1. Guhindura imiterere y'ibintu mu buryo bugezwehoPgutwika
CMP muri Semiconductor ni iki?
Gutunganya ibikoresho bya shimi (CMP), bizwi kandi nka chemical mechanical planarization, ni kimwe mu bikorwa bikomeye mu ikoranabuhanga no mu by'imari mu gukora ibikoresho bya semiconductor bigezweho. Ubu buryo bwihariye bukora nk'inzira y'ingenzi cyane, butunganya ubuso bwa wafer mu buryo bwitondewe binyuze mu gukoresha uburyo bwo gukata ibikoresho bya shimi no gukata ibikoresho bigenzurwa cyane. Ikoreshwa cyane mu gukora, CMP ni ingenzi mu gutegura wafer za semiconductor ku byiciro bikurikira, bigatuma habaho guhuza ibikoresho byinshi bikenewe n'ibikoresho bigezweho.
CMP muri gahunda ya semiconductor
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Icyifuzo gikomeye cyaguporisha imashini hakoreshejwe imitiishingiye ku bisabwa mu buryo bw'umubiri muri lithography yo muri iki gihe. Kubera ko uruziga ruvanze rufite uburyo bwo kugabanuka no guhagarara kw'ibice byinshi, ubushobozi bw'iyi gahunda bwo gukuraho ibintu neza no gushyiraho ubuso buzunguruka ku isi yose buba ingenzi cyane. Umutwe wo gukosora uhinduka ukozwe kugira ngo uzunguruke ku buryo butandukanye, ugatunganya neza imiterere idahwitse kuri wafer. Kugira ngo ihererekanya ry'imiterere rigende neza, cyane cyane hakoreshejwe tekiniki zigezweho nka lithography ya Extreme Ultraviolet (EUV), ubuso bwose butunganyijwe bugomba kuba buri mu bujyakuzimu buto cyane bw'ubutaka—ikimenyetso cya geometrike gisaba ubugari bwo ku rwego rwa Angstrom ku ikoranabuhanga rigezweho rya sub-22 nm. Hatabayeho imbaraga zo gushushanya zainzira ya semiconductor ya cmpIntambwe zikurikiraho zo gufotora zatera kunanirwa guhuza, kugoreka imiterere, no kuzamuka k'umusaruro mu buryo butunguranye.
Gukoresha CMP mu buryo bukabije byatewe cyane n’impinduka z’inganda kuva ku byuma bikoresha aluminiyumu bisanzwe kugera ku byuma bikoresha umuringa bigezweho. Gukoresha umuringa hakoreshejwe uburyo bwo kongeramo imiterere, uburyo bwa Damascene, bushingiye cyane ku bushobozi bwihariye bwa CMP bwo gukuraho umuringa urenze mu buryo busanzwe no guhagarika ibikorwa byo gukuraho neza neza aho icyuma gihurira n’icyuma gikingira okiside. Uku gukuraho ibikoresho bitoranijwe cyane bigaragaza uburinganire bw’ibinyabutabire n’ubw’imashini bugena inzira, uburinganire buhita buhungabanywa n’ihindagurika rito mu buryo bwo gusya.
Imikorere ya CMP mu buryo bwa Semiconductor
Igisabwa cy’ingenzi cyo guhindura imiterere y’ubutaka mu buryo bukabije si intego yo ku ruhande ahubwo ni imikorere itaziguye kugira ngo igikoresho gikore neza, gikore neza, gishyireho uburyo bukwiye bwo gutembera, ubushyuhe bukwirakwira, kandi gihuze imikorere mu miterere y’imiterere myinshi. Inshingano z’ingenzi za CMP ni ugucunga imiterere y’ubutaka, gushyiraho uburyo bwo kugorora imiterere y’ubutaka, kugira ngo habeho uburyo bwo gutunganya ibintu buhamye.
Uburyo bwihariye bwo gukoresha bugena amahitamo y'ibikoresho n'ibijyanye nabyoifumbire y'ibinureHakozwe gahunda za CMP kugira ngo zikoreshwe mu bikoresho bitandukanye, harimo tungsten, umuringa, silicon dioxide (SiO2)2), na silicon nitride (SiN). Uduce duto twometseho ibintu twakozwe neza cyane kugira ngo dukore neza cyane kandi duhitemo neza ibikoresho bitandukanye, harimo Shallow Trench Isolation (STI) na Interlayer Dielectrics (ILD). Urugero, ceria slurry ifite imikorere myiza ikoreshwa cyane mu bikorwa bya ILD bitewe n'imikorere yayo myiza mu gutunganya intambwe, guhuza, no kugabanya inshuro z'ibisembwa. Imiterere yihariye y'utu duce duto yemeza ko kudahuzagurika kw'imikorere guterwa n'impinduka mu mikorere y'amazi mu buryo bwo gushushanya ibintu bizahita bibangamira ibisabwa by'ibanze byo gukuraho ibikoresho byatoranijwe.
2. Uruhare rw'ingenzi rw'ubuzima bw'ubururu bwa CMP
CMP muri gahunda ya semiconductor
Ingufu zirambye z'iyi gahundaUburyo bwo gusiga irangi rya cmp hakoreshejwe ikoranabuhanga rya chemicalishingiye ku buryo buhoraho ku gutanga no gukora neza kw'urusenda, rukora nk'igikoresho cy'ingenzi cyorohereza ibikorwa bya shimi bikenewe ndetse no gushwanyagurika kw'ibikoresho. Iyi fluid ikomeye, irangwa no gushonga kwa colloidal, igomba kugeza buri gihe kandi kimwe ibice byayo by'ingenzi, harimo n'ibintu bihumanya (oxidizers, accelerators, na corrosion inhibitors) hamwe n'uduce duto twa nano-sbrasive, ku buso bwa wafer buhinduka.
Imiterere y'urusenda ikorwa kugira ngo itere ingaruka ku buryo bwihariye: uburyo bwiza bwo gukora ibintu bushingira ku gukora urwego rwa okiside rudashonga ku kintu runaka, hanyuma rugakurwaho n'uduce duto duto. Ubu buryo butanga uburyo bwo guhitamo imiterere y'ubutaka burebure bukenewe kugira ngo habeho imiterere myiza, bugashyira imbaraga mu gukuraho ahantu hanini cyangwa ahantu hanini. Mu buryo bunyuranye, iyo imiterere y'ubusenda itanze imiterere ya okiside ishonga, gukuraho ibintu biba isotropic, bityo bigakuraho uburyo bwo guhitamo imiterere y'ubutaka bukenewe. Ibice nyabyo by'urusenda bikunze kuba bigizwe n'uduce duto duto (urugero: silica, ceria) dufite ingano iri hagati ya 30 na 200 nm, duhagaze ku rugero ruri hagati ya 0.3 na 12% by'ibikomeye.
CMP Slurry Semiconductor
Kubungabunga ubuzima bw'CMP slurry semiconductorbisaba imiterere idashira no kugenzura ubuzima bwayo bwose, kuko kwangirika kose mu gihe cyo kuyikoresha cyangwa kuyizenguruka bishobora gutera igihombo gikomeye mu by’imari. Ubwiza bwa wafer ya nyuma irabagirana, igaragazwa n’uburyo igenda neza n’imiterere yayo, bifitanye isano itaziguye n’ubuziranenge bw’ingano y’uduce tw’urusenda (PSD) hamwe n’ubudahangarwa muri rusange.
Imiterere yihariye y'ibintu bitandukanyeUbwoko bw'uduce tw'ubururu bwa cmpbivuze ko uduce duto duto duto dutuje duhora duhamye n’imbaraga zoroshye zirwanya amashanyarazi zirimo guhagarara. Uduce duto dukunze gutangwa mu buryo buvanze kandi bisaba ko dutongerwa neza kandi tugavangwa n’amazi n’ibinyabutabire aho byakorewe. Mu by’ukuri, kwishingikiriza ku bipimo byo kuvanga ibintu bidafite aho bihuriye ni ikibazo gikomeye kuko ibikoresho byinjira birangwa n’ubwinshi bw’ibintu bivanze bigaragaza ihindagurika ry’ubucucike bw’ibintu bivanze.
Ku bijyanye no kugenzura ibikorwa, mu gihe isesengura ryimbitse rya PSD na zeta potential (colloidal stability) ari ingenzi, ubu buryo bukunze gushyirwa mu isesengura ryimbitse, ritanyuze kuri interineti. Inzira y'imikorere y'ibidukikije bya HVM isaba igisubizo cyihuse kandi gifatika. Kubera iyo mpamvu, ubucucike n'ubucucike bikoreshwa nk'ingamba nziza kandi zishobora gukoreshwa mu buzima bw'urusenda. Ubucucike butanga igipimo cyihuse kandi gihoraho cy'ubwinshi bw'ibintu bikomeye bitera ubucucike mu buryo bw'umwuka. Ubucucike nabwo ni ingenzi cyane, bukora nk'ikimenyetso cy'imiterere ya colloidal y'amazi n'ubushyuhe. Ubucucike budahamye bukunze kugaragaza uduce dutera ubucucike.guteranyacyangwa gusubiramo, cyane cyane mu gihe cyo gukata ibintu mu buryo buhindagurika. Kubwibyo, gukurikirana no kugenzura ibi bipimo bibiri bya rheological bitanga uburyo bwo guhita bukoreshwa bwo gusubiza ibintu mu buryo bukenewe kugira ngo harebwe ko slurry igumana imiterere yayo ya shimi n'iy'umubiri mu gihe cyo kuyikoresha.
3. Isesengura ry'ikosa rya tekiniki: Ibitera inenge
Ingaruka mbi ziterwa n'ubucucike bwa CMP n'ihindagurika ry'ubucucike
Ihindagurika ry'imikorere rizwi nk'igice kinini cy'ingaruka ku musaruro mwinshicmp mu nganda za semiconductor. Imiterere y'urubura, hamwe na hamwe yitwa "ubuzima bw'urubura," ishobora kwibasirwa cyane n'impinduka ziterwa no gukaraba, ihindagurika ry'ubushyuhe, no kuvanga ibintu bitandukanye. Intege nke zikomoka ku buryo urubura rutembamo bitandukanye n'ibibazo bya mekanike gusa, ariko byombi bitera uduce tw'urubura kandi akenshi bigaragazwa gusa nyuma y'ibikorwa bya nyuma y'ibikorwa.
Kuba hari uduce duto cyane cyangwa utubumbe twinshi musemiconductor ya cmpIbikoresho bifitanye isano rigaragara no kurema udukoko duto n'ibindi bisebe byica ku buso bwa wafer busesuye. Ihindagurika ry'ibipimo by'ingenzi bya rheological - ubucucike n'ubucucike - ni byo bimenyetso bihoraho, byerekana ko ubuziranenge bw'urusenda bwahungabanye, bigatangiza uburyo bwo kurema ibisebe.
Ihindagurika ry'ubucucike bw'ibinure (urugero, biganisha ku guhurirana kw'ibice, gukata shear yahindutse)
Ubushyuhe ni imiterere ya thermodynamic igenga imyitwarire y'urujya n'uruza rw'amazi n'imibanire y'ibintu ku buryo bwo gukosora, bigatuma igira ingaruka zikomeye ku bidukikije no ku miterere ya mekanike.
Imikorere ya chimique n'iy'umubiri yasemiconductor y'ubushyuhe bw'urutareSisitemu ishingiye cyane ku kugenzura ubushyuhe. Ubushakashatsi bwemeza ko n'impinduka ntoya ku bushyuhe bwa dogere selisiyusi 5 ishobora gutuma ubushyuhe bw'ibice by ...
Uburyo bwo kwangirika gukomeye burimo guhuza uduce duto duterwa no gukata. Uduce dushingiye kuri silica dukomeza gutandukana kw'uduce duto binyuze mu mbaraga zoroshye zo kwirukana amashanyarazi. Iyo utwo duce duhuye n'imihangayiko myinshi yo gukata—ikunze guterwa n'imashini zisanzwe zikoresha centrifugal cyangwa gusubiramo amazi mu buryo burambuye mu gice cyo gukwirakwiza—izo mbaraga zishobora kuneshwa, bigatuma habaho kwihuta no kudasubira inyuma.guteranyay'uduce duto two gukurura. Uduce duto duto duturukaho dukora nk'ibikoresho byo gukurura uduce duto, bigatuma habaho uduce duto duto ku buso bwa wafer. Viscometry y'igihe nyacyo ni bwo buryo bukenewe bwo gusuzuma ibyo bintu, butanga icyemezo cy'ingenzi cy' "ubwitonzi" bw'uburyo bwo gupompa no gukwirakwiza mbere yuko havuka inenge nini.
Ihindagurika ry’ubukonje rivamo rinabangamira cyane ubushobozi bwo gushushanya. Kubera ko ubukonje ari ikintu gikomeye bigira ingaruka ku buryo ibintu bihinduka mu gihe cyo gushushanya, ubukonje butari bumwe buzatuma ibintu bikurwaho mu buryo budahuye. Ubwiyongere bw’ubukonje bugaragara mu gace runaka, cyane cyane iyo ibintu bikozwe mu buryo bwinshi ku miterere y’ubutaka bwa wafer buzamuka, buhindura imiterere y’ubukonje kandi bugaca intege intego yo gushushanya, amaherezo bigatera inenge mu miterere y’ubutaka nko gusya no gushwanyagurika.
Ihindagurika ry'Ubucucike bw'ibinure
Ubucucike bw'ibinure ni ikimenyetso cyihuse kandi cyizewe cy'ubwinshi bw'ibintu bikomeye biremereye bihagaze mu mazi. Ihindagurika ry'ubucucike rigaragaza ko ibinure bitameze kimwe, ibyo bikaba bifitanye isano n'impinduka mu gipimo cyo gukuraho ibikoresho (MRR) no kurema ibisembwa.
Ahantu hakorerwa imirimo hakenewe igenzura ry’imiterere y’urutare. Kwishingikiriza gusa ku kongeramo amazi n’umusemburo wabugenewe mu matsinda y’ibintu byinjira ntabwo bihagije, kuko ubucucike bw’ibikoresho fatizo bukunze gutandukana, bigatuma habaho ibisubizo bidahuye ku mutwe w’igikoresho. Byongeye kandi, uduce duto cyane cyane utunini twa ceria, dushobora gushwanyagurika iyo umuvuduko w’amazi cyangwa guhagarara neza kwa colloidal bidahagije. Uku kwihuza kurema ubucucike bw’ibintu mu gace runaka no guteranya ibikoresho mu mirongo y’amazi, bigatera ikibazo gikomeye ku bushobozi bwo gutanga umutwaro uhoraho.
How DikigoDingendo zo mu kirereAffkimwe kimwe ManUfacturgukoraProcess?.
Ingaruka zitaziguye z'ubucucike bw'urutare budahamye zigaragaza inenge zikomeye ku buso busesuye:
Igipimo cyo gukuraho ibintu kidahuje (WIWNU):Impinduka mu bucucike zisobanura neza impinduka mu bucucike bw'uduce tw'udusimba duto duto dukoreshwa mu gukurura ibintu. Ubucucike buri hasi y'ubunini bwagenwe bugaragaza igabanuka ry'ubucucike bw'udusimba, bigatuma MRR igabanuka kandi igatanga ubusumbane budakwiye mu buryo busanzwe (WIWNU). WIWNU igabanya ibisabwa mu gushushanya. Ku rundi ruhande, ubucucike bwinshi bwo mu gace runaka byongera umutwaro mwiza w'udusimba, bigatuma ibintu bikurwaho cyane. Gugenzura neza ubucucike bituma habaho gutanga ibintu mu buryo buhoraho, bifitanye isano rikomeye n'imbaraga zihamye zo gukururana na MRR iteganijwe.
Gutera imitsi bitewe n'imiterere y'aho umuntu atuye:Ubwinshi bw'ibintu bikomeye bitera gushwanyagurika mu gace runaka, akenshi bitewe no kwishyira hasi cyangwa kuvanga neza, bituma habaho imitwaro myinshi kuri buri gice ku buso bwa wafer. Iyo ibice bitera gushwanyagurika, cyane cyane ceria, byunze cyane ku ruhu rw'ikirahure cya oxide, kandi hakabaho imihangayiko ku buso, umutwaro wa mekanike ushobora gutuma urwego rw'ikirahure rucika, bigatuma urwego rwimbitse kandi rutyaye.gushyiramo imyandaUbusembwa. Izi mpinduka zo gukurura zishobora guterwa no kuyungurura nabi, bigatuma ibice binini cyane (uduce turenze $0.5\ \ mu m$) binyura, biva ku guhagarara nabi kw'uduce. Gukurikirana ubucucike bitanga uburyo bw'ingenzi kandi bwuzuzanya bwo kuburira uduce, bigatuma abahanga mu by'imikorere babona itangira ry'uduce dukurura no gutuza umutwaro wo gukurura.
Imiterere y'ibisigazwa bivuye ku guhagarara nabi kw'uduce duto:Iyo suspension idahamye, bigatuma ubucucike bwinshi bugabanuka, ibikoresho bikomeye bikunda kwirundanya mu miterere y'amazi, bigatera ubucucike bw'amazi n'iterana ry'ibikoresho muri sisitemu yo gukwirakwiza.17Byongeye kandi, mu gihe cyo gusiga irangi, irangi rigomba gutwara neza ibikoresho bya shimi ndetse n'ibisigazwa by'imashini. Iyo irangi riturika cyangwa imiterere y'amazi idakora neza bitewe no kudahindagurika, ibi bisigazwa ntibikurwa neza ku buso bwa wafer, bigatuma habaho irangi rya nyuma ya CMP n'imiti.ibisigazwainenge. Guhagarika uduce duto mu buryo buhamye, byemezwa no gukurikirana imikorere y'imitsi mu buryo buhoraho, ni ngombwa kugira ngo ibintu bisukuye kandi bikomeze gusohoka.
Menya byinshi ku bipimo by'ubucucike
Ibindi bipimo by'imikorere kuri interineti
4. Ubuhanga bwo mu rwego rwa tekiniki mu gupima ibintu mu buryo bwa "Inline Metrology"
Ibipimo bya Lonnmeter Inline Densitometers na Viscometers
Kugira ngo inzira ya CMP ikomeze guhindagurika, gupima ibipimo by'ubuzima bw'urusenda buri gihe kandi budakoresha uburyo busanzwe ni ngombwa.Ibipimo bya Lonnmeter Inline Densitometers na ViscometersGukoresha ikoranabuhanga rigezweho cyane rya sensor ripima urumuri, ritanga imikorere myiza ugereranije n'ibikoresho bisanzwe byo gupima urumuri, bishobora gutinda gutinda. Ubu bushobozi butuma habaho igenzura ry’ubucucike ritagoramye kandi rihoraho ryinjizwa mu nzira y’amazi, ibyo bikaba ari ingenzi cyane kugira ngo huzuzwe amahame y’ubuziranenge n’ubuziranenge bw’ibipimo bya none bya sub-28nm.
Sobanura neza amahame y'ingenzi y'ikoranabuhanga ryabo, uburyo bwo gupima neza, umuvuduko w'igisubizo, ubusugire, ubwizerwe mu bidukikije bikomeye bya CMP, kandi ubitandukize n'uburyo gakondo bwo gukoresha interineti.
Kugira ngo ibintu bikore neza bisaba ko ibikoresho by’ikoranabuhanga bikoreshwa mu gukora neza mu gihe cy’ihindagurika ry’amazi menshi, umuvuduko mwinshi, n’ibintu bihumanya ikirere, bitanga igisubizo cyihuse ku buryo bwo kugenzura.
Amahame y'ingenzi y'ikoranabuhanga: Akamaro ka Resonator
Ibikoresho bya Lonnmeter bikoresha ikoranabuhanga rikomeye rya resonant ryagenewe kugabanya intege nke zisanzwe za densitometero za U-tube zisanzwe, zipfundikiye, zizwiho kuba zitera ibibazo mu ikoreshwa rya inline hamwe na abrasive colloidal suspensions.
Igipimo cy'ubucucike:ItsindaIgipimo cy'ubucucike bw'ibinureIkoresha ikintu gihuzwa neza gihuzwa, ubusanzwe giteranywa n'iforogo cyangwa resonator ya co-axial. Iki kintu gishyushya piezo-electrolytically kugira ngo kizunguruke ku muvuduko wacyo usanzwe. Impinduka mu bucucike bw'amazi akikije amazi zitera impinduka nyayo muri ubu bucucike karemano, bigatuma habaho kumenya ubucucike mu buryo butaziguye kandi bwizewe cyane.
Igipimo cy'ubucucike:ItsindaViscometer y'urutare ruri mu nziraikoresha sensor iramba izenguruka mu mazi. Imiterere yayo ituma gupima ubunini bw'amazi bitandukanyijwe n'ingaruka z'amazi menshi atembera, bigatanga igipimo cy'imiterere y'ibintu.
Imikorere n'Ubudahangarwa mu Mikorere
Ibipimo ngenderwaho bya inline resonant bitanga ibipimo by'ingenzi by'imikorere kugira ngo hagenzurwe neza HVM:
Umuvuduko w'ubuhanga n'uburyo bwo gusubiza:Sisitemu zigendanwa zitanga ubushobozi bwo gusubiramo ibintu byinshi, akenshi zigera kuri 0.1% kugira ngo ubucucike n'ubucucike bigerweho kugeza kuri 0.001 g/cc. Kugira ngo hagenzurwe neza ibikorwa, iyi ni yo biciro biri hejuru.ubuziranenge—ubushobozi bwo gupima agaciro kamwe no kubona neza ibitagenda neza—akenshi ni ingenzi kuruta ukuri kw'inyuma. Icy'ingenzi ni uko ikimenyetsoigihe cyo gusubizakuri izi sensors zihuta cyane, akenshi zigera ku masegonda 5. Iyi nyigo ihita yemerera kubona amakosa ako kanya no guhindura imikorere y’imashini mu buryo bwikora, ari nabyo bisabwa cyane mu gukumira ingendo.
Ubwirinzi n'Iterambere mu Bidukikije Bikomeye:Uduce twa CMP dusanzwe dufite imbaraga nyinshi. Ibikoresho bigezweho byubatswe kugira ngo bishobore kwihanganira ingaruka mbi, hakoreshejwe ibikoresho byihariye n'imiterere yabyo kugira ngo bishyirwe mu miyoboro. Ibi byuma bipima amashanyarazi byagenewe gukora ku buryo bigabanya imbaraga nyinshi (urugero, kugeza kuri 6.4 MPa) n'ubushyuhe (kugeza kuri 350 ℃). Igishushanyo mbonera cy'ibice bitari U-tube kigabanya uturere twapfuye n'ibyago byo kuziba bijyana n'ibikoresho byo gukurura, bigatuma sensor ikora neza kandi ikagira icyizere mu mikorere yayo.
Itandukaniro n'uburyo gakondo bwo hanze y'urubuga
Itandukaniro ry'imikorere hagati ya sisitemu zikora zikoresha umurongo umwe n'uburyo bwo gukoresha intoki butari kuri interineti rigena icyuho kiri hagati yo kugenzura amakosa akoreshwa mu buryo bwihuse no kunoza uburyo bwo gukora ibintu mu buryo bwihuse.
| Igipimo ngenderwaho cyo gukurikirana | Nta murongo (Gupima muri laboratwari/U-Tube Densitometer) | Inline (Lonnmeter Densitometer/Viscometer) | Ingaruka ku mikorere |
| Umuvuduko wo gupima | Yatinze (Amasaha) | Igihe nyacyo, Gukomeza (Igihe cyo gusubiza akenshi ni amasegonda 5) | Ifasha mu kugenzura ibikorwa byo gukumira no gufunga inzira. |
| Guhuza/Gutanga amakuru neza | Hasi (Ishobora kwibasirwa n'ikosa ryakozwe n'intoki, kwangirika kw'icyitegererezo) | Hejuru (Ikora ku buryo bwikora, ishobora gusubiramo/gukora neza cyane) | Imipaka ikomeye yo kugenzura ibikorwa no kugabanya ibimenyetso bitari byo. |
| Guhuza neza n'ibintu bitagira ingano | Ingaruka nyinshi zo kuziba (igishushanyo mbonera cy'agasanduku ka U-tube gafite umuyoboro muto) | Ingaruka nke zo kuziba (igishushanyo mbonera cy’ikirahuri gikomeye kitari U-tube) | Igihe cyo gukora cyane cya sensor no kwizerana mu byuma bikoresha abrasive media. |
| Ubushobozi bwo Gutahura Amakosa | Igaragaza ibikorwa (imenya ingendo zabaye amasaha yabanjirije ayo) | Ikora ku buryo bufatika (ikurikirana impinduka zihinduka, ikamenya ingendo hakiri kare) | Birinda ibisigazwa by'ibishishwa bya wafer bikabije kandi bigatuma bivamo umusaruro. |
Imbonerahamwe ya 3: Isesengura ry'igereranya: Isuzuma ry'ibice by'urubura mu murongo ugereranije n'iry'umwimerere
Isesengura risanzwe rikorwa utari kuri interineti risaba ko ingero zikurwamo no kuzitwara, bigashyiramo igihe kinini cyo gutinda mu buryo bw'isuzuma ry'ibipimo. Uku gutinda, gushobora kumara amasaha menshi, bituma iyo urugendo rubonetse, umubare munini w'ibice bya wafers uba waramaze kwangirika. Byongeye kandi, gukoresha intoki bitera ihindagurika ry'ibipimo kandi bigatera kwangirika kw'ibipimo, cyane cyane bitewe n'impinduka z'ubushyuhe nyuma yo gupimwa, bishobora kugoreka imiterere y'ibipimo.
Gupima ibintu mu buryo bw'umurongo bikuraho ubu buryo bwo gutinda gucika intege, bigatanga urujya n'uruza rw'amakuru rudasibangana ruturutse ku murongo ukwirakwiza amakuru. Uyu muvuduko ni ingenzi mu kubona amakosa; iyo bihujwe n'igishushanyo gikomeye kandi kidafunganye cy'ingenzi ku bikoresho byo gukwirakwiza amakuru, bitanga amakuru yizewe yo gukwirakwiza amakuru yose. Nubwo uburyo bwo gukwirakwiza amakuru butuma habaho uburyo bwo kugenzura ibipimo byinshi (nk'ikimenyetso cyo gupima cyangwa pH), ubucucike n'ubucucike bitanga ibitekerezo bitaziguye kandi byihuse ku buryo bw'ibanze bwo gukwirakwiza amakuru, akenshi bitagize icyo bihindura ku bipimo nka pH cyangwa Oxidation-Reduction Potential (ORP) bitewe no gufunga ibintu mu buryo bwa shimi.
5. Ingingo z'ingenzi mu bukungu n'imikorere
Ibyiza byo Gukurikirana Ubucucike n'Ubucucike mu Gihe Nyacyo
Ku murongo uwo ari wo wose w'ubukorikori bugezweho ahoCMP mu gikorwa cya semiconductorikoreshwa, intsinzi ipimwa binyuze mu kunoza umusaruro uhoraho, kudahungabana kw'imikorere, no gucunga neza ikiguzi. Gukurikirana amakuru mu buryo bwihuse bitanga ibikorwa remezo by'ingenzi bikenewe kugira ngo ibyo bikorwa by'ubucuruzi bigerweho.
Yongera Iterambere ry'Ibikorwa
Gukurikirana urutare mu buryo buhoraho kandi bunoze cyane byemeza ko ibipimo by'urutare by'ingenzi bigezwa aho bikoreshwa (POU) biguma mu mupaka ukomeye cyane wo kugenzura, hatitawe ku rusaku rw'ibikorwa byo hejuru. Urugero, bitewe n'ihindagurika ry'ubucucike buri mu matsinda y'urutare rw'ibicuruzwa bishya byinjira, gukurikiza gusa resept ntabwo bihagije. Mu kugenzura ubucucike mu ruganda rwa blender mu gihe nyacyo, sisitemu yo kugenzura ishobora guhindura imiterere y'ibipimo byo gushonga, ikerekana ko ingano nyayo y'ibicuruzwa igumaho mu gihe cyose cyo kuvanga. Ibi bigabanya cyane ihindagurika ry'ibikorwa rituruka ku bikoresho fatizo bidahuye, bigatuma imikorere yo gukosora ihinduka ishoboka kandi ikagabanya cyane inshuro n'ubunini bw'ibikorwa bihenze.
Byongera umusaruro
Gukemura ibibazo bya tekiniki n'imiti biterwa n'imiterere y'urutare rudahindagurika ni bwo buryo bwiza bwo kongera imbaragagukora semiconductor ya cmpIgipimo cy'umusaruro. Sisitemu zo kugenzura ziteganya igihe nyacyo zirinda umusaruro w'agaciro kanini. Fabs zashyize mu bikorwa sisitemu nk'izo zagaragaje ko zagize icyo zigeraho gikomeye, harimo na raporo z'uko hagabanutseho 25% by'igabanuka ry'ubusembwa. Ubu bushobozi bwo gukumira buhindura uburyo bwo gukora ibintu kuva ku kwitwara ku busembwa budashobora kwirindwa bukajya kubuza ko buvuka, bityo bukarinda ama-wafers afite agaciro ka miliyoni z'amadolari gushwanyagurika no kwangirika guterwa n'utundi duce duto tudakora neza. Ubushobozi bwo gukurikirana impinduka zihinduka, nko kugabanuka gutunguranye kw'ubushyuhe bw'izuba bigaragaza ubushyuhe cyangwa stress yo gukata, butuma habaho kwitabara mbere yuko ibi bintu bikwirakwiza ubusembwa mu ma-wafers menshi.
Bigabanya Gusubiramo Ibikorwa
Igicuruzwagusubiramo imirimoIgipimo, gisobanurwa nk'ijanisha ry'ibicuruzwa byakozwe bisaba kongera gutunganywa bitewe n'amakosa cyangwa inenge, ni KPI y'ingenzi ipima imikorere mibi y'inganda muri rusange. Igipimo cyo kuvugurura cyane gitwara abakozi b'agaciro, imyanda, kandi bigatera gutinda gukomeye. Kubera ko inenge nko gusohora ibikoresho, gukuraho ibintu bimwe, no gushwanyaguza ari ingaruka zitaziguye zo kudahuzagurika kw'imitsi, gutuma urujya n'uruza rw'amazi ruhagarara binyuze mu kugenzura ubucucike buhoraho bigabanya cyane gutangira kwangirika kw'ayo makosa akomeye. Mu kwemeza ko inzira ihamye, ingaruka z'inenge zisaba gusanwa cyangwa kongera gusigwa ziragabanuka, bigatuma umusaruro w'imikorere wiyongera ndetse n'imikorere myiza y'itsinda muri rusange.
Yongera ikiguzi cy'ibikorwa
Uduce twa CMP dutanga ikiguzi kinini cyo gukoresha mu buryo busanzwe. Iyo kutumvikana ku mikorere bisaba ikoreshwa ry’uburyo bunini kandi burambye mu kuvanga no gukoresha, ingaruka ni ikoreshwa rito kandi ritwara amafaranga menshi mu mikorere. Gukurikirana mu buryo bufatika bituma habaho imicungire y’uduce duto kandi nyayo. Urugero, kugenzura buri gihe bituma habaho uburyo bwo kuvanga neza, bikagabanya ikoreshwa ry’amazi yo mu bwoko bwa “dilution” no kwemeza ko ibiciro bihenze.imiterere y'urusenda rwa cmpikoreshwa neza, ikagabanya imyanda y'ibikoresho n'amafaranga akoreshwa mu mikorere. Byongeye kandi, gusuzuma indwara z'imitsi mu buryo bw'umwimerere bishobora gutanga ibimenyetso by'umuburo hakiri kare ku bibazo by'ibikoresho—nk'ibisa n'ibyangiritse cyangwa ipompo—bituma habaho kubungabunga imiterere y'ibikoresho mbere yuko impanuka itera ikibazo gikomeye cyo kubura amazi no guhagarara k'imikorere nyuma yaho.
Gukora ibintu byinshi mu buryo buhoraho bisaba gukuraho itandukaniro mu bikorwa byose by'ingenzi. Ikoranabuhanga rya Lonnmeter ritanga imbaraga, umuvuduko, n'ubuhanga bukenewe kugira ngo rikureho ingaruka ku bikorwa remezo byo gutanga ibintu bito. Mu guhuza amakuru y'ubucucike n'ubucucike mu gihe nyacyo, abahanga mu by'imikorere bafite ubwenge buhoraho kandi bushobora gukorwa, butuma habaho imikorere ishoboka yo gukosora no kurinda umusaruro wa wafer mu kwirinda guhindagurika kwa colloidal.
Gutangiza ihinduka kuva ku micungire y’umusaruro ufatika kugeza ku micungire y’ibikorwa by’umushinga:
Ongeramo imbaragaIgihe cyo gukora akazi noGabanyaGusubiramo:KuramoIbisobanuro byacu bya tekiniki naTangiraRFQ Uyu munsi.
Turatumira abahanga mu by'inganda zikora imashini n'umusaruro kuoherezaRFQ irambuye. Inzobere zacu mu bya tekiniki zizategura gahunda nyayo yo gushyira mu bikorwa, zihuze ikoranabuhanga rya Lonnmeter rigezweho mu bikorwa remezo byo gukwirakwiza ibicanwa kugira ngo harebwe igabanuka ry’ubucucike bw’ibicanwa n’ikoreshwa ry’ibicanwa.TwandikireItsinda ryacu ry’imashini zikora ku buryo bwikora ubu kugira ngoumutekanoinyungu yawe ku musaruro.Vumburaubunyangamugayo bw'ingenzi bukenewe kugira ngo intambwe yawe y'ingenzi cyane yo guteganya ibintu ihamye.
