawulweni kwe-HVM okuqinile:
Isivinini Sokunemba Nempendulo:Izinhlelo eziqondile zinikeza ukuphindaphindeka okuphezulu, ngokuvamile zifinyelela okungcono kuno-0.1% kokunemba kwe-viscosity kanye nobuningi kuze kufike ku-0.001 g/cc. Ukuze kulawulwe inqubo eqinile, lokhu kuphakemeukunemba— ikhono lokulinganisa njalo inani elifanayo nokuthola ngokuthembekile ukuphambuka okuncane—ngokuvamile libaluleke kakhulu kunokunemba okuphelele okusemaphethelweni. Okubaluleke kakhulu, isignaliisikhathi sokuphendulangoba lezi zinzwa zishesha kakhulu, ngokuvamile cishe imizuzwana emi-5. Lokhu kusabela okusheshayo kuvumela ukutholwa kwamaphutha ngokushesha kanye nokulungiswa okuzenzakalelayo kwe-closed-loop, okuyisidingo esiyinhloko sokuvimbela uhambo.
Ukuzinza Nokuthembeka Ezindaweni Ezinzima:Ama-slurries e-CMP anamandla ngokwemvelo. Izinsimbi zesimanje eziqondile zakhelwe ukuqina, kusetshenziswa izinto ezithile kanye nokucushwa kokufakwa ngqo kumapayipi. Lezi zinzwa zenzelwe ukusebenza kuzo zonke izinhlobo zokucindezela (isb., kufika ku-6.4 MPa) kanye namazinga okushisa (kufika ku-350 ℃). Umklamo ongeyona i-U-tube unciphisa izindawo ezifile kanye nezingozi zokuvala ezihambisana nemidiya ehlukumezayo, okwenza isikhathi sokusebenza senzwa sikhule futhi sithembeke ekusebenzeni.
Ukwehluka Ezindleleni Zendabuko Ezingaxhunyiwe Ku-inthanethi
Umehluko wokusebenza phakathi kwezinhlelo ezizenzakalelayo eziku-inthanethi kanye nezindlela ezingaxhunyiwe ku-inthanethi ezisebenzisa izandla zichaza igebe phakathi kokulawulwa kokukhubazeka okusabelayo kanye nokwenza ngcono inqubo yokuqapha.
| Inqubo Yokuqapha | Akuxhunyiwe ku-inthanethi (Isampula Yelebhu/I-U-Tube Densitometer) | I-Inline (i-Lonnmeter Densitometer/i-Viscometer) | Umthelela Wenqubo |
| Isivinini Sokulinganisa | Kulibazisekile (Amahora) | Isikhathi sangempela, Okuqhubekayo (Isikhathi sokuphendula ngokuvamile imizuzwana emi-5) | Ivumela ukulawulwa kwenqubo yokuvimbela, evaliwe. |
| Ukuvumelana/Ukunemba Kwedatha | Iphansi (Ingathinteka yiphutha elenziwa ngesandla, ukuwohloka kwesampula) | Okuphezulu (Okuzenzakalelayo, ukuphindaphindeka/ukunemba okuphezulu) | Imikhawulo yokulawula inqubo eqinile kanye nokunciphisa imiphumela engamanga. |
| Ukuhambisana Okubi | Ingozi enkulu yokuvaleka (Umklamo wembobo ye-U-tube encane) | Ingozi encane yokuvaleka (umklamo we-resonator oqinile, ongeyona i-U-tube) | Isikhathi esiphezulu sokusebenza kwenzwa kanye nokuthembeka kwemidiya ehlukumezayo. |
| Amandla Okuthola Amaphutha | I-Reactive (ithola uhambo olwenzeke emahoreni adlule) | Isebenza ngokushesha (iqapha izinguquko ezishintshashintshayo, ithola uhambo kusenesikhathi) | Kuvimbela izingcezu ze-wafer eziyinhlekelele futhi kuholele ekuphumeni. |
Ithebula 3: Ukuhlaziywa Kokuqhathanisa: I-Inline vs. Traditional Slurry Metrology
Ukuhlaziywa kwendabuko okungaxhunyiwe ku-inthanethi kudinga inqubo yokukhipha isampula kanye nokuthutha, okuletha ngokwemvelo ukubambezeleka kwesikhathi okubalulekile ku-metrology loop. Lokhu kubambezeleka, okungahlala amahora amaningi, kuqinisekisa ukuthi lapho uhambo lutholakala ekugcineni, inani elikhulu lama-wafer selivele lisengozini. Ngaphezu kwalokho, ukuphathwa ngesandla kuletha ukuguquguquka futhi kubeke engcupheni ukuwohloka kwesampula, ikakhulukazi ngenxa yokushintsha kwezinga lokushisa ngemva kokuthatha isampula, okungaphazamisa ukufundwa kwe-viscosity.
I-Inline metrology isusa lokhu kubambezeleka okulimazayo, ihlinzeka ngokugeleza okuqhubekayo kwedatha ngqo kusuka emgqeni wokusabalalisa. Lesi sivinini siyisisekelo sokutholwa kwamaphutha; uma sihlanganiswa nomklamo oqinile, ongavimbeli obalulekile wezinto ezihudulayo, sinikeza ukuphakelwa kwedatha okuthembekile kokuqinisa lonke uhlelo lokusabalalisa. Ngenkathi ubunzima be-CMP bufuna ukuqapha amapharamitha amaningi (njenge-refractive index noma i-pH), ubuningi kanye ne-viscosity kunikeza impendulo eqondile kakhulu, yesikhathi sangempela ekuzinzeni okuyisisekelo komzimba kokumiswa okuhudulayo, okuvame ukungazweli ezinguqukweni zamapharamitha afana ne-pH noma i-Oxidation-Reduction Potential (ORP) ngenxa yokufakwa kwamakhemikhali.
5. Izidingo Zezomnotho Nezokusebenza
Izinzuzo Zokuqapha Ubuningi Nokugoba Kwe-Real-Time
Kunoma yimuphi umugqa wokukhiqiza othuthukisiwe laphoI-CMP enqubweni ye-semiconductorUma kusetshenziswa, impumelelo ilinganiswa ngokuthuthuka kwesivuno okuqhubekayo, ukuzinza kwenqubo okuphezulu, kanye nokuphathwa kwezindleko okuqinile. Ukuqapha i-rheological ngesikhathi sangempela kunikeza ingqalasizinda yedatha ebalulekile edingekayo ukuze kufezwe lezi zidingo zezentengiselwano.
Kuthuthukisa Ukuqina Kwenqubo
Ukuqapha i-slurry okuqhubekayo, okunembe kakhulu kuqinisekisa ukuthi amapharamitha e-slurry abalulekile alethwa endaweni yokusebenzisa (POU) ahlala ngaphakathi kwemingcele yokulawula eqinile kakhulu, kungakhathaliseki umsindo wenqubo okhuphukayo. Isibonelo, uma ubheka ukuhlukahluka kobuningi obukhona kuma-slurry angenayo, ukulandela iresiphi akwanele. Ngokubheka ukuxinana ethangini le-blender ngesikhathi sangempela, uhlelo lokulawula lungalungisa ngokuguquguqukayo izilinganiso zokuxuba, luqinisekise ukuthi ukugxilwa okuqondile kwenhloso kugcinwa kuyo yonke inqubo yokuxuba. Lokhu kunciphisa kakhulu ukuhlukahluka kwenqubo okuvela ezintweni zokusetshenziswa ezingaguquki, okuholela ekusebenzeni kokupholisha okubikezelwa kakhulu futhi kunciphisa kakhulu ukuvama nobukhulu bohambo lwenqubo olubizayo.
Kukhulisa Isivuno
Ukubhekana ngqo nokwehluleka kwemishini namakhemikhali okubangelwa izimo zokungazinzile kwe-slurry kuyindlela enomthelela kakhulu yokuthuthukisaukukhiqizwa kwe-semiconductor ye-cmpamazinga okukhiqiza. Izinhlelo zokuqapha ezibikezelayo, zesikhathi sangempela zivikela umkhiqizo onenani eliphezulu. Ama-Fabs asebenzise izinhlelo ezinjalo abhale impumelelo enkulu, kufaka phakathi imibiko yokwehla okungafika ku-25% kokuphunyuka kwamaphutha. Leli khono lokuvimbela lishintsha indlela yokusebenza kusukela ekusabeleni kumaphutha angenakugwenywa liye ekuvimbeleni ukwakheka kwawo ngenkuthalo, ngaleyo ndlela livikele ama-wafer abiza izigidi zamaRandi ekuklwebhekeni okuncane kanye neminye imonakalo ebangelwa yizinhlayiya ezingazinzile. Ikhono lokuqapha izinguquko ezishintshayo, njengokwehla kwe-viscosity okungazelelwe okubonisa ukucindezeleka kokushisa noma ukuncipha, kwenza kube lula ukungenelela ngaphambi kokuba lezi zici zisakaze amaphutha kuma-wafer amaningi.
Kunciphisa Ukuvuselelwa
Umkhiqizophinda usebenzeizinga, elichazwa njengephesenti lomkhiqizo owenziwe odinga ukucutshungulwa kabusha ngenxa yamaphutha noma amaphutha, liyi-KPI ebalulekile elinganisa ukungasebenzi kahle kokukhiqiza okuphelele. Amanani aphezulu okusebenza kabusha adla abasebenzi ababalulekile, izinto ezilahlwayo, futhi aletha ukubambezeleka okukhulu. Ngoba amaphutha afana nokufaka izitsha, ukususwa okungafani, kanye nokuklwebheka kuyimiphumela eqondile yokungazinzi kwe-rheological, ukuzinzisa ukugeleza kwe-slurry ngobuningi obuqhubekayo kanye nokulawulwa kwe-viscosity kunciphisa kakhulu ukuqaliswa kwala maphutha abalulekile. Ngokuqinisekisa ukuzinza kwenqubo, ukwanda kwamaphutha adinga ukulungiswa noma ukupholishwa kabusha kuncishisiwe, okuholela ekuthuthukisweni kokusebenza kanye nokusebenza kahle kweqembu lonke.
Kuthuthukisa Izindleko Zokusebenza
Ama-slurry e-CMP amelela izindleko ezinkulu ezisetshenziswayo ngaphakathi kwendawo yokukhiqiza. Lapho ukungaqiniseki kwenqubo kunquma ukusetshenziswa kwemingcele yokuphepha ebanzi, egcinayo ekuxubeni nasekusetshenzisweni, umphumela uba ukusetshenziswa okungasebenzi kahle kanye nezindleko eziphezulu zokusebenza. Ukuqapha kwesikhathi sangempela kuvumela ukuphathwa kwe-slurry okucophelelayo nokulula. Isibonelo, ukulawula okuqhubekayo kuvumela izilinganiso zokuxuba eziqondile, kunciphisa ukusetshenziswa kwamanzi okuncishisiwe nokuqinisekisa ukuthi okubizayoukwakheka kwe-slurry ye-cmpisetshenziswa kahle, kunciphisa ukuchithwa kwezinto kanye nezindleko zokusebenza. Ngaphezu kwalokho, ukuxilongwa kwe-rheological ngesikhathi sangempela kunganikeza izimpawu zokuxwayisa kusenesikhathi zezinkinga zemishini—njengokuguguleka kwamaphedi noma ukwehluleka kwephampu—okuvumela ukulungiswa okusekelwe ezimweni ngaphambi kokuba ukungasebenzi kahle kubangele ukuhamba okubucayi kwendle kanye nesikhathi sokungasebenzi okulandelayo.
Ukukhiqizwa okuqhubekayo okukhiqiza kakhulu kudinga ukususwa kokuguquguquka kuzo zonke izinqubo ezibalulekile zamayunithi. Ubuchwepheshe be-Lonnmeter resonant buhlinzeka ngokuqina okudingekayo, isivinini, kanye nokunemba ukuze kususwe ingozi engqalasizinda yokulethwa kwe-slurry. Ngokuhlanganisa idatha yobuningi besikhathi sangempela kanye ne-viscosity, onjiniyela bezinqubo bahlonyiswe ngobuhlakani obuqhubekayo, obusebenzayo, obuqinisekisa ukusebenza kokupholisha okubikezelwayo kanye nokuvikela isivuno se-wafer ngokumelene nokungazinzi kwe-colloidal.
Ukuqala ushintsho kusuka ekuphathweni kwe-reactive yield kuya ekulawulweni kwenqubo esebenzayo:
KhulisaIsikhathi sokuphumula kanyeNciphisaUkulungisa:LandaImininingwane Yethu Yobuchwepheshe kanyeQalisai-RFQ Namuhla.
Simema onjiniyela bezinqubo eziphezulu kanye nemikhiqizo ukuthithumelai-RFQ enemininingwane. Ochwepheshe bethu bezobuchwepheshe bazokwakha imephu yokuqalisa enembile, bahlanganise ubuchwepheshe be-Lonnmeter obunembile kakhulu engqalasizinda yakho yokusabalalisa i-slurry ukuze balinganisele ukwehla okulindelwe kobuningi besici kanye nokusetshenziswa kwe-slurry.XhumanaIthimba lethu le-Process Automation manjevikelainzuzo yakho yenzuzo.Tholaukunemba okubalulekile okudingekayo ukuze uzinzise isinyathelo sakho esibaluleke kakhulu sokuhlela.
