Kupukuta kwemakemikari (CMP) kunowanzo shandiswa pakugadzira nzvimbo dzakatsetseka kuburikidza nekuita kwemakemikari, kunyanya mabasa muindasitiri yekugadzira semiconductor.Lonnmeter, nyanzvi itsva inovimbwa nayo ine ruzivo rwemakore anopfuura makumi maviri mukuyera huwandu hwezvinhu zviri mukati, inopa hunyanzvi hwemazuva anomamita ehuwandu husina simba renyukireyauye masensa ekukweva viscosity kugadzirisa matambudziko ekugadzirisa slurry.
Kukosha kweHunhu hweSlurry uye Hunyanzvi hweLonnmeter
Kukwesha kwemakemikari muchina wekuchenesa ndiwo musimboti weCMP process, zvichiratidza kufanana uye kunaka kwenzvimbo. Kuwanda kweslurry kana viscosity isingaenderane kunogona kutungamira kune zvikanganiso zvakaita sekukweshana kudiki, kubviswa kwezvinhu zvisina kuenzana, kana kuvhara mapad, zvichikanganisa kunaka kwewafer uye kuwedzera mari yekugadzira. Lonnmeter, mutungamiri wepasi rose mumhinduro dzekuyera maindasitiri, inyanzvi mukuyera inline slurry kuti ive nechokwadi chekuti slurry inoshanda zvakanaka. Nenhoroondo yakasimbiswa yekupa masensa akavimbika uye akanyatsojeka, Lonnmeter yakabatana nevagadziri ve semiconductor vanotungamira kusimudzira kudzora maitiro uye kushanda zvakanaka. Masensa avo eslurry density asiri enyukireya uye viscosity anopa data renguva chaiyo, zvichigonesa kugadzirisa kwakarurama kuchengetedza slurry yakafanana uye kusangana nezvinodiwa zvakanyanya zvekugadzira semiconductor yemazuva ano.
Kwemakore anopfuura makumi maviri eruzivo mukuyera huwandu hwezvinhu zviri mukati, zvinovimbwa nemakambani makuru e semiconductor. Masensa eLonnmeter akagadzirwa kuti asanganisirwe zvakanaka uye asagadzirise, zvichideredza mari yekushandisa. Mhinduro dzakagadzirirwa kusangana nezvinodiwa zvemaitiro chaiwo, kuve nechokwadi chekuti wafer goho rakawanda uye kutevedzera mitemo.
Basa reKupukuta Kwemakemikari muKugadzira Semiconductor
Kupukuta kwemakemikari (CMP), kunonziwo makemikari-mechanical planarization, ibasa guru mukugadzira semiconductor, zvichigonesa kugadzirwa kwenzvimbo dzakati sandara, dzisina zvirema zvekugadzira machipisi epamusoro. Nekubatanidza makemikari etching nemechanical abrasion, maitiro eCMP anovimbisa kurongeka kunodiwa kuma multi-layered integrated circuits pama nodes ari pasi pe10nm. Slurry yemakemikari yekuchenesa, inoumbwa nemvura, makemikari reagents, uye abrasive particles, inosangana nepolishing pad newafer kuti ibvise zvinhu zvakaenzana. Sezvo magadzirirwo e semiconductor achichinja, maitiro eCMP anotarisana nekuoma kuri kuwedzera, zvichida kudzora zvakasimba pamusoro pehunhu hweslurry kudzivirira zvikanganiso uye kuwana wafers dzakapfava, dzakaporishwa dzinodiwa neSemiconductor Foundries and Materials Suppliers.
Maitiro aya akakosha pakugadzira machipisi e5nm ne3nm asina zvikanganiso zvakawanda, izvo zvinoita kuti nzvimbo dzakati sandara dzive dzakanyatsoiswa zvakanaka. Kunyangwe kusawirirana kudiki kunogona kutungamira pakugadzirisazve kunodhura kana kurasikirwa negoho.
Matambudziko mukutarisa zvivakwa zveSlurry
Kuchengetedza huwandu hweslurry hunogara huripo uye kusimba kwayo mukugadzirwa kwemakemikari kwakazara nematambudziko. Hunhu hweslurry hunogona kusiyana nekuda kwezvinhu zvakaita sekutakura, kusanganiswa nemvura kana hydrogen peroxide, kusasanganiswa kwakakwana, kana kuora kwemakemikari. Semuenzaniso, kugara kwezvikamu muslurry totes kunogona kukonzera huwandu hwakawanda pasi, zvichikonzera kupukuta kusingaenderane. Nzira dzechinyakare dzekutarisa dzakadai sepH, oxidation-reduction potential (ORP), kana conductivity kazhinji hadzina kukwana, sezvo dzichikundikana kuona shanduko dzisinganzwisisike mukugadzirwa kweslurry. Izvi zvinogona kukonzera zvikanganiso, kudzikira kwehuwandu hwekubvisa, uye kuwedzera kwemitengo inoshandiswa, zvichikonzera njodzi huru kune vagadziri vemidziyo ye semiconductor nevanopa masevhisi eCMP. Kuchinja kwechimiro panguva yekubata nekuparadzira kunokanganisa mashandiro. Sub-10nm nodes inoda kudzora kwakasimba pamusoro pekuchena kweslurry uye kurongeka kwemusanganiswa. pH neORP zvinoratidza musiyano mudiki, nepo conductivity ichisiyana nekukwegura kweslurry. Hunhu hweslurry husingaenderane hunogona kuwedzera huwandu hwemavanga kusvika ku20%, zvichienderana neongororo dzeindasitiri.
MaSensor eLonnmeter eKutarisa Munguva Yechokwadi
Lonnmeter inogadzirisa matambudziko aya nemamita ayo epamusoro ehuwandu hwemvura isina simba renyukireya uyemasensa ekupenya, kusanganisira mita ye viscosity inline yekuyera viscosity in-line uye mita ye ultrasonic density yekutarisa slurry density uye viscosity panguva imwe chete. Ma sensor aya akagadzirirwa kubatanidzwa zvakanaka mumaitiro eCMP, ane hukama hwakajairika muindasitiri. Mhinduro dzeLonnmeter dzinopa kuvimbika kwenguva refu uye kusachengetedza kwakaderera kwekuvakwa kwayo kwakasimba. Data renguva chaiyo rinogonesa vashandisi kugadzirisa slurry blends, kudzivirira zvikanganiso, uye kugadzirisa mashandiro ekupukuta, zvichiita kuti maturusi aya ave akakosha kune Vatengesi veOngororo neKuedza Midziyo uye Vatengesi veCMP Consumables.
Mabhenefiti eKuramba Uchitarisa Kuti CMP Igadziriswe
Kugara uchitarisa uchishandisa masensa eLonnmeter anoshandura maitiro ekupukuta kwemakemikari nekupa ruzivo rwakakosha uye kuchengetedza mari yakawanda. Kuyera huwandu hweslurry panguva chaiyo uye kutarisa viscosity kunoderedza zvikanganiso zvakaita sekukwenya kana over-polishing kusvika ku20%, zvichienderana nezvinodiwa neindasitiri. Kubatanidzwa nePLC system kunogonesa otomatiki dosing uye process control, zvichiita kuti slurry properties igare mukati memazinga akakodzera. Izvi zvinotungamira kudzikiswa kwe15-25% mumitengo inodyiwa, kuderedzwa kwenguva yekushanda, uye kuvandudzika kwewafer uniformity. Kune Semiconductor Foundries neCMP Services Providers, mabhenefiti aya anoshandura kugadzirwa kwakawedzerwa, purofiti yakakwira, uye kutevedzera mitemo yakaita seISO 6976.
Mibvunzo Inowanzo bvunzwa Nezvekutarisa Slurry muCMP
Sei kuyerwa kwehuwandu hweslurry kuchikosha paCMP?
Kuyerwa kwehuwandu hwemadhaka kunovimbisa kupararira kwezvimedu zvakafanana uye kuenderana kwemusanganiswa, kudzivirira zvikanganiso uye kugadzirisa mwero wekubvisa mukuita kwemakemikari ekupukuta. Inotsigira kugadzirwa kwewafer yemhando yepamusoro uye kutevedzera mitemo yeindasitiri.
Kutarisa viscosity kunowedzera sei kushanda zvakanaka kweCMP?
Kutarisa kupenya kwemvura kunoita kuti mvura ifambe zvakanaka, zvichidzivirira matambudziko akadai sekuvharika kwemapedhi kana kukwesha kusina kuenzana. Masensa eLonnmeter anopa ruzivo rwenguva chaiyo kuti agadzirise maitiro eCMP uye kuvandudza goho rewafer.
Chii chinoita kuti mamita eLonnmeter asina simba renyukireya aenzane?
Mamita eLonnmeter asina simba renyukireya anopa kuyerwa kwehuwandu hwezvinhu zvakapwanyika pamwe chete nekuyera viscous panguva imwe chete nemazvo uye haana kugadziriswa. Dhizaini yavo yakasimba inoita kuti zvive nyore kushandisa munzvimbo dzinoda CMP.
Kuyerwa kwehuwandu hweslurry panguva chaiyo uye kutarisa viscosity zvakakosha pakugadzirisa maitiro ekupukuta kwemakemikari mukugadzira semiconductor. Masensa eLonnmeter eslurry density asiri enyukireya uye masensa eviscosity anopa Semiconductor Equipment Manufacturers, CMP Consumables Suppliers, uye Semiconductor Foundries zvishandiso zvekukunda matambudziko ekugadzirisa slurry, kuderedza zvikanganiso, uye kuderedza mitengo. Nekupa data rakarurama, renguva chaiyo, mhinduro idzi dzinowedzera kushanda zvakanaka kwemaitiro, kuona kuti kutevedzera mitemo, uye kukurudzira purofiti mumusika weCMP unokwikwidzana. ShanyiraWebhusaiti yeLonnmeterkana kuti taura nechikwata chavo nhasi kuti muzive kuti Lonnmeter ingashandura sei mashandiro enyu ekupukuta nemakemikari.
Nguva yekutumira: Chikunguru-22-2025
