Chemical Mechanical Polishing

Gutunganya ibikoresho bya chemical-mechanical polishing (CMP) bikunze kugira uruhare mu gukora ubuso buroroshye hakoreshejwe uburyo bwa chemical reaction, cyane cyane mu nganda zikora ibikoresho bya semiconductor.Lonnmeter, umuhanga mu guhanga udushya wizewe ufite uburambe bw'imyaka irenga 20 mu gupima ibipimo by'inline, atanga ikoranabuhanga rigezweho.ibipimo by'ubucucike bitari ibya nyukiliyan'ibikoresho byo gupima ubushyuhe kugira ngo bikemure ibibazo byo gucunga ubushyuhe.

Akamaro k'ubwiza bw'ibirungo n'ubuhanga bwa Lonnmeter

Igikoresho cyo gusiga irangi ry’ibinyabutabire ni inkingi y’ingenzi y’uburyo bwa CMP, kigena imiterere n’ubwiza bw’ubuso. Ubucucike bw’igikoresho cyangwa ubucucike budahuye bishobora gutera inenge nko gushwanyagurika gato, gukuraho ibikoresho bitaringaniye, cyangwa kuziba kw’udupira, bikangiza ubwiza bw’igikoresho no kongera ikiguzi cy’umusaruro. Lonnmeter, ikigo gikomeye ku isi mu bipimo by’inganda, cyihariye mu gupima igikoresho cyo mu murongo kugira ngo gikore neza. Kubera amateka agaragaza ko gitanga ibikoresho byizewe kandi bifite ubuhanga bwo hejuru, Lonnmeter yafatanyije n’inganda zikomeye zikora ibikoresho bya semiconductor kugira ngo bongere kugenzura no kunoza imikorere. Ibipimo byabo bya semiconductor bitari ibya nyukiliya n’ibikoresho bya semiconductor bitanga amakuru agezweho, bigatuma habaho impinduka nyazo kugira ngo hagumane imiterere y’igikoresho no guhaza ibisabwa bikomeye by’inganda zigezweho za semiconductor.

Uburambe bw'imyaka irenga makumyabiri mu gupima ubucucike bw'ibipimo, bwizewe n'ibigo bikomeye bya semiconductor. Ibyuma bya Lonnmeter byagenewe guhuza neza no kubungabunga nta kibazo, bigabanyije ikiguzi cy'imikorere. Ibisubizo byihariye bigamije guhaza ibyifuzo byihariye by'ibikorwa, bitanga umusaruro mwinshi kandi bikubahiriza amategeko.

Uruhare rw'Ubuhanga mu Gutunganya Ibinyabutabire mu by'Ubucuruzi

Gutunganya ibikoresho bya shimi (CMP), kandi byitwa planarization ya shimi, ni inkingi ikomeye mu gukora ibikoresho bya semiconductor, bituma habaho ubuso burambuye kandi budafite inenge kugira ngo hakorwe chips zigezweho. Binyuze mu guhuza gushushanya ibikoresho bya shimi n'uburyo bwo gukubagura ibikoresho, inzira ya CMP igenzura ubwiza bukenewe ku miyoboro myinshi ihuriweho ku nkuta ziri munsi ya 10nm. Uburyo bwo gushushanya ibikoresho bya shimi, bugizwe n'amazi, ibikoresho bya shimi, n'uduce duto two gukubagura, bukorana n'agapapuro ko gushushanya ibikoresho na wafer kugira ngo bikureho ibikoresho kimwe. Uko imiterere ya semiconductor igenda ihinduka, inzira ya CMP ihura n'ingorane nyinshi, isaba kugenzura neza imiterere ya slurry kugira ngo hirindwe inenge kandi hagerwe ku mashini zoroshye kandi zisukuye zisabwa na Semiconductor Foundries and Materials Suppliers.

Iyi gahunda ni ingenzi cyane mu gukora utubumbe twa 5nm na 3nm dufite inenge nke, ibyo bigatuma ubuso bugororotse bushyirwa neza mu byiciro bikurikira. Ndetse no kutumvikana guto bishobora gutuma habaho kongera gukora ibintu bihenze cyangwa kubura umusaruro.

Imbogamizi mu kugenzura imiterere y'ibitaka

Gukomeza ubucucike bw'ibinure n'ubucucike mu buryo buhoraho mu gutunganya imashini za shimi birimo imbogamizi nyinshi. Imiterere y'ibinure ishobora gutandukana bitewe n'ibintu nko gutwara, gushonga amazi cyangwa peroxide ya hydrogen, kuvanga bidahagije, cyangwa kwangirika kwa shimi. Urugero, kwishyira mu tunyangingo tw'ibinure bishobora gutera ubucucike bwinshi hasi, bigatera gukosora ibintu bitari bimwe. Uburyo gakondo bwo kugenzura nka pH, ubushobozi bwo kugabanya ogisijeni (ORP), cyangwa imikorere y'ibinure akenshi ntabwo bihagije, kuko binanirwa kubona impinduka zigaragara mu miterere y'ibinure. Izi mbogamizi zishobora gutuma habaho inenge, kugabanuka kw'ibipimo byo gukuraho, no kwiyongera kw'ibiciro bishobora gukoreshwa, bigatera ibyago bikomeye ku bakora ibikoresho bya semiconductor n'abatanga serivisi za CMP. Impinduka mu miterere mu gihe cyo gutunganya no gutanga zigira ingaruka ku mikorere. Uduce twa sub-10nm dukeneye kugenzura cyane ubuziranenge bw'ibinure n'ubuziranenge bw'ibinure. pH na ORP bigaragaza itandukaniro rito, mu gihe imikorere y'ibinure itandukana bitewe no gusaza kw'ibinure. Imiterere y'ibinure idahuye ishobora kongera ubucucike kugeza kuri 20%, nk'uko ubushakashatsi bw'inganda bubivuga.

Utumashini twa Lonnmeter two kugenzura mu gihe nyacyo

Lonnmeter ikemura ibi bibazo ikoresheje ibipimo byayo bya slurry density bitari ibya kirimbuzi kandiibipimo by'ubushyuhe, harimo n'ikimenyetso cy'ubushyuhe mu murongo kugira ngo hapimwe ubushyuhe mu murongo hamwe n'ikimenyetso cy'ubushyuhe cya ultrasonic kugira ngo hakurikiranwe ubushyuhe n'ubushyuhe icyarimwe. Izi sensors zagenewe guhuzwa neza mu buryo bwa CMP, zifite aho zihurira n'inganda. Ibisubizo bya Lonnmeter bitanga icyizere cy'igihe kirekire no kudakorerwa isuku ku buryo ikora neza. Amakuru aboneka mu gihe nyacyo atuma abakora ibikoresho bashobora kunoza ubushyuhe bw'ubushyuhe, gukumira inenge, no kunoza imikorere yo gusiga, bigatuma ibi bikoresho biba ngombwa cyane ku batanga ibikoresho byo gusesengura no gupima ndetse n'abatanga ibikoresho byo gukoresha bya CMP.

Ibyiza byo Gukurikirana Guhoraho Kugira ngo CMP Irusheho Kubaho

Gukurikirana buri gihe hakoreshejwe sensor za Lonnmeter bihindura uburyo bwo gusiga irangi rya shimi binyuze mu gutanga ibitekerezo bifatika no kuzigama amafaranga menshi. Gupima ubucucike bw'urubura mu gihe nyacyo no gukurikirana ubucucike bigabanya inenge nko gushwanyagurika cyangwa gusiga irangi cyane kugeza kuri 20%, nk'uko ibipimo ngenderwaho by'inganda bibigaragaza. Guhuza na sisitemu ya PLC bituma habaho igenzura ryikora ry’ibipimo n’imikorere, bigatuma imiterere y’urubura iguma mu rugero rwiza. Ibi bituma ibiciro byo gukoresha bigabanukaho 15-25%, igihe cyo gukora kigabanuka, no kunoza uburinganire bwa wafer. Ku ba Semiconductor Foundries na CMP Services, izi nyungu zituma umusaruro wiyongera, inyungu nyinshi, no kubahiriza amahame nka ISO 6976.

Ibibazo Bikunze Kubazwa Ku bijyanye no Gukurikirana Ubutaka muri CMP

Kuki gupima ubucucike bw'ibinure ari ngombwa kuri CMP?

Gupima ubucucike bw'ibinure byemeza ko uduce dukwirakwira hamwe kandi ko bihuza neza, birinda inenge no kunoza uburyo bwo gukuramo ibintu mu buryo bwo gusiga irangi rya shimi. Bishyigikira ikorwa rya wafer nziza kandi bikubahiriza amahame ngenderwaho y'inganda.

Ni gute kugenzura ubushyuhe byongera imikorere myiza ya CMP?

Gukurikirana ubushyuhe bikomeza kugenda neza kw'urubura, bikarinda ibibazo nko kuziba kw'udupira cyangwa gusiga irangi ritaringaniye. Utwuma twa Lonnmeter dutanga amakuru y'igihe nyacyo kugira ngo twongere uburyo bwa CMP kandi twongere umusaruro wa wafer.

Ni iki gituma Lonnmeter ipima ubucucike bw'ibinure bitari ibya kirimbuzi byihariye?

Ibipimo by’ubucucike bw’ibinyabutabire bitari ibya kirimbuzi bya Lonnmeter bitanga ibipimo by’ubucucike n’ubukana icyarimwe kandi bifite ubuziranenge bwo hejuru kandi nta kubungabunga. Igishushanyo cyabyo gikomeye gitanga icyizere mu miterere ya CMP isaba imbaraga nyinshi.

Gupima ubucucike bw'urubura mu gihe nyacyo no gukurikirana ubucucike ni ingenzi mu kunoza uburyo bwo gutunganya ubucucike bw'ibinyabutabire mu nganda za semiconductor. Ibipimo by'ubucucike bw'urubura bitari ibya kirimbuzi bya Lonnmeter hamwe n'ibikoresho byo gupima ubucucike biha abakora ibikoresho bya semiconductor, abatanga ibikoresho byo gukoresha bya CMP, n'ibigo bitanga ibikoresho byo guhangana n'ibibazo byo gucunga ubucucike, kugabanya inenge no kugabanya ikiguzi. Mu gutanga amakuru nyayo kandi agezweho, ibi bisubizo byongera imikorere myiza, bigenzura ko byubahirizwa, kandi bigatera inyungu ku isoko rya CMP rihanganye. SuraUrubuga rwa interineti rwa Lonnmetercyangwa uhamagare itsinda ryabo uyu munsi kugira ngo umenye uburyo Lonnmeter ishobora guhindura imikorere yawe yo gusiga irangi ry'ibinyabutabire.

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Igihe cyo kohereza: 22 Nyakanga-2025