1. Kugadzirisa Mamiriro Ezvinhu ZvakadzamaPkupisa
Chii chinonzi CMP muSemiconductor?
Kupukuta kwemakemikari (CMP), kunozivikanwawo se chemical mechanical planarization, ndeimwe yemabasa akaomarara uye akakosha mune zvemari mukugadzira semiconductor yemazuva ano. Maitiro aya anoshanda senzira yakakosha yekusanganisa, achinyatso gadzirisa nzvimbo dzewafer kuburikidza nekushandiswa kwemakemikari ekucheka uye kukwesha muviri zvakanyanya. Inoshandiswa zvakanyanya mukugadzira, CMP yakakosha pakugadzirira mawafer e semiconductor ezvikamu zvinotevera, zvichigonesa zvakananga kubatanidzwa kwakanyanya kunodiwa nezvivakwa zvemhando yepamusoro.
CMP muSemiconductor Process
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Kudiwa kukuru kwekupukuta kwemakemikariyakavakirwa pazvinodiwa zvemuviri zve lithography yemazuva ano. Sezvo dunhu rakabatanidzwa riine kuderera uye ma layers akawanda akaungana akamira, kugona kwemaitiro ekubvisa zvinhu zvakaenzana uye kugadzira pamusoro wepasi rose kunova kwakakosha zvikuru. Musoro we dynamic polishing wakagadzirwa kuti utenderere nema axes akasiyana, uchienzanisa topography isina kurongeka pamusoro pe wafer. Kuti kutamiswa kwema pattern kubudirire, kunyanya nehunyanzvi hwepamusoro senge Extreme Ultraviolet (EUV) lithography, nzvimbo yese yakagadziriswa inofanira kuwira mukati mekudzika kwakamanikana kwemunda—geometric compension inoda Angstrom-level flatness kune tekinoroji dzemazuva ano dziri pasi pe 22 nm. Pasina simba rekuronga remaitiro e semiconductor e cmp, matanho anotevera ephotolithography aizoguma nekukundikana kwekuenzanisa, kukanganisa maitiro, uye kufambira mberi kwemhedzisiro yakaipa.
Kushandiswa kweCMP kwakawanda kwakakonzerwa zvikuru nekuchinja kweindasitiri kubva pakushandisa aluminium conductors kuenda ku copper interconnects dzinoshanda zvakanaka. Copper metallization inoshandisa nzira yekuwedzera mapatani, iyo Damascene technique, iyo inonyanya kuvimba nekugona kweCMP kubvisa copper yakawandisa nenzira yakasarudzwa uye yakafanana uye kumisa kubviswa kwayo nguva dzose panzvimbo chaiyo pakati pesimbi ne oxide insulating layer. Kubviswa uku kwezvinhu zvinosarudzwa zvakanyanya kunoratidza kuenzana kwemakemikari nemakemikari kunotsanangura maitiro acho, chiyero chinokanganisika nekukurumidza kunyangwe nekuchinja kudiki mu polishing medium.
Mabasa eCMP muSemiconductor Process
Chinodiwa chekuchinja-chinja kwenzvimbo zvakanyanya hakusi chinangwa chekunze asi chinodiwa kuti mudziyo ushande zvakanaka, kuve nechokwadi chekuti magetsi ari kufamba zvakanaka, kupisa kuri kupararira, uye kushanda zvakanaka muzvivakwa zvine mativi akawanda. Basa guru reCMP nderekutarisira nzvimbo, kusimbisa kuti zvinhu zvose zvinotevera zvinofanira kunge zvakati sandara.
Chikumbiro chaicho chinosarudza kusarudzwa kwezvinhu uye zvinoenderana nazvokuumbwa kwetsvinaMaitiro eCMP akagadzirwa kuti ashande zvinhu zvakasiyana-siyana, zvinosanganisira tungsten, mhangura, silicon dioxide (SiO2).2), uye silicon nitride (SiN). Maslurry akagadzirwa zvakanaka kuti akwanise kurongedza zvinhu zvakanaka uye kusarudza zvinhu zvakasiyana-siyana, kusanganisira Shallow Trench Isolation (STI) uye Interlayer Dielectrics (ILD). Semuenzaniso, slurry yeceria inoshanda zvakanyanya inoshandiswa zvakanyanya kumaapplication eILD nekuda kwekushanda kwayo kwepamusoro mukutsetseka, kufanana, uye kuderedza frequency yekukanganisa. Hunhu hwakanyanya hwemaslurry aya hunosimbisa kuti kusagadzikana kwemaitiro kunobva mukusiyana kwesimba remvura ye polishing medium kuchakanganisa pakarepo zvinodiwa zvekubvisa zvinhu zvakasarudzwa.
2. Basa Rakakosha reHutano hweCMP Slurry
CMP muSemiconductor Process
Kushanda zvakanaka kwenguva refu kwemaitiro ekugadzira makemikari ekupukuta kweCMPInoenderana zvizere nekuendeswa uye kushanda kwetsvina nguva dzose, iyo inoshanda senzira yakakosha inobatsira zvese zvinodiwa zvemakemikari uye kukweshana kwemuchina. Mvura iyi yakaoma, inozivikanwa se colloidal suspension, inofanira kugara ichiendesa zvikamu zvayo zvakakosha, kusanganisira makemikari (oxidizers, accelerators, uye corrosion inhibitors) uye nano-sized abrasive particles, kunzvimbo ine simba.
Kuumbwa kwetsvina kwakagadzirwa kuti kuite kuti pave nekuita kwemakemikari chaiwo: maitiro akanaka anoenderana nekugadzira ganda re oxide risinganyungudike pane chinhu chaunoda, iro rinozobviswa nemidziyo inorasika. Iyi nzira inopa sarudzo yepamusoro yepamusoro-soro yakakosha kuti pave nekurongwa kwakanaka, ichiisa chiito chekubvisa panzvimbo dzakakwirira kana kuti dzinobuda. Kusiyana neizvi, kana mhinduro yemakemikari ikaburitsa mamiriro e oxide inonyungudika, kubviswa kwezvinhu kunenge kuri isotropic, nokudaro kuchibvisa sarudzo inodiwa ye topographic. Zvikamu zvemuviri zvetsvina zvinowanzova nezvidimbu zvinorasika (semuenzaniso, silica, ceria) zvinosiyana kubva pa30 kusvika 200 nm, zvakamiswa pahuwandu huri pakati pe0.3 ne12 huremu muzana wezvinhu zvakasimba.
CMP Slurry Semiconductor
Kuchengetedza hutano hweCMP slurry semiconductorinoda hunhu husingaperi uye kutonga mukati mehupenyu hwayo hwese, sezvo chero kuora kupi zvako panguva yekubata kana kutenderera kunogona kukonzera kurasikirwa kukuru kwemari. Hunhu hwewafer yekupedzisira yakakweshwa, inotsanangurwa nekupfava kwayo uye mazinga ekukuvara, inoenderana zvakananga nekusimba kwekugoverwa kwehukuru hweslurry (PSD) uye kugadzikana kwese.
Hunhu hwakasiyana hwezvinhu zvakasiyana-siyanamhando dze cmp slurryzvinoreva kuti zvidimbu zve nano-size zvinogadzikiswa nemasimba emagetsi anodzinga mukati me suspension. Slurries dzinowanzo pihwa muchimiro chakasimba uye dzinoda kusanganiswa kwakanyatsojeka nemvura uye oxidizers panzvimbo yekugadzira. Zvakakosha kuti, kuvimba ne static blending ratios hazvina kunaka nekuti zvinhu zvinouya zvine concentrated zvinoratidza kusiyana kwe batch-to-batch density.
Kuti zvinhu zvidzorwe, nepo kuongorora zvakananga kwePSD uye zeta potential (colloidal stability) kuchikosha, matekiniki aya anowanzo shandiswa pakuongorora kusingaenderane nezvinodiwa nemunhu. Kushanda kwenzvimbo yeHVM kunoda mhinduro chaiyo uye pakarepo. Nekuda kweizvozvo, density uye viscosity zvinoshanda senzira dzinoshanda uye dzinoshanda dzekuchengetedza hutano hweslurry. Density inopa chiyero chinokurumidza, chinoenderera mberi chehuwandu hwezvinhu zvine abrasive solids munzvimbo iyi. Viscosity yakakosha zvakaenzana, ichishanda sechiratidzo chinonzwisisika chemamiriro e colloidal emvura uye thermal integrity. Viscosity isina kugadzikana inowanzo ratidza abrasive particle.kuunganakana kubatanidzwazve, kunyanya pasi pemamiriro ekuchekwa kwemvura. Nokudaro, kutarisa nekudzora nguva dzose ma rheological parameters maviri aya kunopa mukana wekukurumidza, unoshanda wemhinduro unodiwa kuti uone kuti slurry inochengetedza mamiriro ayo emakemikari neemuviri panguva yekushandisa.
3. Kuongorora Kukundikana Kwemakanika: Zvinokonzera Kukanganisika
Migumisiro Yakaipa Inokonzerwa neKuwanda kweCMP uye Kuchinja-chinja kweViscosity
Kuchinja-chinja kwemaitiro kunozivikanwa sechimwe chezvinhu zvikuru zvinokonzera njodzi muhuwandu hwezvinhu zvinobudacmp mukugadzira semiconductorHunhu hwetsvina, hunonzi "hutano hwetsvina," hunonyanya kukanganiswa nekuchinja kunokonzerwa nekuchekwa kwepombi, kuchinja-chinja kwetembiricha, uye kusawirirana kwekubatanidza. Kukundikana kunobva muhurongwa hwekuyerera kwetsvina kwakasiyana nematambudziko emakanika chete, asi zvese zvinoguma netsvina yakakosha yewafer uye zvinowanzoonekwa chete kunonoka nehurongwa hwekupedzisira mushure mekuita.
Kuvapo kwezvimedu zvakakura kana kuti ma agglomerates mucmp semiconductorzvinhu zvakabatana zvakajeka nekuumbwa kwemavanga madiki nezvimwe zvikanganiso zvinouraya pamusoro pewafer yakakweshwa. Kuchinja-chinja kwezvikamu zvakakosha zverheological - viscosity uye density - ndizvo zvinoramba zvichiratidza kuti slurry yakanganiswa, zvichitanga maitiro ekuumbwa kwezvikanganiso.
Kuchinja-chinja kweSlurry Viscosity (semuenzaniso, zvichikonzera agglomeration, changed shear)
Viscosity imhando yethermodynamic inodzora maitiro ekuyerera kwemvura uye kukweshana kwemhepo panzvimbo yekukwesha, zvichiita kuti ive nehanya zvakanyanya nekumanikidzwa kwezvakatipoteredza uye kwemakanika.
Mashandiro emakemikari nemuvirisemiconductor yekusvira kweslurrySisitimu iyi inonyanya kuvimba nekudzora tembiricha. Tsvagiridzo inosimbisa kuti kunyangwe kuchinja kwe5°C mukupisa kwemaitiro kunogona kutungamira kudzikira kwe10% muhunyoro hweslurry. Kuchinja uku mu rheology kunokanganisa zvakananga ukobvu hwe hydrodynamic film inoparadzanisa wafer kubva pa polishing pad. Kudzikira kwehunyoro kunotungamira mukusakwana kwemafuta, zvichikonzera kukweshana kwakanyanya kwemuchina, chikonzero chikuru chekukweshana kudiki uye kushandiswa kwepedhi nekukurumidza.
Nzira yekuparadzana kwakakosha inosanganisira kuunganidzwa kwezvikamu zvinokonzerwa nekucheka. Zvimedu zvakagadzirwa nesilika zvinochengetedza kupatsanurwa kwezvikamu kuburikidza nemasimba ekudzivirira emagetsi. Kana slurry ikasangana nekumanikidzwa kwakanyanya kwekucheka—kunowanzo konzerwa nemapombi asina kunaka epakati pemagetsi kana kutenderera kwakawanda muchikamu chekugovera—masimba aya anogona kukundwa, zvichikonzera kukurumidza uye kusadzoreka.kuunganazvezvimedu zvinokwesha. Zvikamu zvikuru zvinobva zvabuda zvinoshanda sezvishandiso zvekuboora zvidiki, zvichigadzira zvakananga mavanga madiki anotyisa pamusoro pewafer. Viscometry yenguva chaiyo ndiyo nzira inodiwa yekuona zviitiko izvi, zvichipa humbowo hwakakosha hwe "hunyoro" hwesystem yekupomba nekuparadzira usati wagadzira zvikanganiso zvakakura.
Kusiyana kwe viscosity kunokonzerawo kukanganisa zvakanyanya kushanda kwe planarization. Sezvo viscosity iri chinhu chikuru chinokanganisa coefficient of friction panguva yekupolisha, viscosity profile isina kufanana inotungamira kune mwero wekubvisa zvinhu usingawirirane. Kuwedzera kwe viscosity munzvimbo, kunyanya pahuwandu hwe shear rates hunoitika pamusoro pemhando yepamusoro ye wafer topography, kunochinja friction dynamics uye kunokanganisa chinangwa che planarization, zvichizopedzisira zvaita kuti pave nezvikanganiso zvakaita se dishing uye erosion.
Kuchinja-chinja kweSlurry Density
Kuwanda kwetsvina chiratidzo chinokurumidza uye chakavimbika chehuwandu hwezvinhu zvakasimba zvinorembera mumvura. Kuchinja-chinja kwehuwandu hwetsvina kunoratidza kuendeswa kwetsvina kusina kufanana, izvo zvakabatana nekuchinja kwehuwandu hwekubvisa zvinhu (MRR) uye kuumbwa kwezvikanganiso.
Nzvimbo dzekushanda dzinoda kuongororwa kwakasimba kwehuwandu hwetsvina. Kuvimba chete nekuwedzera huwandu hwakatarwa hwemvura neoxidizer kumabheti anouya akaomeswa hazvina kukwana, sezvo huwandu hwezvinhu zvakagadziriswa hunowanzo chinja, zvichikonzera mhedzisiro isingaenderane pabasa rekushandisa. Uyezve, zvidimbu zvinoputika, kunyanya zvidimbu zveceria zvakanyanya, zvinogona kunyura kana kumhanya kwekuyerera kana kugadzikana kwecolloidal kusina kukwana. Kugadzikana uku kunogadzira ma gradients elocalized density uye kuunganidzwa kwezvinhu mukati memitsetse yekuyerera, zvichikanganisa zvakanyanya kugona kupa mutoro unogara wakasimba.
How DhuwanduDkubhururukaAffzvimwe zvinhu ManufacturingProcess?.
Migumisiro yakananga yekuwanda kweslurry isina kugadzikana inoratidzwa sezvikanganiso zvakakosha zvemuviri pamusoro wakakwenenzverwa:
Mitengo Yekubvisa Isingaenderane (WIWNU):Kusiyana kwehuwandu hwezvinhu kunoshandura zvakananga mukuchinja kwehuwandu hwezvinhu zvinobata abrasive zvinoratidzwa panzvimbo yekupolisha. Kuwanda kwechinhu kushoma pane kwakatsanangurwa kunoratidza kudzikira kwehuwandu hwezvinhu zvinobata abrasive, izvo zvinoguma nekudzikira kweMRR uye zvinogadzira kusawirirana kusingagamuchirwi mukati mewafer (WIWNU). WIWNU inokanganisa chinodiwa chekuronga zvinhu. Kusiyana neizvi, kuwanda kwakanyanya kunowedzera mutoro wezvinhu zvinobata abrasive, zvichikonzera kubviswa kwezvinhu zvakanyanya. Kudzora kwakasimba kwehuwandu hwezvinhu kunoita kuti pave nekupararira kwakasimba, izvo zvinoenderana zvakasimba nemasimba ekukweshana akagadzikana uye MRR inofungidzirwa.
Kukanda Nekuda Kwekusiyana Kwekugumbura Kwenzvimbo:Kuwanda kwemafuta abrasive solids munzvimbo iyoyo, kazhinji nekuda kwekugadzika kana kusasanganiswa zvakanaka, kunotungamira kune mutoro wakawanda uripo pachikamu chimwe nechimwe pamusoro pewafer. Kana zvidimbu zvinobrasive, kunyanya ceria, zvikanamatira zvakasimba pagirazi reoxide, uye kushushikana kwepamusoro kuripo, mutoro wemakanika unogona kukonzera girazi kutsemuka, zvichikonzera kudzika, kwakapinza.kuisa gombaZvikanganiso. Kuchinja uku kunogona kukonzerwa nekusefa kusina kunaka, zvichibvumira ma aggregates makuru (tinhu tunopfuura $0.5\\mu m$) kuti tipfuure, zvichikonzerwa nekusagadzikana kwetinhu tunomira. Kutarisa kuwanda kwezvinhu kunopa sisitimu yekunyevera inokosha, inoenderana nezvikamu zvezvinhu, zvichibvumira mainjiniya ekugadzirisa kuona kutanga kwekuunganidza zvinhu uye kudzikamisa mutoro we abrasive.
Kuumbwa Kwezvisaririra Kubva Mukusagadzikana Kwezvisaririra Zvisina Kunaka:Kana kusungirirwa kusina kugadzikana, zvichikonzera kuwanda kwehuwandu hwemagetsi, zvinhu zvakasimba zvinowanzounganidzwa muhurongwa hwekuyerera kwemvura, zvichikonzera kuwanda kwemafungu uye kuunganidzwa kwezvinhu muhurongwa hwekugovera.17Uyezve, panguva yekupukuta, slurry inofanira kutakura zvinobudirira zvese zvigadzirwa zvemakemikari uye marara ekusakara kwemuchina. Kana slurry yeparticle kana fluid dynamics zvisina kunaka nekuda kwekusagadzikana, zvasara izvi hazvibviswi zvakanaka kubva pamusoro pewafer, zvichikonzera post-CMP particle uye chemical.zvakasaraKuremara. Kumiswa kwezvikamu zvakagadzikana, kunovimbiswa nekutarisa rheological nguva dzose, kunodiwa kuti zvinhu zvibude zvakachena uye nguva dzose.
Dzidza NezveMamwe Mamita Ehuremu
Mamwe Mamita Emaitiro Epamhepo
4. Kubudirira kweInline Metrology paUnyanzvi
Lonnmeter Inline Densitometers & Viscometers
Kuti kugadzikana kweCMP kugadzikane zvakanaka, kuyerwa kwezviyero zvehutano hweslurry kunoramba kuripo, kusingapindiki kwakakosha.Lonnmeter Inline Densitometers & ViscometersInoshandisa tekinoroji yepamusoro-soro ye resonant sensor, ichipa mashandiro akanaka kwazvo kana tichienzanisa nemidziyo yechinyakare, inokurumidza kunonoka. Kugona uku kunogonesa kutarisa kwehuwandu hwemagetsi zvisina musono uye nguva dzose kwakabatana zvakananga munzira yekuyerera, izvo zvakakosha kuti isangane nemazinga ekuchena kwakasimba uye ekuenzanisa kwekuenzanisa kwemaitiro emazuva ano e sub-28nm process nodes.
Tsanangura misimboti yavo mikuru yetekinoroji, kunyatsoyera, kumhanya kwekupindura, kugadzikana, kuvimbika munzvimbo dzakaoma dzeCMP, uye uvasiyanise nenzira dzechinyakare dzisina pamhepo.
Kushanda otomatiki kwemaitiro kunoda kuti masensa akagadzirwa kuti ashande zvakanaka pasi pemamiriro ezvinhu anochinja-chinja ekufamba kwakanyanya, kumanikidzwa kwakanyanya, uye kusangana nemakemikari anogumbura, zvichipa mhinduro pakarepo kune masisitimu ekudzora.
Nheyo dzeTekinoroji Yepakati: Kubatsira kweResonator
Zvishandiso zveLonnmeter zvinoshandisa matekinoroji akasimba e resonant akagadzirirwa kuderedza kusasimba kuripo kwema U-tube densitometers echinyakare, ane narrow-bore, ayo anozivikanwa nedambudziko pakushandiswa mukati memutsara ne abrasive colloidal suspensions.
Kuyerwa kwehuwandu hwevanhu:Iyomita yekuyera kuwanda kweslurryinoshandisa chinhu chinodedera chakabatanidzwa zvizere, kazhinji kacho chinosanganisira forogo kana co-axial resonator. Chinhu ichi chinosimudzirwa ne piezo-electrically kuti chitenderere pahuwandu hwacho hwechisikigo. Kuchinja kwehuwandu hwemvura yakapoteredza kunokonzera kuchinja kwakanyatsojeka kwehuwandu hwechisikigo, zvichibvumira kuona huwandu hwacho zvakananga uye hwakavimbika.
Kuyerwa kweViscosity:IyoViscometer yekuchenesa slurry iri mukati mekuita basainoshandisa sensor yakasimba inotenderera mukati memvura. Dhizaini yacho inoita kuti kuyerwa kwe viscosity kubviswe kubva pamigumisiro yekuyerera kwemvura yakawanda, zvichipa chiyero chemukati che rheology yezvinhu.
Kushanda uye Kusimba Kwekushanda
Inline resonant metrology inopa zviyero zvakakosha zvekushanda zvakakosha pakudzora HVM zvakasimba:
Kukurumidza Kushanda Nemazvo uye Kupindura:Masisitimu ari mukati memutsetse anogona kudzokorora zvakanyanya, kazhinji achisvika pa 0.1% pakukora uye kusimba kwehuwandu kusvika pa 0.001 g/cc. Kuti zvinhu zvidzorerwe zvakasimba, izvi zvinosvika pakakwirira.kunyatsoita zvinhu nemazvo—kukwanisa kuyera kukosha kwakafanana nguva dzose uye kuona zvikanganiso zvidiki nenzira yakavimbika—kazhinji kunokosha kupfuura kunyatsorurama kwemukati. Chinokosha ndechekuti, chiratidzonguva yekupinduraKune ma sensor aya anokurumidza zvikuru, kazhinji anenge masekonzi mashanu. Mhinduro iyi inongoerekana yaitika inobvumira kuona kukanganisa nekukasika uye kugadzirisa otomatiki closed-loop, chinhu chikuru chinodiwa pakudzivirira kufamba.
Kugadzikana uye Kuvimbika Munzvimbo Dzakaoma:MaCMP slurry anongogara achirwisa. Zvishandiso zvemazuva ano zvakagadzirwa kuti zvikwanise kusimba, zvichishandisa zvinhu zvakati wandei uye magadzirirwo ekuiswa zvakananga mumapaipi. Masensa aya akagadzirirwa kushanda munzvimbo dzakasiyana-siyana (semuenzaniso, kusvika 6.4 MPa) uye tembiricha (kusvika 350 ℃). Dhizaini isiri yeU-tube inoderedza nzvimbo dzakafa uye njodzi dzekuvhara dzinosanganisirwa ne abrasive media, zvichiwedzera nguva yekushanda kwemasensa uye kuvimbika kwekushanda.
Kusiyanisa kubva kuNzira dzechinyakare dzeOffline
Kusiyana kwebasa riripo pakati pemasystem e-inline otomatiki uye nzira dzekushandisa manual offline kunotsanangura musiyano uripo pakati pe reactive defect control uye proactive process optimization.
| Chiyero cheKutarisa | Hapana Basa (Kuyedza Kuenzanisa muLab/U-Tube Densitometer) | Mutsetse (Lonnmeter Densitometer/Viscometer) | Mhedzisiro Yemaitiro |
| Kumhanya Kwekuyerwa | Kunonoka (Maawa) | Nguva Yechokwadi, Inoenderera mberi (Nguva yekupindura kazhinji masekondi mashanu) | Inobvumira kudzora maitiro ekudzivirira, akavharwa. |
| Kuenderana/Kururama kweData | Yakaderera (Inogona kukanganisa nemaoko, kuparadzwa kwemuenzaniso) | Yakakwirira (Inozvigadzira yoga, inodzokororwa/yakanyatsojeka) | Miganhu yekudzora maitiro akaomarara uye kuderedza zviratidzo zvenhema. |
| Kuenderana kweAbrasive | Njodzi huru yekuvharika kwevhu (Dhizaini yeburi reU-tube rakamanikana) | Njodzi shoma yekuvharika (Dhizaini yakasimba, isiri yeU-tube resonator) | Kushanda kwenguva refu kwesensa uye kuvimbika kwayo mumidziyo inokwevera. |
| Kugona Kuona Mhosva | Reactive (inoona nzendo dzakaitika maawa apfuura) | Kushanda (kunotarisa shanduko dzinochinja, kuona mafambiro enguva pfupi) | Inodzivirira zvimedu zvewafer zvinokuvadza uye inoburitsa mafambiro asina kunaka. |
Tafura 3: Kuongorora Kuenzanisa: Inline vs. Traditional Slurry Metrology
Kuongorora kwekare kusingashandisirwe kombiyuta kunoda kuti sampuli ibviswe uye kutakurwa kwayo, zvichikonzera nguva yakawandisa mu metrology loop. Kunonoka uku, uko kunogona kutora maawa akawanda, kunoita kuti kana rwendo rwaonekwa, huwandu hwakawanda hwema wafers hwatove hwakakanganisika. Uyezve, kubata nemaoko kunounza kusiyana uye njodzi yekudzikira kwesampuli, kunyanya nekuda kwekuchinja kwetembiricha mushure mekutorwa kwesampuli, izvo zvinogona kukanganisa kuverenga kwe viscosity.
Inline metrology inobvisa kunonoka uku kunonetesa, ichipa ruzivo rwunogara ruchienderera mberi kubva kumutsara wekugovera. Kumhanya uku kwakakosha pakuona zvikanganiso; kana zvikabatanidzwa nedhizaini yakasimba, isingavharike yakakosha yezvinhu zvinokwesha, inopa data rakavimbika rekudzikamisa sisitimu yese yekugovera. Kunyange zvazvo kuoma kweCMP kuchiraira kutarisa maparameter akawanda (akadai se refractive index kana pH), density uye viscosity zvinopa mhinduro yakananga, chaiyo-nguva pakugadzikana kwemuviri kwe abrasive suspension, iyo inowanzo shaya hanya nekuchinja kwemaparameter senge pH kana Oxidation-Reduction Potential (ORP) nekuda kwe chemical buffering.
5. Zvinodiwa paKushanda Kwemari
Mabhenefiti eKutarisa Kuwanda Kwezvinhu Munguva Yechokwadi uye Kusviba
Kune chero tambo yekugadzira yepamusoro apoCMP mukuita kwe semiconductorKana ikashandiswa, kubudirira kunoyerwa nekuvandudzwa kwegoho rinoenderera mberi, kugadzikana kwakanyanya kwemaitiro, uye manejimendi emari akasimba. Kutarisa rheological panguva chaiyo kunopa ruzivo rwakakosha runodiwa kuti zvizadzise zvinodiwa zvebhizinesi izvi.
Inowedzera Kugadzikana Kwemaitiro
Kutarisa slurry nguva dzose, kwakanyatsojeka kunovimbisa kuti ma parameter e critical slurry anopiwa panzvimbo yekushandisa (POU) anoramba ari mukati memiganhu yekudzora yakasimba, pasinei neruzha rwekuita. Semuenzaniso, tichifunga nezvekusiyana kwehuwandu huri muzvikamu zveslurry zvinouya, kungotevera resipi hazvina kukwana. Nekutarisa huwandu mu blender tank munguva chaiyo, system yekudzora inogona kugadzirisa dilution ratios, ichiva nechokwadi chekuti concentration chaiyo inochengetwa mukati menguva yese yekusanganisa. Izvi zvinoderedza zvakanyanya kusiyana kwemaitiro kunobva muzvinhu zvisina kurongeka, zvichitungamira kukuita kwekupukuta kunofungidzirwa zvakanyanya uye kuderedza zvakanyanya kuwanda uye hukuru hwekufamba kunodhura kwemaitiro.
Inowedzera Goho
Kugadzirisa zvakananga kutadza kwemakemikari nemakemikari kunokonzerwa nemamiriro ekunze asina kugadzikana ndiyo nzira inonyanya kubatsira yekusimudzirakugadzirwa kwe semiconductor ye cmpmwero wegoho. Masisitimu ekutarisa anofungidzira, anoshanda panguva chaiyo, anodzivirira chigadzirwa chakakosha. MaFabs akaisa masisitimu akadaro akanyora kubudirira kukuru, kusanganisira mishumo yekuderera kusvika ku25% mukubuda kwezvikanganiso. Kugona uku kwekudzivirira kunochinja nzira yekushanda kubva pakuita zvikanganiso zvisingadzivisike kuenda pakudzivirira kuumbwa kwazvo, nokudaro kudzivirira mamiriyoni emadhora emawafer kubva pakukwenya kudiki uye kumwe kukuvara kunokonzerwa nemapoka ezvimedu asina kugadzikana. Kugona kutarisa shanduko dzinoshanduka, dzakadai sekudonha kamwe kamwe kweviscosity kunoratidza kupisa kana kusvuta, kunogonesa kupindira zvinhu izvi zvisati zvaparadzira zvikanganiso mumawafer akawanda.
Inoderedza Kugadziriswazve
Chigadzirwa chachogadzira patsvachiyero, chinotsanangurwa sehuwandu hwechigadzirwa chakagadzirwa chinoda kugadziriswazve nekuda kwezvikanganiso kana zvikanganiso, iKPI yakakosha inoyera kusashanda zvakanaka kwekugadzira. Kugadziriswa kwepamusoro kunotora basa rinokosha, zvinhu zvinoraswa, uye kunounza kunonoka kukuru. Nekuti zvikanganiso zvakaita sekudhira, kubviswa kusina kufanana, uye kukwenya mhedzisiro yakananga yekusagadzikana kwerheological, kudzikamisa kuyerera kweslurry kuburikidza nekuwanda kwakawanda uye kudzora viscosity kunoderedza zvakanyanya kutanga kwezvikanganiso izvi zvakakosha. Nekuona kugadzikana kwemaitiro, kuwanda kwezvikanganiso zvinoda kugadziriswa kana kuporishwazve kunoderedzwa, zvichikonzera kuwedzera kushanda zvakanaka uye kushanda zvakanaka kwechikwata chose.
Inogadzirisa Mari Yekushanda
Matsvina eCMP anodhura zvakanyanya mukugadzirwa. Kana kusava nechokwadi kwemaitiro kuchireva kushandiswa kwemiganhu yakakura, yekuchengetedza musanganiswa nekushandiswa, mhedzisiro yacho ikushandiswa zvisina kunaka uye mari yakawanda yekushanda. Kutarisa kwenguva chaiyo kunogonesa manejimendi etsvina asina kusimba uye akarurama. Semuenzaniso, kudzora nguva dzose kunobvumira kusanganiswa kwakaringana, kuderedza kushandiswa kwemvura yakasanganiswa uye kuve nechokwadi chekuti inodhura.cmp slurry musanganiswainoshandiswa zvakanaka, zvichideredza marara ezvinhu uye mari inoshandiswa pakushanda. Uyezve, kuongororwa kwemapfupa panguva chaiyo kunogona kupa yambiro yekutanga yezvinetso zvemidziyo—sekunge mapedhi akasakara kana kukundikana kwepombi—izvo zvinoita kuti kugadziriswa kuenderane nemamiriro ezvinhu kusati kwakonzera dambudziko guru uye nguva inotevera yekushanda irege kushanda.
Kugadzirwa kwenguva refu kunoda kubviswa kwekushanduka-shanduka mumabasa ese akakosha eyuniti. Tekinoroji yeLonnmeter resonant inopa kusimba, kumhanya, uye kunyatsojeka kunodiwa kuti ibvise njodzi yekugadzirwa kweslurry. Nekubatanidza data renguva chaiyo uye viscosity, mainjiniya eprocesses ane hungwaru hunogara huripo, hunogona kushanda, huchivimbisa kushanda kwekugadzirisa kunofungidzirwa uye huchidzivirira kubuda kwewafer kubva pakusagadzikana kwecolloidal.
Kutanga shanduko kubva pakugadzirisa purofiti kuenda pakudzora purofiti:
Wedzera simba rakoNguva yekushanda uyeDeredzaKugadzirisazve:DhawunirodhaMagadzirirwo Edu Ehunyanzvi uyeTangaRFQ Nhasi.
Tinokoka mainjiniya vakuru vekugadzira zvinhu nekugadzira zvinhu kutitumiraRFQ yakadzama. Nyanzvi dzedu dzehunyanzvi dzichagadzira nzira chaiyo yekushandisa, dzichibatanidza tekinoroji yeLonnmeter yakanyatsogadzirwa muzvivakwa zvako zvekugovera slurry kuti dziverenge kudzikira kwakafungidzirwa kwehuwandu hwemapundu uye kushandiswa kweslurry.Bata nesuChikwata chedu cheProcess Automation ikozvino kutichengetedzamukana wako wekuwana goho.Tsvagakunyatsojeka kunodiwa kuti usimbise danho rako rakakosha rekuronga.
