Gupima amazi ni ingenzi cyane mu gukata insinga za silicon wafer diamond, kuko bituma amazi yo gukata agera neza ku murongo w’insinga-ni ingenzi cyane mu kubungabunga ubukonje, amavuta yo kwisiga no gukuraho imyanda.RAmakuru y’urujya n’uruza rw’amazi mu gihe cyo gukoresha amazi akoreshwa mu buryo bwa elegitoroniki akumira ubwinshi bw’amazi mu mazi, ibyo bikaba byatera ubushyuhe bwinshi, kwangirika kw’insinga, inenge z’ubuso, cyangwa imyanda. Gupima neza bigabanya ihindagurika ry’imikorere, birinda ubugari bw’insinga n’ubusugire bw’ubuso, bikongera igihe cy’ubuzima bw’insinga, kandi bikongera imikorere myiza y’umutungo.
Incamake y'icibwa rya Silicon Wafer n'uruhare rw'icibwa ry'amazi
Gukata insinga za diyama ni bwo buryo bukoreshwa cyane mu gukata ingots za silicon za monocrystalline na multicrystalline mu macupa yo gukata kugira ngo hakoreshwe muri semiconductor na photovoltaic. Muri ubu buryo, insinga y'icyuma—ubusanzwe ifite umurambararo wa 40–70 μm—ishyirwamo uduce twa diyama tworoshye. Insinga zigenda ku muvuduko mwinshi, maze diyama zirimo zisya silicon binyuze mu gushwanyagurika, bigabanya inenge zo hejuru kandi bigateza imbere uburinganire bwa wafer. Insinga zagabanutse zashyizwe mu myaka ya vuba aha zigabanya igihombo cya kerf, bivuga ko ibikoresho byangiritse nk'uduce duto twa silicon mu gihe cyo gukata. Igihombo cya kerf kigenwa n'umurambararo w'uduce twa silicon n'uburebure bw'uduce twa diyama tworoshye duturuka ku buso bw'insinga.
Gukata insinga za diyama
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Gukata amazi bigira uruhare runini mu gukata insinga za diyama. Inshingano zabo z'ibanze ni ugukonjesha ingot n'insinga, bikarinda ubushyuhe bukabije bushobora kwangiza silicon cyangwa kugabanya igihe insinga zimara. Binakuraho uduce duto twa silicon twakozwe mu gihe cyo gukata, bifasha kugumana ihuriro ryiza, birinda kongera gusiga imyanda, kandi bikagabanya uduce duto two hejuru kuri wafer. Byongeye kandi, gukata amazi bishyira amavuta mu nzira, bikagabanya uburyaryate hagati y'insinga na silicon, bityo bikongera igihe cyo kumara insinga no kunoza ubwiza bw'ibice. Imiterere n'imiterere y'ibice bya silicon wafer—nk'ubucucike n'ubucucike—bigomba gucungwa neza kugira ngo bikonje neza, gukuraho uduce duto, no kurinda insinga.
Hari ubwoko bwinshi bw'amazi yo gukata wafer, harimo n'amazi akoreshwa mu mazi afite inyongeramusaruro zo kongera amavuta no gufunga uduce duto. Amahitamo aterwa n'imiterere y'ibikoresho, imiterere ya wafer, n'imbogamizi ku bidukikije. Ingero zirimo amazi yakuwemo iyoni hamwe n'ibintu bifasha mu gukonjesha cyangwa glycols, byakozwe kugira ngo bihuze imikorere yo gukonjesha hamwe n'ibisigazwa bike.
Iterambere ry’insinga za diyama zoroshye cyane mu nganda zigezweho za wafer ryongera imbogamizi mu gutanga amazi no kugenzura ibikorwa. Uko umurambararo w’insinga ugabanuka munsi ya μm 40, ibyago byo kwangirika kw’insinga biriyongera kandi kwihanganira ihindagurika ry’ibikorwa birakomera. Gupima neza umuvuduko w’amazi—bishyigikiwe n’ikoranabuhanga nko gukata ibipimo by’amazi, ibipimo by’amazi meza, na bipima ubwinshi bw’amazi ya Coriolis—ni ingenzi kugira ngo hakomeze gukonjeshwa neza no gukuraho imyanda. Gukata ibipimo by’amazi n’ibipimo by’amazi yo mu nganda bifasha abakoresha gukurikirana no guhindura umuvuduko w’amazi mu gihe nyacyo, bakagera ku mavuta meza n’ubwiza bw’ubuso. Ubuziranenge bwa bipimo by’amazi ya Coriolis ni ingenzi cyane mu gucunga amazi afite ubucucike butandukanye n’ubucucike, bigakomeza kubaho neza nubwo umuvuduko wo gukata n’ubushyuhe bw’insinga byiyongera.
Uku gukenera gukoresha neza ibintu byiyongera byatumye hibandwa ku kugenzura ibipimo by'amazi nk'umuvuduko w'amazi, ubucucike, n'ubushyuhe. Ibikoresho nk'ibya Lonnmeter bitanga ibipimo byizewe kandi by'igihe nyacyo, bikaba ari ingenzi mu kugenzura ubuziranenge no kunoza imikorere mu bikorwa byo guca insinga za diyama bigezweho. Uko ikoranabuhanga ry'insinga rikomeza gutera imbere, guhuza ikoranabuhanga rikomeye ryo gupima amazi ni ingenzi mu gukomeza gukoresha insinga za wafer, kugabanya igihombo cya kerf, no kugabanya ibisabwa mu kurangiza urwego rw'inganda za silicon wafer.
Imbogamizi zo gutanga amazi mu guca insinga za diyama neza
Mu gukata insinga za diyama za silicon wafers nto cyane—cyane cyane iziri munsi ya µm 40—kugeza ingano ikwiye y'amazi yo gukata silicon wafer ku gice cyo gukata biba ikibazo gikomeye. Uko ubugari bw'insinga bugabanuka, ni nako umwanya wo gutembera kw'amazi ugenda. Kugumana amazi yo gukata neza ni ingenzi kugira ngo habeho amavuta, kugenzura ubushyuhe, no gukuraho imyanda aho ihurira.
Kudahuza cyangwa kudahuza neza kw'amazi bituma wafer ifata neza, aho wafer ifata ku bikoresho bitewe no kudakoresha amavuta ahagije. Ibi ntibibangamira gusa inzira yo gukata ahubwo byongera ibyago byo kwangirika cyangwa kwangirika kwa wafer. Ubushyuhe bw'ubuso buriyongera cyane iyo insinga na wafer bitabonye amavuta ahoraho kandi bikonjesha bivuye ku mazi acukura insinga ya diyama. Ubuso bwangiritse n'udukoko duto bigabanya ubwiza n'umusaruro wa wafer, bigatera imbogamizi zikomeye ku nganda zikora semiconductor na photovoltaic.
Ibintu bitatu by'ingenzi bigira ingaruka ku kwinjira kw'amazi mu cyuho gito: imiterere y'insinga, umuvuduko wo gukata, n'imikorere ya capillary. imiterere y'insinga—cyane cyane umurambararo w'insinga n'ikwirakwizwa ry'udusimba twa diyama—bigira ingaruka ku buryo amazi ya silikoni atembera neza kandi agafatana n'agace k'aho ahurira. Iyo ukoresha insinga ziri munsi ya µm 40, ubuso buto bugabanya urujya n'uruza rw'amazi. Umuvuduko mwinshi wo gukata ugabanya igihe gihari kugira ngo amazi agere kandi akonje aho ahurira, bigatera ubushyuhe bwinshi n'amavuta mabi. imikorere ya capillary, ubushobozi karemano bw'amazi bwo gukururwa mu mwanya muto, ni byo bigena cyane uburyo amazi agumana. Ariko, ibiraro bimwe by'amazi byongera ubwikorezi bw'amazi bishobora gutuma capillary ifatana hagati y'insinga zegeranye, bigatera imbaraga zidahuye kandi bikongera ihindagurika ry'ubugari bwa wafer.
Gushyira mu bikorwa ubwoko bw'amazi yo gukata wafer bugezweho—harimo n'ibisubizo bya nanoparticle-bitanga iterambere rifatika. Amazi yakozwe na SiO₂ cyangwa SiC nanoparticles yinjira mu cyuho gito neza bitewe n'ubushyuhe bwiza n'imikoranire myiza y'ubuso. Aya mazi yongera amavuta kandi agatwara ubushyuhe neza, bigatuma ubuso bugabanuka kandi bukagira ubugari buto. Ubushakashatsi bwerekana ko gukoresha amazi yo gukata wafer bihindura ubushyuhe mu gihe cyo gukata wafer, bigabanya cyane imihangayiko ibangamira ubuziranenge bwayo. Ibi, hamwe n'ubuhanga nka vibration ya ultrasound kugira ngo byongere ubwikorezi bw'imitsi, bituma habaho gutanga amazi yo gukata wafer mu buryo bumwe.
Gutanga amazi mu buryo buhoraho bisaba kugenzura no kuyahindura neza kandi mu buryo bufatika. Gupima amazi mu nganda neza cyane biba ngombwa, cyane cyane mu bikorwa bigenzurwa neza. Gushyira mu bikorwa icyuma gipima amazi mu buryo burambuye—nk'icyuma gipima ubwinshi bw'amazi cya Coriolis—bituma habaho kugenzura neza ubwinshi bw'amazi mu mazi. Ibipimo bya Lonnmeter by'ubucucike n'ubukana bw'amazi, iyo bihujwe n'ibikoresho bipima ubwinshi bw'amazi mu mazi neza, bigira uruhare mu kunoza ubwinshi bw'amazi ku buryo n'udupira tworoheje cyane ducibwa neza, kandi ingaruka mbi zikaba nke.
Gupima amazi mu mikorere yo gukata Wafer
Gupima neza umuvuduko w'amazi ni ingenzi mu kunoza uburyo amazi acibwa mu gukata insinga za diyama za silicon wafers. Ingufu z'amazi acibwa muri silicon wafer zigena uburyo bwo gukonjesha, gusiga amavuta, no gukuraho imyanda ku buryo butaziguye, bigira ingaruka ku bwiza bw'ubuso bwa wafer, igihombo cya kerf, n'umusaruro muri rusange. Amazi adahagije cyangwa menshi ahindura imikorere mibi, yongera ubusaza bw'ibikoresho, kandi ashobora gutera ubwiza budahuye cyangwa ikiguzi cy'umutungo cyiyongera. Ubushakashatsi bwakozwe bwerekana ko ubukana bw'ubuso (Ra) n'ibyangiritse ku buso bishobora kugabanuka binyuze mu kugumana umuvuduko w'amazi aciwe mu rugero rwa 0.15–0.25 L/min ku mashini zisanzwe zikoresha insinga imwe, kuko amazi adahagije atuma habaho uduce duto tw'amazi n'imyanda yiyongera, mu gihe amazi menshi asohoka atera umuyaga mwinshi no gukoreshwa bitari ngombwa.
Ikoranabuhanga ryo Gupima Igipimo cy'Amazi
Ibipimo by'amazi bikoreshwa mu gukata bishyirwa mu mirongo itangwa n'amazi, bipima ingano y'amazi akoreshwa mu gukata insinga ya diyama mu gihe nyacyo. Ikoranabuhanga risanzwe ripima amazi rigizwe n'ubwoko bwa mekanike, ikoranabuhanga, na ultrasonic:
- Ibipimo by'amazi bipima umuvuduko w'amazi, nk'igishushanyo cya turbine na paddlewheel, bikoresha ibice bizenguruka bivanwaho n'umuvuduko w'amazi. Biroroshye kandi birakomeye ariko bishobora kwangirika bitewe n'amazi yuzuyemo ibintu biremereye.
- Ibipimo by'umuvuduko w'amazi hakoreshejwe ikoranabuhanga, cyane cyane imiterere ya electromagnetic, bipima umuvuduko w'amazi hakoreshejwe amahame yo kwinjizwa kwa electromagnetic, bitanga imikorere yizewe kandi ijyanye n'urumuri rw'amazi ayobora.
- Ibipimo by'urujya n'uruza bya Ultrasonic bikoresha imiraba y'uruza ifite frequency yo hejuru yoherezwa kandi ikakirwa mu muyoboro. Mu gupima itandukaniro ry'igihe cy'uruza rw'amajwi hamwe n'uruza rw'amazi, ibi bikoresho bitanga igipimo kidahungabanya kandi nyacyo gikwiriye ubwoko butandukanye bw'amazi yo gukata wafer.
Igipimo cy'umuvuduko w'amazi muri Coriolis kiragaragara cyane mu mikoreshereze aho hakenewe kugenzura neza uburemere bw'amazi, hatitawe ku bushyuhe cyangwa impinduka z'ubushyuhe. Ibikoresho by'amashanyarazi bya Coriolis bipima mu buryo butaziguye umuvuduko w'amazi hashingiwe ku ngaruka za Coriolis, bitanga ubwiza bwo hejuru kandi bukwiriye amazi akoreshwa mu gukata insinga za diyama ashingiye ku mazi n'amavuta. Lonnmeter ikora ibipimo by'ubucucike n'ubucucike, birushaho gutuma habaho kugenzura imiterere y'amazi kugira ngo habeho uburinganire n'igenzura ryiza ry'imikorere mu gukata insinga za silicon.
Ibipimo by'ingenzi byo gupima no gushyira mu mwanya wa sensor
Gupima neza uburyo amazi atembera mu gukata wafer bisaba kwitabwaho ku bipimo byinshi by'ingenzi:
- Igipimo cy'umuvuduko w'amazi (L/min): Igipimo cy'ibanze cyo kunoza imikorere no kwemeza ubuziranenge.
- Ubucucike n'ubucucike: Byombi bigira ingaruka ku buryo bugaragara ku gukonjesha, gutwara ibintu mu buryo bukabije, no gukuraho imyanda.
- Ubushyuhe: Bigira ingaruka ku bucucike n'imyitwarire y'amazi aho byaciwe.
Gushyira sensor ni ingenzi cyane. Ibipimo by'amazi bigomba gushyirwa mu murongo ugemura amazi hafi y'agace gacamo kugira ngo bigabanye itandukaniro riterwa no kudakora neza kw'imiyoboro, kuva amazi cyangwa guhumeka mbere y'uko umurongo ucamo ushyirwa mu mwanya. Gupima mu buryo bw'igihe nyacyo byemeza ko agaciro k'amazi kavuzwe gahuye n'amazi nyayo agezwa mu gace gacamo insinga ya diyama.
Imikorere yo gupima imiterere y'amazi mu kubungabunga ibidukikije byiza byo guca ingano y'amazi
Ibipimo by'amazi akoreshwa mu gupima amazi ni ingenzi mu kugenzura mu buryo bwihuse no kugenzura uburyo amazi atangwa mu nganda zikata silicon wafer. Kugumana umuvuduko mwiza w'amazi bituma ubushyuhe bukwirakwira, imyanda ikomeza gukurwaho, no gusiga amavuta amwe ku nsinga ya diyama. Iyo bitabaye ibyo, uburyo bwo gukora ibintu buragabanuka, igihe cy'insinga kiragabanuka, kandi umusaruro uragabanuka bitewe n'ibyago byinshi byo kwangirika ku buso cyangwa gutakaza amazi menshi.
Mu guhuza igipimo cy’umuvuduko w’amazi neza cyane n’ibindi bipimo by’ibitekerezo (urugero, umuvuduko w’insinga, umuvuduko w’ibiryo), abakora bashobora gushyiraho uburyo bwo kugenzura urwego rw’imigendekere y’amazi, bagahuza neza uburyo amazi anyuramo n’imikorere yo gukata. Kubera iyo mpamvu, gutandukana n’uburyo amazi anyuramo byashyizweho bihita bitera igikorwa cyo gukosora ako kanya, birengera ireme ry’imigendekere n’ubushobozi bw’umutungo.
Muri make, gupima amazi yo mu nganda akoreshwa mu gukata—bishingiye ku bikoresho bipima amazi bikomeye n'amakuru aboneka mu gihe nyacyo—ni nk'inkingi ikomeye yo gukora silicon wafer ihendutse kandi ihendutse mu gihe cyo gukata insinga za diyama.
Igipimo cy'umuvuduko w'amazi ya Coriolis: Amahame n'ishyirwa mu bikorwa
Igipimo cy'umuvuduko w'amazi ya Coriolis gishingiye ku kumenya imbaraga zikoreshwa n'amazi anyura mu miyoboro inyeganyega. Uko amazi atemba—nk'amazi acibwa insinga za diyama cyangwa amazi yihariye acibwa insinga za silicon wafer—imiyoboro ihinduka buhoro kandi ipimwa. Iri hinduka rijyanye n'umuvuduko w'umuvuduko w'amazi aciwe, ritanga isuzuma ryihuse kandi ryihuse ry'umuvuduko w'amazi aciwe atangwa. Iri hame rimwe ryemerera gupima icyarimwe ubucucike bw'amazi, rigashyigikira ubuziranenge bwo hejuru mu moko y'amazi ahinduka, imiterere, n'ubushyuhe—ikintu cy'ingenzi mu gukora insinga za silicon wafer no gukoresha mu gukata insinga za diyama.
Ibyiza by'ubu buryo ku bwoko bw'amazi yo gukata wafer, cyane cyane iyo hakoreshejwe amazi yo gukata insinga ya diyama akora neza cyane, ni byinshi cyane. Gupima amazi ya Coriolis ntibishingiye ku bucucike bw'amazi n'impinduka mu miterere yayo, bikomeza kuba ukuri cyane mu gihe hari uduce duto, ibintu bito cyangwa uruvange rutandukanye rukunze kuboneka mu mazi yo gukata wafer za silicon. Ubu buhanga butuma irusha uburyo gakondo bwo gutembera mu buryo bw'amazi, bushobora guterwa n'udupira, uduce duto duto, n'imiterere ihinduka y'amazi yo gukata agezweho.
Gukata wafer ya semiconductor byibanda cyane ku ikoranabuhanga rigezweho ryo kugenzura amazi kugira ngo habeho igenzura ryizewe ry’amazi yo gukata wafer ya silikoni. Ibyuma bipima amazi ya silikoni bya Lonnmeter, bikoresha ingaruka za Coriolis, bishyirwa mu bikorwa mu buryo butaziguye. Ibi bituma habaho gutanga no gukurikirana neza amazi ya nano-fluid na diyama mu gihe cyo gukata wafer. Ibimenyetso byo kwangirika kw'amazi, kutumvikana kw'ibivange, cyangwa impinduka z'ubucucike bihita bigaragara, bigatuma habaho ingamba zo kugenzura vuba kugira ngo umusaruro w'amazi ukomeze kuba mwiza kandi ubuziranenge bw'ubuso.
Kugereranya uburyo bwo gupima amazi mu buryo bwa Coriolis n'izindi mashini zipima amazi mu buryo bwa “cutting fluid”—nk'ubushyuhe, amashanyarazi, cyangwa ikoranabuhanga—bigaragaza imbaraga nyinshi. Imashini zipima amazi mu buryo bwa Coriolis zikora neza mu gupima amazi mu buryo bunonosoye kandi zitanga ibipimo bishingiye ku bunini bidahungabanyijwe n'ihindagurika ry'ubushyuhe cyangwa imiterere ya rukuruzi. Ibipimo bya “electromagnetic” na “ultrasonic” birwana no gukata amazi mu buryo bwa “nanoparticles”, imifuka y'umwuka, cyangwa ihindagurika ry'ubucucike bw'iminota, akenshi bigatuma habaho gupima amazi mu buryo butari bwo no kongera umubare w'amazi akoreshwa mu kubungabunga.
Uburyo bwo gupima amazi ya Coriolis bukomeza gukoreshwa mu guhindura imiterere y’amazi, kuko uburyo bwo gutunganya ibimenyetso no kwishyura ubushyuhe bushobora gushungura neza urusaku n’ihindagurika ry’ibidukikije. Abakoresha bashobora gukoresha amakuru aboneka mu gihe nyacyo kugira ngo bakonjeshe, bashyire amavuta, kandi bakureho uduce duto, bitewe n’imiterere itandukanye y’ubwoko butandukanye bw’amazi yaciwe mu buryo bwa wafer n’uruvange rwa nanofluid.
Guhindura uburyo bwo gupima ubunini bwa Coriolis bukoreshwa mu gukata insinga no gukata amazi hakoreshejwe utunyangingo duto bigaragaza impinduka mu kugenzura inganda. Utunyangingo dupima ubunini nyabwo n'ubucucike nyakuri, hatitawe ku bipimo by'utunyangingo cyangwa itandukaniro ry'amazi, bituma habaho kugenzura no gucunga amazi mu buryo bwikora byagenewe gukata wafer. Uru rwego rwo gupima ubunini bw'amazi neza ni ingenzi mu kubungabunga ubusugire bw'imikorere, kugabanya igihombo cy'ibikoresho, no kurinda ubusugire bw'ubuso mu gihe cyo gukora wafer ya silikoni no gukata insinga ya diyama.
Gushyira amakuru apima ubwinshi bw'amazi mu kugenzura imikorere
Gupima amazi mu gihe nyacyo hakoreshejwe uburyo bwa Coriolis mass flow sensors byahinduye imicungire y’amazi mu gihe cyo gukata insinga za diyama za silicon wafers. Ibipimo by’ubucucike n’ubukana bw’amazi, kimwe n’ibyakozwe na Lonnmeter, bituma habaho gukurikirana byihuse imiterere y’amazi n’umuvuduko w’amazi, bigashyigikira mu buryo butaziguye uburyo akoreshwa mu kugenzura neza inzira.
Kugumana umuvuduko mwiza w'amazi ni ingenzi kugira ngo insinga ya diyama na silicon wafer zikonje, zisukurwe, kandi zisigwe neza. Ibipimo by'amazi ya Coriolis birakora neza muri ubu buryo binyuze mu gutanga ibitekerezo bifatika kandi byihuse ku bijyanye n'umuvuduko w'amazi n'imiterere y'amazi. Hamwe n'aya makuru, sisitemu zikora ku buryo bwikora zishobora guhindura umuvuduko wa pompe, aho valve iherereye, cyangwa se zigasubiramo amazi kugira ngo zitange neza ingano n'imiterere y'amazi acibwa. Urugero, mu gihe cyo gukata vuba, amakuru akoreshwa mu byuma bishobora gutuma amazi atangwa cyane kugira ngo hakonjeshwe neza imyanda, mu gihe ingendo zitinda zishobora gusaba kugabanuka kw'amazi kugira ngo hirindwe imyanda.
Ibitekerezo biva mu byuma bipima amazi nabyo ni ingenzi cyane mu guhangana n’imihindagurikire y’imiterere y’amazi. Uko ubucucike bw’amazi cyangwa ubucucike bw’amazi buhinduka—bitewe n’impinduka z’ubushyuhe cyangwa ubwandu—ibipimo bya Lonnmeter bihita bibona izi mpinduka, bigatuma sisitemu zo kugenzura zisubiramo binyuze mu guhindura umuvuduko w’amazi cyangwa gutangiza kuyungurura amazi. Ubu buryo bugizwe n’ibice bito, bushingiye ku makuru, butuma amazi aguma mu buryo buhamye kugira ngo akore neza mu gukata.
Mu bidukikije birimo ubwinshi bw'amazi, ubushobozi bwo kugenzura no kugenzura uburyo amazi atembera mu buryo bwihuse butuma habaho ubugari buhamye kandi bugagabanya ubusembwa buhenze, nk'uko bigaragara mu nganda zikora ibikoresho bikomeye muri Aziya no mu Burayi. Gucunga amazi mu buryo buhanitse binafasha mu kubungabunga ibintu mbere y'igihe, bigatuma igihe cyo kubaho cy'insinga za diyama cyongera igihe.
Ibikorwa by'inganda bifitiye akamaro kanini sisitemu yo gukata amazi igenzurwa n'amazi. Gucunga neza amazi bigabanya ikiguzi cyo gukoresha no kuyajugunya mu gihe hakoreshwa amazi ahagije kuri buri wafer, bigashyigikira uburyo bwo kubungabunga no kubahiriza amategeko. Kugabanya imyanda y'amazi—biterwa no gutanga ibitekerezo no kuyahindura hashingiwe ku makuru ajyanye n'ibipimo—bituma amafaranga akoreshwa mu bikorwa agabanuka kandi bigagabanya ingaruka mbi ku bidukikije.
Muri make, guhuza amakuru yo gupima ubwiza bw'amazi mu gihe nyacyo, binyuze mu bisubizo bya Lonnmeter, si inkingi ikomeye yo kwemeza ubuziranenge bwa wafer gusa, ahubwo ni n'akamaro k'imikorere mu gikorwa cyo gukata insinga za diyama. Bitanga iterambere rifatika mu kurangiza ubuso, kwizerana mu ikoranabuhanga, umusaruro w'umusaruro, n'uburyo igiciro cyabyo kigenda neza.
Ubushakashatsi bw'igerageza n'ubuyobozi bw'inganda
Ubushakashatsi buherutse gukorwa ku igerageza bwahinduye uburyo bwiza bwo gutanga amazi mu gukata insinga za diyama za silicon wafers. Ubushakashatsi bwerekana ko amazi yo gukata acungwa neza, cyane cyane hakoreshejwe ubuhanga buhanitse, afitanye isano itaziguye no kugabanuka k'amazi ya wafers no kuba meza kurushaho ku buso.
Gukoresha uburyo bwa ultrasonic capillary effect mu gutanga amazi byagaragaye nk'ikintu cyahinduye ibintu. Imiraba ya ultrasound ituma amazi acibwa cyane mu duce duto cyane - cyane cyane mu turere duto cyane kurusha 50 μm - aho uburyo gakondo bwo gutanga amazi bukunze kunanirwa. Uku kwiyongera k'ubwinjirire bw'amazi kugabanya cyane uburyo uduce duto n'imyanda bishyirwa ku buso bwa wafer. Ibizamini by'ubuhanga bigaragaza ko wafers zakoreweho amazi afashijwe na ultrasound zigaragaza inenge nkeya ku buso, bityo umusaruro ukaba mwinshi kandi ukaba wizewe mu mikorere yo hasi.
Gukoresha neza ibipimo ni ingenzi cyane kugira ngo haboneke inyungu nyinshi zo kongera ikoranabuhanga rya ultrasound ndetse n’ikoranabuhanga rya nano-fluid mu kugabanya itangwa ry’amazi. Ibipimo by’ingenzi birimo:
- Intera y'aho amazi anyura: Icyuho kiri hagati y'aho amazi anyura n'aho anyura kigomba kugabanywa kugira ngo amazi arusheho kwiyongera neza.
- Aho transducer ya Ultrasonic iherereye n'uburyo ishyirwamo ringana: Imiterere y'imiterere y'umuraba isobanutse neza ituma umuraba ukwirakwira hamwe n'imikorere y'imitsi.
- Ubushyuhe bw'amazi: Gushyushya bigenzurwa byongera uburyo amazi agenda kandi bigatuma imiyoboro y'amaraso ikora neza.
- Igihe n'inshuro byakoreshejwe muri ultrasound: Igihe gikwiye kirinda ubushyuhe bwinshi mu gihe cyorohereza kwinjira cyane.
- Guhitamo ubwoko bw'amazi: Amazi y'ibanze atandukanye n'inyongeramusaruro bigira ingaruka ku buryo bwihariye ku gukangurwa kwa ultrasonic.
Ikoranabuhanga rya Nanofluid rizana irindi terambere rikomeye. Gukata amazi avanze n’uduce duto nka SiO2 na SiC bigaragaza ko ubushyuhe bugenda neza kandi bugatera amavuta. Iri hinduka rituma habaho gukonjesha neza, gukuraho imyanda, no kugabanya ubukana bw’ubuso bwa wafer. Amakuru agaragaza ko imiterere ya nano-particle ivanze itanga impinduka nziza mu guhuza, igabanya cyane imiterere ya wafer kandi igatanga imiterere myiza kurusha utundi duce duto cyangwa dusanzwe.
Abakora bashaka kunoza imikorere y'amazi yo gukata bashobora gushyira mu bikorwa amabwiriza akurikira y'imikorere:
- Koresha ibipimo by’ubucucike bw’amazi n’ibipimo by’ubucucike (nk’ibyavuye muri Lonnmeter) kugira ngo ukurikirane kandi ugenzure uburyo amazi anyuramo, urebe neza ko imiterere y’amazi anyuramo ikomeza kuba myiza mu gukoresha ikoranabuhanga rya ultrasonic na nano-assistance.
- Kugenzura no guhindura umuvuduko w'amazi acibwa hakoreshejwe uburyo bwo gupima amazi neza cyane. Gupima uburemere bw'amazi ya Coriolis ni ingirakamaro cyane cyane mu gupima amazi acibwa mu nganda, bitanga ubuziranenge mu gihe nyacyo haba mu bucucike no mu bunini.
- Kora buri gihe uburyo bwo gupima amazi kugira ngo ukomeze kubona neza imiterere yayo, ni ngombwa cyane kugira ngo itunganywe neza.
- Hitamo ubwoko bw'amazi yo gukata wafer n'ingano ya nanoparticle bihuye n'ingano ya wafer, imiterere y'insinga ya diyama, n'aho imikorere ibera.
Ubushakashatsi bwo kugereranya bwemeje ko impinduka za parameter imwe-nko kongera umuvuduko w'insinga cyangwa guhindura umuvuduko w'ibiryo-bifitanye isano n'impinduka mu kwangirika kw'insinga, ubukana bw'ubuso, n'impinduka z'ubugari bwose (TTV). Kugumana ubuziranenge bw'amazi n'amazi yihuta kandi asubiza inyuma ni ingenzi mu kugabanya inenge no kongera igihe cy'ubuzima bw'insinga.
Ibibazo Bikunze Kubazwa
Ni gute amazi yo gukata insinga za silicon wafer yongera imikorere yo gukata insinga za diyama?
Amavuta yo gukata silicon wafer akora nk'amavuta yo gusiga n'akonjesha mu gukata insinga za diyama. Inshingano yayo y'ibanze ni ukugabanya gukururana no gusibanganya ubushyuhe buturuka ku nsinga. Gukururana kugabanuka n'ubushyuhe bigabanya uduce duto n'udusimba two gushwanyagurika ku buso, bishobora gutuma wafer yangirika kandi bigatuma umusaruro ugabanuka muri rusange. Amavuta kandi atwara imyanda mu gice cyo gukata, bigatuma insinga ya diyama n'ubuso bwa wafer bikomeza gusukurwa. Uku gukuraho utuntu duto dutuma ubuso bwa wafer bworoha kandi bugashyigikira ikorwa ry'ubuziranenge. Urugero, amazi yo gukata nano hamwe na SiO₂ na SiC nanoparticles ashobora kwinjira cyane mu kabari, bigagabanya ubukana bw'ubuso n'impinduka za wafer, birushaho kunoza umusaruro wa wafer wo gukoreshwa muri semiconductor.
Igipimo cy'amazi gikata ni iki, kandi kuki ari ingenzi mu gukata wafer?
Igipimo cy'amazi gikata gipima ingano nyayo y'amazi agezwa mu gace ko gutema. Kugumana amazi meza ni ingenzi kugira ngo amavuta ahagije akoreshwe, ubushyuhe bushire, kandi imyanda igabanuke. Iyo amazi atemba ari make cyane, insinga ishyuha cyane cyangwa ikarundanya imyanda, bigatera gushwanyagurika no kuvunika. Amazi menshi ashobora kwangiza amazi no guteza ubusumbane bw'umuvuduko, bigira ingaruka ku buryo wafer iramba n'igihe ibikoresho bimara. Gukata ibipimo by'amazi bigenda, nka inline density meters na viscosity meters byakozwe na Lonnmeter, bifasha abakora akazi gukurikirana no guhindura uburyo amazi atangwa mu gihe nyacyo. Ibi bituma inzira iguma mu byiciro byiza, bigatuma umusaruro wa wafer urushaho kwiyongera kandi bikagabanya ubusaza bw'ibikoresho.
Ni gute gupima ingano ya Coriolis bigira akamaro mu kugenzura amazi yo gukata silicon wafer?
Gupima ubunini bwa Coriolis ni ingenzi cyane mu gupima ubunini bw'amazi mu gukora silicon wafer. Bitandukanye n'ibipimo gakondo by'amazi, ibyuma bya Coriolis bipima ubunini bw'amazi mu buryo butaziguye hatitawe ku bucucike bw'amazi, ubucucike, cyangwa ihindagurika ry'ubushyuhe. Iyi miterere ituma habaho gukurikirana neza ubwoko butandukanye bw'amazi yo gukata wafer, harimo n'afite uduce duto. Ingaruka ni uko amazi yo gukata atangwa buri gihe ku gipimo gikwiye, bigakomeza gusiga amavuta neza no gukonjesha nubwo inzira zihindagurika. Izi nyungu zigira uruhare mu buryo butaziguye mu bwiza bw'amazi mu gukata insinga za diyama, aho kugenzura neza bigabanya inenge kandi bigatanga umusaruro mwiza.
Ni ibihe bintu bigira ingaruka ku gupima umuvuduko w'amazi mu gukoresha icyuma gipima insinga za diyama?
Gupima neza umuvuduko w'amazi biterwa n'ibintu byinshi bifitanye isano. Guhitamo sensor ni ingenzi; urugero, sensors za Coriolis mass flow zitanga amakuru yizewe ndetse no ku mazi afite viscous cyangwa agizwe n'uduce duto. Imiterere y'amazi—nk'uko hari uduce duto—ishobora guhindura ubucucike n'ubucucike kandi ikagira ingaruka ku bisabwa mu gupima sensor. Umurambararo w'insinga n'umuvuduko wo gukata nabyo bigira ingaruka ku mubare w'amazi akenewe kugira ngo hakonje neza kandi hakureho imyanda. Gupima buri gikorwa runaka ni ingenzi kugira ngo sensor isome agaciro nyako, irebe neza ko ingano ikwiye y'amazi aciwe ikoreshwa kuri buri gice.
Ese nano-fluids na ultrasonic tekiniki zishobora kongera kwinjira kw'amazi mu gihe cyo gukata silicon wafer?
Ubushakashatsi bwerekana ko nano-fluid, cyane cyane izifite SiO₂ na SiC nanoparticles, zongerera ubushobozi bwo kugeza amazi ku murongo w’ingenzi w’insinga. Utu duce dufasha amazi kugera ku cyuho gito, bigatuma akonjesha neza kandi agashyira amavuta. Byongeye kandi, tekiniki za ultrasonic capillary effect zirushaho kongera urujya n’uruza rw’amazi no kwinjira, cyane cyane mu guca insinga nto cyane. Ibi bivuze ko hakenewe amazi make yo guca kugira ngo hagerwe ku musaruro mwiza, kandi ibisubizo birimo kugabanuka k’amazi, kunoza imiterere y’ubuso, no kugabanya igipimo cy’ubusembwa. Izi ntambwe zishyigikira intambwe igana ku nganda nto kandi nini z’umurambararo mu nganda za semiconductor na photovoltaic, hamwe n’ibikoresho byo kugenzura amazi bigabanya uburyo ibintu bigenzurwa kandi bihoraho muri buri cyiciro cy’umusaruro.
Igihe cyo kohereza: Ukuboza-25-2025
