Chemical Mechanical Polishing

Ukupholisha kwamakhemikhali-okusebenza ngomshini (i-CMP) kuvame ukubandakanyeka ekukhiqizeni izindawo ezibushelelezi ngokusabela kwamakhemikhali, ikakhulukazi imisebenzi embonini yokukhiqiza ama-semiconductor.I-Lonnmeter, umsunguli othembekile onolwazi olungaphezu kweminyaka engama-20 ekulinganisweni kokuhlushwa okuqondile, unikeza ubuchwepheshe besimanjeamamitha okuminyana okungewona enuzikanye nezinzwa ze-viscosity ukubhekana nezinselele zokuphathwa kwe-slurry.

Ukubaluleka Kwekhwalithi Yodaka kanye Nobuchwepheshe BeLonnmeter

I-slurry yomshini wokupholisha yamakhemikhali iyinsika yenqubo ye-CMP, enquma ukufana kanye nekhwalithi yezindawo. Ubuningi be-slurry obungaguquguquki noma i-viscosity kungaholela ezifweni ezifana nokuklwebheka okuncane, ukususwa kwezinto ezingalingani, noma ukuvaleka kwamaphedi, okubeka engcupheni ikhwalithi ye-wafer kanye nokwandisa izindleko zokukhiqiza. I-Lonnmeter, umholi womhlaba wonke ezixazululweni zokulinganisa zezimboni, igxile ekulinganisweni kwe-slurry ngaphakathi ukuze kuqinisekiswe ukusebenza kahle kwe-slurry. Ngomlando oqinisekisiwe wokuletha izinzwa ezithembekile nezinembile, i-Lonnmeter ibambisene nabakhiqizi be-semiconductor abaphambili ukuthuthukisa ukulawulwa kwenqubo kanye nokusebenza kahle. Amamitha abo obuningi be-slurry angewona enuzi kanye nezinzwa ze-viscosity zinikeza idatha yesikhathi sangempela, okuvumela ukulungiswa okunembile ukuze kugcinwe ukuhambisana kwe-slurry futhi kuhlangatshezwane nezidingo eziqinile zokukhiqiza kwe-semiconductor yesimanje.

Iminyaka engaphezu kwamashumi amabili yesipiliyoni ekulinganisweni kokuhlushwa okuqondile, okuthenjwe yizinkampani eziphezulu ze-semiconductor. Izinzwa zeLonnmeter zenzelwe ukuhlanganiswa okungenamthungo kanye nokugcinwa okungekho, ukunciphisa izindleko zokusebenza. Izixazululo ezenzelwe ukuhlangabezana nezidingo ezithile zenqubo, ukuqinisekisa isivuno esiphezulu se-wafer kanye nokuhambisana.

Indima Yokupholisha Kwamakhemikhali Emkhakheni Wokukhiqiza Ama-Semiconductor

Ukupholisha ngomshini kwamakhemikhali (i-CMP), okubizwa nangokuthi ukuhleleka kwamakhemikhali, kuyitshe lesisekelo lokukhiqizwa kwe-semiconductor, okuvumela ukudalwa kwezindawo ezisicaba, ezingenamaphutha okukhiqizwa kwe-chip okuthuthukisiwe. Ngokuhlanganisa ukuqoshwa kwamakhemikhali nokuhuzuka ngomshini, inqubo ye-CMP iqinisekisa ukunemba okudingekayo kumasekethe ahlanganisiwe anezingqimba eziningi kuma-node angaphansi kwe-10nm. I-slurry yokupholisha ngomshini kwamakhemikhali, eyakhiwe ngamanzi, ama-reagent amakhemikhali, kanye nezinhlayiya ezihuquzelayo, isebenzisana nephedi yokupholisha kanye ne-wafer ukuze kususwe izinto ngokufanayo. Njengoba imiklamo ye-semiconductor ithuthuka, inqubo ye-CMP ibhekene nobunzima obandayo, edinga ukulawulwa okuqinile kwezakhiwo ze-slurry ukuze kuvinjelwe amaphutha futhi kufezwe ama-wafer abushelelezi, acwebezelayo afunwa yi-Semiconductor Foundries and Materials Suppliers.

Le nqubo ibalulekile ekukhiqizeni ama-chip angu-5nm kanye no-3nm aneziphambeko ezincane, okuqinisekisa izindawo eziyisicaba ukuze kufakwe kahle izendlalelo ezilandelayo. Ngisho nokungahambisani okuncane kwe-slurry kungaholela ekusetshenzisweni kabusha okubizayo noma ekulahlekelweni kwesivuno.

Izinselele Ekuqapheni Izakhiwo Ezinodaka

Ukugcina ubuningi be-slurry obuhambisanayo kanye ne-viscosity enkambisweni yokupholisha imishini yamakhemikhali kugcwele izinselele. Izakhiwo ze-slurry zingahluka ngenxa yezici ezifana nokuthuthwa, ukuxutshwa ngamanzi noma i-hydrogen peroxide, ukuxubana okunganele, noma ukuwohloka kwamakhemikhali. Isibonelo, ukuhlala kwezinhlayiya kuma-slurry totes kungabangela ubuningi obukhulu phansi, okuholela ekupholiseni okungafani. Izindlela zokuqapha zendabuko ezifana ne-pH, amandla okunciphisa i-oxidation (ORP), noma ukuqhuba ngokuvamile akwanele, njengoba zehluleka ukubona izinguquko ezincane ekubunjweni kwe-slurry. Lokhu kulinganiselwa kungabangela amaphutha, amazinga okususwa ancishisiwe, kanye nezindleko ezisetshenziswayo ezengeziwe, okubeka izingozi ezinkulu kubakhiqizi bemishini ye-semiconductor kanye nabahlinzeki bezinsizakalo ze-CMP. Izinguquko zokwakheka ngesikhathi sokuphatha nokusabalalisa zithinta ukusebenza. Ama-node angaphansi kwe-10nm adinga ukulawulwa okuqinile kokuhlanzeka kwe-slurry kanye nokunemba kokuxubana. I-pH ne-ORP zibonisa ukuhlukahluka okuncane, kuyilapho ukuqhuba kuyahlukahluka ngokuguga kwe-slurry. Izakhiwo ze-slurry ezingahambisani zingandisa amazinga amaphutha afinyelela ku-20%, ngokwezifundo zemboni.

Izinzwa Ezingaphakathi Ze-Lonnmeter Zokuqapha Ngesikhathi Sangempela

I-Lonnmeter ibhekana nalezi zinselele ngamamitha ayo obuningi obungeyona eyenuzi athuthukisiwe kanyeizinzwa ze-viscosity, kufaka phakathi imitha ye-viscosity emugqeni wokulinganisa i-viscosity emugqeni kanye nemitha ye-ultrasonic density yokuqapha i-slurry density kanye ne-viscosity ngasikhathi sinye. Lezi zinzwa zenzelwe ukuhlanganiswa okungenamthungo ezinqubweni ze-CMP, eziqukethe ukuxhumana okujwayelekile embonini. Izixazululo ze-Lonnmeter zinikeza ukuthembeka kwesikhathi eside kanye nokugcinwa okuphansi kokwakhiwa kwayo okuqinile. Idatha yesikhathi sangempela ivumela opharetha ukuthi balungise ukuxubana kwe-slurry, bavimbele amaphutha, futhi bathuthukise ukusebenza kokupholisha, okwenza la mathuluzi abe yinto ebalulekile kubahlinzeki bemishini yokuhlaziya nokuhlola kanye nabaphakeli bemishini yokusetshenziswa ye-CMP.

Izinzuzo Zokuqapha Okuqhubekayo Kokwenza I-CMP Isebenze Kahle

Ukuqapha okuqhubekayo ngezinzwa ze-Lonnmeter eziku-line kuguqula inqubo yokupholisha ngomshini wamakhemikhali ngokuletha ukuqonda okusebenzayo kanye nokonga izindleko okukhulu. Ukulinganiswa kobuningi be-slurry ngesikhathi sangempela kanye nokuqapha i-viscosity kunciphisa amaphutha njengokuklwebheka noma ukupholisha ngokweqile ngamaphesenti afinyelela ku-20, ngokusho kwezilinganiso zemboni. Ukuhlanganiswa nohlelo lwe-PLC kwenza ukukala okuzenzakalelayo kanye nokulawula inqubo, kuqinisekisa ukuthi izakhiwo ze-slurry zihlala ngaphakathi kwamazinga afanele. Lokhu kuholela ekunciphiseni okungu-15-25% kwezindleko ezisetshenziswayo, isikhathi sokuphumula esincishisiwe, kanye nokufana kwe-wafer okuthuthukisiwe. Kwabahlinzeki Bezinsizakalo ze-Semiconductor kanye ne-CMP, lezi zinzuzo zihumusha ekukhiqizweni okuthuthukisiwe, izinzuzo eziphezulu, kanye nokuhambisana nezindinganiso ezifana ne-ISO 6976.

Imibuzo Evamile Mayelana Nokuqapha Udaka ku-CMP

Kungani ukulinganiswa kobuningi be-slurry kubalulekile ku-CMP?

Ukulinganiswa kobuningi be-slurry kuqinisekisa ukusatshalaliswa kwezinhlayiya ezifanayo kanye nokuvumelana kwenhlanganisela, kuvimbela amaphutha kanye nokwenza ngcono amazinga okususa enkambisweni yokupholisha ngomshini yamakhemikhali. Isekela ukukhiqizwa kwe-wafer esezingeni eliphezulu kanye nokuhambisana nezindinganiso zemboni.

Ukuqapha i-viscosity kuthuthukisa kanjani ukusebenza kahle kwe-CMP?

Ukuqapha ukujiya kugcina ukugeleza kodaka okuhambisanayo, kuvimbela izinkinga ezifana nokuvaleka kwamaphedi noma ukupholisha okungalingani. Izinzwa ezingaphakathi kwe-Lonnmeter zinikeza idatha yesikhathi sangempela ukuze kuthuthukiswe inqubo ye-CMP futhi kuthuthukiswe isivuno se-wafer.

Yini eyenza amamitha obuningi be-slurry angewona awenuzi eLonnmeter abe ahlukile?

Amamitha okulinganisa ukungcola okungeyona eyenuzi kaLonnmeter anikeza izilinganiso zobukhulu kanye nokulinganisa i-viscosity ngasikhathi sinye ngokunemba okuphezulu kanye nokugcinwa okungekho. Ukwakheka kwawo okuqinile kuqinisekisa ukuthembeka ezindaweni zenqubo ye-CMP ezidingayo.

Ukulinganiswa kobuningi be-slurry ngesikhathi sangempela kanye nokuqapha i-viscosity kubalulekile ekwenzeni ngcono inqubo yokupholisha imishini yamakhemikhali ekukhiqizweni kwe-semiconductor. Amamitha obuningi be-slurry angewona enuzi kanye nezinzwa ze-viscosity ze-Lonnmeter ahlinzeka Abakhiqizi Bemishini Ye-Semiconductor, Abaphakeli Bezinto Ezisetshenziswayo ze-CMP, kanye ne-Semiconductor Foundries ngamathuluzi okunqoba izinselele zokuphathwa kwe-slurry, ukunciphisa amaphutha, kanye nezindleko eziphansi. Ngokuletha idatha enembile, yesikhathi sangempela, lezi zixazululo zithuthukisa ukusebenza kahle kwenqubo, ziqinisekisa ukuthobela imithetho, futhi ziqhubekisela phambili inzuzo emakethe ye-CMP encintisanayo. VakashelaIwebhusayithi yeLonnmeternoma xhumana nethimba labo namuhla ukuze uthole ukuthi iLonnmeter ingawushintsha kanjani umsebenzi wakho wokupholisha ngomshini ngamakhemikhali.

Thatha Isinyathelo Manje

Isikhathi sokuthunyelwe: Julayi-22-2025