Kuyera kuyerera kwemvura kwakakosha pakucheka waya ye silicon wafer diamond, sezvo zvichiita kuti mvura yekucheka isvike zvakanaka kune waya-wafer interface—zvakakosha pakuchengetedza kutonhora kwakanaka, mafuta, uye kubviswa kwemarara.RRuzivo rwekufamba kwenguva yemagetsi runodzivirira kuwanikwa kwemvura yakakwana kana yakawandisa, izvo zvaizokonzera kupisa zvakanyanya, kupwanyika kwewaya, zvikanganiso zvepadenga, kana marara. Kuyera nemazvo kunoderedza kusiyana kwemaitiro, kuchengetedza kusatsetseka kwewafa uye kusimba kwepadenga, kuwedzera hupenyu hwewaya, uye kunovandudza kushanda zvakanaka kwezviwanikwa.
Pfupiso yeKucheka kweSilicon Wafer uye Basa reKucheka Mvura
Kucheka waya yedhaimani ndiyo nzira inonyanya kushandiswa pakucheka monocrystalline nemulticrystalline silicon ingots muwafers kuti zvishandiswe semiconductor uye photovoltaic. Mukuita uku, waya yesimbi—inowanzova 40–70 μm mudhayamita—inoputirwa nedhaimani abrasive grains. Waya inofamba nekumhanya kwakanyanya, uye madhaimani akaiswa mukati anokwesha silicon nekukwesha, zvichideredza zvikanganiso pamusoro uye zvichisimudzira kufanana kwewafer. Waya dzakaderedzwa dhayamita dzakaunzwa mumakore achangopfuura dzinoderedza kurasikirwa kwekerf, zvinoreva kuti zvinhu zvinoraswa sezvidimbu zvesilicon zvakanaka panguva yekucheka. Kurasikirwa kwekerf kunotsanangurwa nedhayamita yewaya uye kukwirira kwezviyo zvinokwesha zvinobuda pamusoro pewaya.
Kucheka Waya yeDaimondi
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Kucheka mvura kunoita mabasa akakosha mukucheka waya yedhaimani. Basa rayo guru nderekutonhodza ingot newaya, kudzivirira kupisa kunogona kukanganisa silicon kana kuderedza hupenyu hwewaya. Inosukawo zvidimbu zvesilicon zvidiki zvinogadzirwa panguva yekucheka, izvo zvinobatsira kuchengetedza chimiro chakachena, kudzivirira kudzoreredzwa kwemarara, uye kuderedza kuputika kwepamusoro kwewafer. Uyezve, kucheka mvura kunonyorovesa maitiro acho, kuderedza kukweshana pakati pewaya nesilicon, nokudaro kuchiwedzera hupenyu hwewaya uye kunatsiridza kunaka kwekucheka. Maumbirwo uye hunhu hwemuviri hwemvura yekucheka silicon wafer—senge viscosity uye density—zvinofanirwa kutarisirwa nokungwarira kuti kutonhodza kuwedzere, kubvisa chips, uye kudzivirira waya.
Kune mhando dzakasiyana-siyana dzemvura dzinochekwa newafer, kusanganisira mvura inobva mumvura ine zvinowedzerwa kuti iwedzere mafuta uye inomisa simbi. Sarudzo yacho inoenderana nekugadzirwa kwemidziyo, zvinodiwa newafer, uye zvipingamupinyi zvakatipoteredza. Mienzaniso inosanganisira mvura isina ion ine ma surfactants kana ma glycols, yakagadzirwa kuti ienzanise kushanda zvakanaka kwekutonhodza nekuumbwa kwemarara mashoma.
Kuchinja kwewaya dzedhaimani dzakatetepa zvikuru muzvigayo zvemazuva ano zvewafer kunowedzera matambudziko mukutumira mvura uye kudzora maitiro. Sezvo dhayamita dzewaya dzichiderera pasi pe40 μm, njodzi yekutyoka kwewaya inowedzera uye kushivirira kwekushanduka kwemaitiro kunowedzera. Kuyera mwero wekuyerera kwakarurama—kunotsigirwa nematekinoroji akadai sekucheka mita yekuyerera kwemvura, masensa ekuyera kuyerera kwakanyatsojeka, uye masensa ekuyerera kweCoriolis—zvakakosha kuchengetedza kutonhora kwakanaka uye kubviswa kwemarara. Masensa ekucheka mvura uye mhinduro dzekuyera kuyerera kwemvura dzekucheka kweindasitiri dzinobvumira vashandisi kuteedzera nekugadzirisa mwero wekuyerera munguva chaiyo, vachiwana kunyorovesa kwakakwana uye kunaka kwepamusoro. Kururama kweCoriolis flow metres kwakakosha zvikuru pakutarisira mvura ine huwandu hwakasiyana uye viscosities, kuve nechokwadi chekuti mamiriro ezvinhu akafanana kunyangwe kumhanya kwekucheka uye kushushikana kwewaya kuchikwira.
Kuwanda kwekuda kwekururama kwachinja kutarisa kune dynamic fluid parameters dzakadai se flow rate, density, uye viscosity. Zvishandiso zvakaita sezviya zvinobva kuLonnmeter zvinopa zviyero zvakavimbika, zvenguva chaiyo izvo zvakakosha pakuvimbisa mhando uye kugadzirisa maitiro mumabasa ekucheka waya dzedhaimani. Sezvo tekinoroji yewaya ichiramba ichifambira mberi, kubatanidzwa kwetekinoroji dzakasimba dzekuyera kuyerera kwakakosha pakuchengetedza wafer throughput, kuderedza kurasikirwa kwekerf, uye kuderedza zvinodiwa zvekupedzisira zvekugadzira wafer dzesilicon.
Matambudziko ekutumira mvura mukucheka waya dzedhaimani nemazvo
Mukucheka waya yedhaimani yewaya dzesilicon dzakatetepa zvikuru—kunyanya idzo dziri pasi pe40 µm—kuendesa huwandu hwakakwana hwesilicon wafer cutting fluid kunzvimbo yekucheka inova dambudziko guru. Sezvo ukobvu hwewaya huchiderera, nzvimbo yekuyerera kwemvura inodererawo. Kuchengetedza huwandu hwemvura inocheka nguva dzose kwakakosha kuti uve nechokwadi chekuti mafuta anonyoroveswa, kudzora tembiricha, uye kubviswa kwemarara panzvimbo yekubata.
Kuyerera kwemvura kusina kurongeka kana kusakwana kunotungamira zvakananga mukunyungudika kwewafer, uko wafer inonamatira zvisingadiwe pamidziyo nekuda kwekunyoroveswa kwakakwana. Izvi hazvingokanganisi maitiro ekucheka chete asiwo zvinowedzera njodzi yekutyoka kana kukuvara kwewafer. Kuomarara kwepamusoro kunokwira zvakanyanya kana waya newafer zvisingagamuchire mafuta anoramba achinyoroveswa uye kutonhora kubva mumvura yekucheka waya yedhaimani. Nzvimbo dzakakuvara uye zvikanganiso zvidiki zvinokonzeresa kunaka kwewafer uye goho, zvichikonzera zvipingamupinyi zvikuru kumaindasitiri e semiconductor ne photovoltaic.
Zvinhu zvitatu zvikuru zvinokanganisa kupinda kwemvura muchikamu chidiki chekucheka: jira, kumhanya kwekucheka, uye kushanda kwe capillary. Wire geometry—kunyanya dhayamita yewaya uye kupararira kwedhaimani—zvinopesvedzera zvakananga kuti mvura yekucheka silicon wafer inoyerera zviri nyore sei uye inonamatira kunzvimbo yekubatana. Paunoshandisa waya dziri pasi pe40 µm, nzvimbo diki yekumusoro inodzivisa kufamba kwemvura. Kumhanya kwakanyanya kwekucheka kunoderedza nguva iripo yekuti mvura isvike uye itonhore interface, zvichikonzera kupisa kwakanyanya uye mafuta asina kunaka. Kushanda kwe capillary, kugona kwechisikigo kwemvura kukweverwa munzvimbo dzakamanikana, kunosarudza zvakanyanya kuchengetedza mvura. Zvisinei, mabhiriji emvura akafanana anowedzera kutakura mvura anogona kuunza kubatana kwe capillary pakati pewaya dziri pedyo, zvichikonzera kusagadzikana kusina kufanana uye kuwedzera kusiyana kweukobvu hwe wafer.
Kuunzwa kwemhando dzemhando dzemvura dzinochekwa newafer dzakagadzirwa nepamusoro-soro—kusanganisira mhinduro dzinowedzerwa nenanoparticles—kunopa kuvandudzwa kunoyerwa. Mvura dzakagadzirwa neSiO₂ kana SiC nanoparticles dzinopinda munzvimbo dzakamanikana zvinobudirira nekuda kwekunaka kwe viscosity uye kudyidzana kwepamusoro. Mvura idzi dzinowedzera mafuta uye dzinotakura kupisa zvinobudirira, zvichikonzera kusarongeka kwepamusoro uye kuvandudzika kwewafer. Tsvagiridzo inoratidza kuti kushandisa mvura dzine nanoparticles kunochinja tembiricha panguva yekucheka, zvichideredza kushushikana kunotyisidzira kusimba kwewafer. Izvi, pamwe chete nenzira dzakadai sekutinhira kwe ultrasonic kuti zviwedzere kutakurwa kwe capillary, zvinobvumira kuendeswa kwemvura yekucheka waya yedhaimani yakafanana.
Kuendesa mvura nguva dzose kunoda kutariswa uye kugadziriswa kwakarurama, uye panguva chaiyo. Kuyera kuyerera kwemvura yekucheka kweindasitiri nemazvo kunova kwakakosha, kunyanya mumabasa anodzorwa zvakasimba. Kushandisa chiyereso chemvura yekucheka—senge chiyereso chekuyera kuyerera kweCoriolis mass—kunogonesa kudzora kwakarurama kwehuwandu hwekutumira. Mita dzeLonnmeter dze inline density uye viscosity, kana dzakabatana nezvishandiso zvekuyera kuyerera kwemvura nemazvo, zvinobatsira mukuvandudza kupihwa kwemvura kuitira kuti kunyange mawafers akatetepa anochekwa zvakanaka, nenjodzi shoma yekukanganisa.
Kuyerwa kwemvura mumabasa ekucheka maWafer
Kuyera mwero wekuyerera kwakarurama kwakakosha pakugadzirisa kutumirwa kwemvura inochekwa pakuchekwa kwewaya yedhaimani yesilicon wafers. Kushanda kwemvura inochekwa yesilicon wafer kunoumba zvakananga kutonhora, mafuta, uye kubviswa kwemarara panzvimbo yekubatana, zvichikanganisa kunaka kwewafer surface, kurasikirwa nekerf, uye goho rese rekugadzira. Kuyerera kusina kukwana kana kwakawandisa kunochinja kushanda zvakanaka, kunowedzera kupera kwemidziyo, uye kunogona kukonzera kusawirirana kwemhando yewafer kana mitengo yakakwira yezviwanikwa. Tsvagiridzo yeEmpirical inoratidza kuti roughness yepamusoro (Ra) uye kukuvara kwepasi pevhu zvinogona kuderedzwa nekuchengetedza mwero wekuyerera kwemvura inochekwa mukati me 0.15–0.25 L/min range yakakwana yemichina yewaya imwe chete, sezvo kuyerera kusina kukwana kunotungamira kuma microcracks uye kuunganidzwa kwemarara, nepo kuyerera kwakawandisa kuchiunza turbulence uye kushandiswa kusingakoshi.
Tekinoroji dzeKucheka Kuyerwa kweMvura
Miyero yekuyerera kwemvura inochekwa inosanganiswa nemitsetse yekugovera mvura, ichiyera huwandu hwemvura yekucheka waya yedhaimani inounzwa panguva chaiyo. Matekinoroji akajairika ekuyera kuyerera kwemvura anosanganisira mhando dzemakanika, dzemagetsi, uye dzeultrasonic:
- Michina yekuyera mafungu emagetsi, akadai semagadzirirwo eturbine nemavhiri ekufambisa, anoshandisa zvinhu zvinotenderera zvinobviswa nekuyerera kwemvura. Zviri nyore uye zvakasimba asi zvinokurumidza kupera simba nekuda kwemvura inorema.
- Mamita ekuyerera kwemagetsi, kunyanya magadzirirwo emagetsi, anoyera kumhanya kwemvura achishandisa misimboti yekugadzirwa kwemagetsi, zvichiita kuti pave nekushanda kwakavimbika uye kwekuchengetedza kwemvura inofambisa mvura.
- Ma ultrasonic flow meter anoshandisa mafungu eruzha ane mafrequency akakwirira anotumirwa uye anogamuchirwa kuburikidza nepombi. Nekuyera musiyano wenguva yekufamba kweruzha nekufamba uye nekufamba kwarwo, zvishandiso izvi zvinopa chiyero chisina kupindira uye chakarurama chakakodzera mhando dzakasiyana dzemvura yekucheka wafer.
Kuyerwa kwehuwandu hweCoriolis kunonyanya kuoneka mumashandisirwo anoitwa uko kunodiwa kudzora huwandu hwemvura, zvisinei nekuoma kana kuchinja kwekupisa. Masensa ekuyerera kwehuwandu hweCoriolis anoyera zvakananga mwero wekuyerera kwemvura zvichibva pamhedzisiro yeCoriolis, zvichipa kunyatsojeka uye kukodzera kwezvinwiwa zvekucheka waya zvedhaimani zvinobva mumvura uye zvinobva mumafuta. Lonnmeter inogadzira inline density uye viscosity metres, izvo zvinoita kuti zvikwanise kutarisa hunhu hwemvura kuti iite zvakafanana uye itonge zvakanyanya maitiro ekucheka silicon wafer.
Zviyero Zvakakosha uye Kuiswa kweSensor
Kuyera kwakarurama kwekufamba kwemvura mukucheka kwewafer kunoda kutarisisa zvinhu zvakakosha:
- Mwero wekuyerera kwemvura (L/min): Chiyero chikuru chekugadzirisa mashandiro uye kuvimbisa mhando.
- Kuwanda uye kusviba: Zvese izvi zvinokanganisa zvikuru mashandiro ekutonhodza, kutakurwa kweabrasive, uye kubviswa kwemarara.
- Tembiricha: Inokanganisa kunaka kweganda uye kuyerera kwemvura panzvimbo yakachekwa.
Kuiswa kwesensa kwakakosha. Masensa ekuyera kuyerera kwemvura anofanirwa kuiswa zvakananga mumutsara wekutumira mvura pedyo nenzvimbo yekucheka sezvinobvira kuderedza kusawirirana kunokonzerwa nekusagona kupinza mvura, kubuda kwemvura, kana kupwa kwemvura isati yasvika panzvimbo yekucheka. Kuyera kwemukati memvura chaiyo kunoita kuti kukosha kwekuyerera kwakataurwa kuenderane nekuwanikwa chaiko kunzvimbo yekucheka waya yedhaimani.
Basa reKuyera Kuyerera mukuchengetedza Nzvimbo Dzakanaka dzeKucheka
Ma sensor ekuyera kuyerera kwemvura akakosha pakutarisa nguva chaiyo uye kudzora kufambiswa kwemvura mukugadzirwa kwesimbi yesilicon wafer. Kuchengetedza kuyerera kwakaringana kunoita kuti kupisa kuparare zvakakwana, kubviswa kwemarara nguva dzose, uye kunyoroveswa kwakafanana pawaya yedhaimani. Pasina izvi, kugadzikana kwemaitiro kunoderera, hupenyu hwewaya hunopfupika, uye goho rinotambura nekuda kwekuwedzera kwenjodzi yekukanganisika kwepamusoro kana kurasikirwa zvakanyanya kwekerf.
Nekubatanidza kuyerwa kwehuwandu hwekuyerera kwemvura nemazvo nemamwe ma feedback parameters (semuenzaniso, kumhanya kwewaya, huwandu hwekudyisa), vagadziri vanogona kusimbisa kutonga kunochinjika kwechikamu chemaitiro, vachibatanidza zvakananga kugadziriswa kwehuwandu hwekuyerera kwemvura nekushanda kwekucheka kwakacherechedzwa. Nekuda kweizvozvo, chero kutsauka kubva muhurongwa hwekuyerera kwemvura hwakarongwa kunokonzera chiito chekugadzirisa nekukurumidza, kuchengetedza kunaka kwemaitiro uye kushanda zvakanaka kwezviwanikwa.
Muchidimbu, kuyerwa kwemvura inoyerera muindasitiri—zvichienderana nemasensa ekuyera kuyerera akasimba uye data renguva chaiyo—kunoshanda sedombo guru rekugadzira silicon wafer inobereka zvakawanda uye inodhura munguva yekucheka waya yedhaimani.
Kuyerwa kweCoriolis Mass Flow: Nheyo uye Mashandisirwo
Kuyerwa kwehuwandu hweCoriolis kunobva pakuona simba rinoitwa nemvura inofamba nemachubhu anodedera. Sezvo mvura ichiyerera—senge dhaimani rekucheka waya kana silicon wafer fluid yakasarudzika—machubhu anowana shanduko diki, inoyerwa. Kuchinja uku kunoenderana nehukuru hwekuyerera, zvichipa huwandu hwakananga, hwenguva chaiyo hwehukuru hwemvura inochekwa inotumirwa. Nheyo imwecheteyo inobvumira kuyerwa panguva imwe chete kwehuwandu hwemvura, zvichitsigira kunyatsojeka kwemhando dzemvura dzinochinja, magadzirirwo, uye tembiricha—chinhu chakakosha mukugadzira silicon wafer uye mashandisirwo ekucheka waya yedhaimani.
Zvakanakira nzira iyi yekucheka wafer, kunyanya kana uchishandisa madhaimani ekucheka waya, zvakakosha. Kuyerwa kwekuyerera kweCoriolis hakuenderane nekusimba kwemvura uye kuchinja kwechimiro, kunoramba kwakarurama zvikuru pakati pekuvapo kwezvidimbu zvinogumbura, zvidiki-diki, kana misanganiswa yakasiyana-siyana inowanzo kuwanikwa mukucheka mvura yesilicon wafers. Kusimba uku kunoita kuti ive yepamusoro pane nzira dzechinyakare dzekuyerera kwevolumetric, dzinogona kukanganiswa nemabubbles, zvidimbu zvakamiswa, uye kuchinja kwehunhu hwemvura yepamusoro.
Kucheka kwewafer ye semiconductor kunonyanya kushandisa tekinoroji yepamusoro yekunzwa kuyerera kwemvura kuti ive nechokwadi chekuti mvura yekucheka ye silicon wafers inotariswa zvakanaka. Lonnmeter inline mass flow sensors, inoshandisa Coriolis effect, inoshandiswa zvakananga mumitsara yekushanda. Izvi zvinogonesa kutumirwa kwakanyatsojeka uye kutarisa mvura yekucheka nano-fluid nedhaimani panguva yekucheka wafer. Zviratidzo zvekuora kwemvura, kusagadzikana kwemusanganiswa, kana kuchinja kwehuwandu hwemvura zvinoonekwa nekukurumidza, zvichibvumira kupindira kwekudzora nekukurumidza kuchengetedza goho remaitiro uye kunaka kwenzvimbo.
Kuenzanisa masensa ekuyerera kweCoriolis mass kune mamwe masensa ekutarisa mvura inochekwa—akadai se thermal, electromagnetic, kana ultrasonic flow systems—kunoratidza simba rakati wandei. Masensa ekuyerera kwemvura inochekwa Coriolis mass anobudirira pakuyera kuyerera kwakanyatsojeka uye anopa kuverenga kwakavakirwa pahukuru pasina kukanganiswa nekuchinja-chinja kwe viscosity kana hunhu hwemagineti. Masenta emagetsi nema ultrasonic anonetseka nekucheka kusanganiswa kwemvura ine nanoparticles, pockets dzemhepo, kana kusiyana kweminiti density, kazhinji zvichikonzera kuyerwa kwehuwandu hwekuyerera husingavimbiki uye kuwedzera kwekugadzirisa.
Kururama kweCoriolis flow meter kunochengetedzwa pasi pekuchinja kwemusanganiswa wemvura, sezvo magadzirirwo ezviratidzo uye zvirongwa zvekuripa tembiricha zvinobudirira zvinobvisa ruzha nekuchinja kwezvakatipoteredza. Vashandi vanogona kushandisa data renguva chaiyo kuti vagadzirise kutonhora, mafuta, uye kubvisa tunhu, zvichienderana nemhando dzakasiyana dzemhando dzakasiyana dzemvura dzinochekwa newafer uye musanganiswa we nanofluid.
Kugadziriswa kwekuyera kuyerera kweCoriolis mass kuita waya yakatetepa uye mvura yekucheka ine nanoparticles kunoratidza shanduko mukutarisa kwemaindasitiri. Masensa anoyera kuyerera kwehuwandu hwechokwadi uye huwandu, zvisinei nehuwandu hwezvinhu kana kusiyana kwemvura, zvichiita kuti kudzora kweclosed-loop uye manejimendi emvura otomatiki akagadzirirwa kucheka wafer. Iyi nhanho yekuyera kuyerera kwakanyatsojeka ndiyo yakakosha pakuchengetedza kugadzikana kwemaitiro, kuderedza kurasikirwa kwezvinhu, uye kuchengetedza kusimba kwepamusoro panguva yekugadzira silicon wafer uye maitiro ekucheka waya yedhaimani.
Kubatanidza Ruzivo rweKuyera Kuyerera muKudzora Maitiro
Kuyerwa kwekuyerera kwemvura panguva chaiyo uchishandisa masensa ekuyerera kweCoriolis kwakachinja manejimendi ekuchekwa kwemvura panguva yekucheka waya ye silicon wafers. Inline density uye viscosity metres, senge izvo zvakagadzirwa neLonnmeter, zvinogonesa kutarisa nekukurumidza hunhu hwemvura uye mwero wekuyerera kwayo, zvichitsigira zvakananga kudzora kwakanyatsojeka kwemaitiro.
Kuchengetedza mwero wekufamba zvakanaka kwemvura kwakakosha pakutonhodza, kuchenesa, uye kunyorovesa waya yedhaimani nemawafer esilicon zvinobudirira. Coriolis mass flow meter inobudirira munzvimbo iyi nekupa mhinduro chaiyo uye chaiyo panguva chaiyo yekuyerera kwemvura uye hunhu hwemvura. Neruzivo urwu, masisitimu otomatiki anogona kugadzirisa kumhanya kwepombi, nzvimbo dzevharuvhu, kana kudzokorodza mwero kuti ape zvakakwana huwandu hunodiwa uye kuumbwa kwemvura yekucheka wafer. Semuenzaniso, panguva yekucheka nekukurumidza, data re sensor rinogona kukonzera kuwedzerwa kwemvura kuti ibvise tsvina uye itonhore, nepo kutenderera kunononoka kungada kuyerera kushoma kudzivirira marara.
Mhinduro kubva kumasensa ekuyera kuyerera kwemvura inokoshawo pakupindura mamiriro emvura ari kuchinja. Sezvo viscosity yemvura kana density ichichinja—nekuda kwekuchinja kwetembiricha kana kusvibiswa—mamita eLonnmeter anoona shanduko idzi ipapo ipapo, zvichibvumira masisitimu ekudzora kutsiva nekugadzirisa mwero wekuyerera kwemvura kana kutanga kusefa mvura. Iyi nzira yegranular, inotungamirirwa nedata inoita kuti mvura irambe iri mukati mezvinodiwa zvakasimba kuti iite zvakanaka pakucheka.
Munzvimbo dzine huwandu hwakawanda, kugona kutarisa nekudzora kuyerera kwemvura panguva chaiyo kunotsigira ukobvu hwakafanana uye kunoderedza kuitika kwezvikanganiso zvinodhura, sezvakaratidzwa mumitsetse yekugadzira iri pamberi muAsia neEurope. Kutarisira kwemvura kwepamusoro kunotsigirawo kugadziriswa kwezvinoitika kare, zvichiwedzera hupenyu hwewaya yedhaimani.
Mashandiro emaindasitiri anobatsirwa zvikuru nemasisitimu ekucheka mvura anodzorwa nekuyerera kwemvura. Kutarisira mvura zvakanaka kunoderedza mari yekushandisa nekurasira nekuona kuti mvura yakakwana inoshandiswa pawafer yega yega, zvichitsigira kuchengetedzeka uye kutevedzera mitemo. Kuderedzwa kwemarara emvura—kunogoneswa nemhinduro dzinoenderera mberi uye kugadziriswa zvichibva padata remasensa—zvinoita kuti mari yekushandisa ideredzwe uye kuderedza kukanganiswa kwezvakatipoteredza.
Muchidimbu, kubatanidzwa kwedata rekuyera kuyerera kwemvura panguva chaiyo, kwakagoneswa nemhinduro dzeLonnmeter dziri mukati, hakusi kungori dombo guru rekusimbisa mhando yewafer asiwo mukana wekushanda kwemaitiro ekucheka waya yedhaimani. Kunopa kuvandudzwa kunoyerwa mukupedzwa kwechinhu, kuvimbika kwemuchina, goho rekugadzira, uye kushanda zvakanaka kwemari.
Kunzwisisa Kwekuedza uye Kutungamirirwa Kwemaindasitiri
Zvidzidzo zvechangobva kuitwa zvakachinja maitiro akanakisa ekutumira mvura yekucheka waya ye silicon wafers yedhaimani. Tsvagiridzo inoratidza kuti kuwanikwa kwemvura yekucheka kwakanyatsogadziriswa, kunyanya uchishandisa matekiniki epamusoro, kunoenderana zvakananga nekusanyungudika kwewafer uye kunaka kwepamusoro.
Kushandiswa kwe ultrasonic capillary effect mukutumira mvura kwave chinhu chinochinja-chinja. Mafungu e ultrasonic anofambisa mvura inocheka yakadzika muzvikamu zvitete zvikuru—kunyanya munzvimbo dzakatetepa kupfuura 50 μm—uko nzira dzechinyakare dzekupa dzinowanzo kundikana. Kupinda uku kwakawedzerwa kunoderedza zvakanyanya kunyudzwa kwezvidimbu zvinogumbura nemarara pamusoro pe wafer. Miedzo yekuedza inoratidza kuti wafers dzakashandiswa ultrasonic-assisted fluid dzinoratidza zvikanganiso zvishoma pamusoro, nokudaro goho guru uye kuvimbika mumabasa epasi.
Kugadzirisa maparameter kwakakosha pakuwedzera mabhenefiti ekuvandudzwa kwe ultrasonic uye nano-fluid tekinoroji mukuderedza kuendeswa kwemvura. Zvikamu zvikuru zvinosanganisira:
- Kureba kwepuratifomu: Mukana uri pakati penzvimbo inochengeterwa mvura nenzvimbo yekucheka unofanira kuderedzwa kuti mvura ikwire zvakanaka.
- Nzvimbo yetransducer yeUltrasonic uye parallelism yekugadzirisa: Geometry yakajeka inoita kuti mafungu aenderane uye capillary action zviite sezviri pachena.
- Kupisa kwemvura: Kupisa kwakadzorwa kunowedzera kufamba kwemvura uye kushanda zvakanaka kwe capillary.
- Nguva uye kuwanda kwekushandiswa kwe ultrasound: Nguva yakakodzera inodzivirira kupisa zvakanyanya ukuwo ichinyanya kupinza.
- Kusarudzwa kwemhando yemvura: Mvura dzakasiyana dzepasi uye zvinowedzerwa zvinopindura zvakasiyana nekukurudzirwa kwe ultrasonic.
Tekinoroji yeNanofluid inoburitsa imwe kufambira mberi kukuru. Kucheka mvura yakasanganiswa ne nanoparticles dzakadai seSiO2 neSiC kunoratidza kuvandudzwa kwekupisa uye mafuta ekuzora. Kuchinja uku kunotungamira mukutonhorera kunobudirira, kubviswa kwemarara kwakawedzerwa, uye kuderedzwa kwekuoma kwenzvimbo yewafer. Ruzivo runoratidza kuti masanganiswa e nano-particles anopa kuvandudzwa kwekubatana, achiwedzera kuderedza warpage uye kugadzira chimiro chepamusoro chewafer pane ma single-type kana ma conventional cutting fluids.
Vagadziri vari kuda kuwedzera kushanda zvakanaka kwemvura yekucheka vanogona kushandisa nhungamiro dzinotevera dzekushanda:
- Shandisa mita dze inline density uye mita dze viscosity (dzakadai sedzeLonnmeter) kuti utarise uye udzore kugadzikana kwemvura, uchiita shuwa kuti mafambiro emvura anoramba akakodzera kushandiswa kwe ultrasonic uye nano-assist.
- Tarisa uye gadzirisa mwero wekuyerera kwemvura uchishandisa sensor yekuyera kuyerera kwemvura nemazvo. Kuyera kuyerera kwemvura yeCoriolis kunonyanya kubatsira pakuyera kuyerera kwemvura yemvura yekucheka kweindasitiri, zvichipa kururama panguva chaiyo yehuwandu uye huwandu.
- Gara uchigadzirisa masensa ekuyera kuyerera kuti uchengetedze kuverenga kwakavimbika, zvakakosha kuti wafer igadziriswe nguva dzose.
- Sarudza mhando dzemvura yekucheka wafer uye huwandu hwe nanoparticle hunoenderana nehukuru hwewafer, hunhu hwewaya yedhaimani, uye nzvimbo yekushanda.
Zvidzidzo zvekuenzanisa zvinosimbisa kuti shanduko dzema parameter echinhu chimwe chete—sekuwedzera kumhanya kwewaya kana kugadzirisa mwero wekudya—zvinoenderana nekuchinja kwekusakara kwewaya, kuomarara kwenzvimbo, uye kusiyana kweukobvu hwese (TTV). Kuchengetedza kuyerera kwakaringana uye kuwanikwa kwemvura nekukurumidza uye kunoenderana nazvo kwakakosha mukuderedza zvikanganiso uye kuwedzera hupenyu hwewaya.
Mibvunzo Inowanzo bvunzwa
Mvura yekucheka silicon wafer inovandudza sei mashandiro ekucheka waya yedhaimani?
Mvura yekucheka simbi yesilicon inoshanda semafuta uye inotonhodza mukucheka waya yedhaimani. Basa rayo guru nderekuderedza kukweshana uye kubvisa kupisa kunokonzerwa newaya-wafer interface. Kukweshana kwakaderera uye tembiricha kunoderedza kukweshana kwema microcracks uye kukwesha pamusoro, izvo zvinogona kukonzera kukuvara kwewafer uye kuderedza goho rose. Mvura inotakurawo marara kubva panzvimbo yekucheka, ichichengetedza waya yedhaimani newafer pamusoro payo yakachena. Kubviswa uku nguva dzose kwezvidimbu kunoita kuti nzvimbo dzewafer dzakatsetseka uye kunotsigira kugadzirwa kwakasimba uye kwemhando yepamusoro. Semuenzaniso, mvura yekucheka nano-yakawedzerwa ine SiO₂ neSiC nanoparticles inogona kupinda zvakadzika mukerf, ichideredza kuomarara kwenzvimbo uye wafer warpage, zvichiwedzera kuvandudza kubuda kwewafer kuti ishandiswe semiconductor.
Chii chinonzi cutting fluid flow meter, uye nei ichikosha pakucheka wafer?
Chiyero chemvura chinochekwa chinoyera huwandu chaihwo hwemvura inoendeswa kunzvimbo yekucheka. Kuchengetedza kuyerera kwakakodzera kwakakosha kuti mafuta akwane, kupisa kuparare, uye kubviswa kwemarara. Kana kuyerera kwacho kwakaderera, waya yacho inopisa zvakanyanya kana kuunganidza marara, zvichikonzera kukwenya nekutyoka. Kuyerera kwakawandisa kunogona kutambisa mvura uye kugadzira kusawirirana kwekumanikidzwa, zvichikanganisa kusimba kwewafer uye hupenyu hwechishandiso. Kucheka mita dzemvura dzinoyerera, dzakadai se inline density metres uye viscosity metres zvakagadzirwa neLonnmeter, zvinobatsira vashandi kutarisa nekugadzirisa kuwanikwa kwayo munguva chaiyo. Izvi zvinoita kuti maitiro acho agare mukati memiganhu yakakodzera, zvichiwedzera goho rewafer uye kuderedza kupera kwezvishandiso.
Kuyerwa kwehuwandu hweCoriolis kunobatsira sei kudzora mvura yekucheka silicon wafer?
Kuyera kuyerera kweCoriolis kwakakosha pakuyera kuyerera kwakanyatsojeka mukugadzirwa kwesilicon wafer. Kusiyana nema flowmeter echinyakare, maCoriolis sensors anoyera zvakananga kuyerera kwehuwandu pasinei nekusimba kwemvura, huwandu, kana kusiyana kwekupisa. Iyi nzira inoita kuti pave nekutarisa kwakarurama kwemhando dzakasiyana dzemvura yekucheka wafer, kusanganisira iyo ine nanoparticles. Mugumisiro wacho ndewekuti mvura yekucheka iendeswe nguva dzose nekukurumidza kwakakodzera, ichichengetedza mafuta akagadzikana uye kutonhora pasinei nekuchinja-chinja kwemaitiro. Mabhenefiti aya anobatsira zvakananga kune wafer yepamusoro mukushandiswa kwe diamond wire cutting applications, uko kudzora kwakanyatsojeka kunoderedza zvikanganiso uye kunovandudza kugona.
Ndezvipi zvinhu zvinokanganisa kuyerwa kwehuwandu hwekuyerera kwemvura mukushandiswa kwesaha rewaya redhaimani?
Kuyera mwero wekuyerera kwakarurama kunoenderana nezvinhu zvakasiyana-siyana zvakabatana. Kusarudzwa kwemasensa ndiko kwakakosha; semuenzaniso, masensa ekuyerera kweCoriolis mass anopa data rakavimbika kunyangwe remvura dzakasimba kana dzakazadzwa nezvidimbu. Kuumbwa kwemvura—senge kuvapo kwezvikamu zvidiki—kunogona kuchinja viscosity uye density uye kukanganisa zvinodiwa pakuenzanisa masensa. Dhayamita yewaya nekumhanya kwekucheka zvinokanganisawo huwandu hwemvura inodiwa kuti kutonhodza uye kubviswa kwemarara zvinobudirira. Kuenzanisa kwemaitiro ese chaiwo kwakakosha kuve nechokwadi chekuti sensor inoverenga kukosha chaiko, ichiva nechokwadi chekuti huwandu hwakakwana hwemvura yekucheka hunoshandiswa pabatch yega yega.
Ko nano-fluids uye matekiniki e ultrasonic zvinogona kuwedzera kupinda kwemvura panguva yekucheka silicon wafer here?
Tsvagiridzo inoratidza kuti nano-fluids, kunyanya idzo dzine SiO₂ neSiC nanoparticles, dzinowedzera kushanda zvakanaka kwekutumira mvura kune critical wire-wafer interface. Izvi zvinobatsira kuti mvura isvike pamipata midiki, zvichiita kuti kutonhora uye kunyorovesa zvive nani. Pamusoro pezvo, matekiniki e ultrasonic capillary effect anowedzera kufambisa uye kupinda kwemvura, kunyanya mukucheka waya kwakatetepa zvakanyanya. Izvi zvinoreva kuti mvura shoma inodiwa kuti iite zvakanaka, uye mhedzisiro inosanganisira kudzikira kwekunyungudika kwemvura, kuvandudzwa kwechimiro chepamusoro, uye kudzikira kwehuwandu hwekukanganisa. Kufambira mberi uku kunotsigira kufambira mberi kune mawafer akatetepa, ane dhayamita yakakura muindasitiri ye semiconductor ne photovoltaic, nemasensa ekutarisa mvura anoona kuti maitiro acho anoramba achidzorwa uye akafanana mukati menguva yega yega yekugadzira.
Nguva yekutumira: Zvita-25-2025
