1. Kukonza Nkhani MwapamwambaPkusungunuka
Kodi CMP mu Semiconductor ndi chiyani?
Kupukuta makina a mankhwala (CMP), komwe kumadziwikanso kuti kukonza makina a mankhwala, ndi chimodzi mwa zinthu zovuta kwambiri paukadaulo komanso zachuma pakupanga ma semiconductor amakono. Njira yapaderayi imagwira ntchito ngati njira yosakanizidwa, yosalala bwino malo a wafer kudzera mukugwiritsa ntchito mankhwala opangidwa ndi etching komanso kuphwanya thupi molamulidwa bwino. Pogwiritsa ntchito kwambiri nthawi yopangira, CMP ndi yofunika kwambiri pokonzekera ma wafer a semiconductor a zigawo zina, zomwe zimathandiza mwachindunji kuphatikiza kwakukulu komwe kumafunikira ndi zomangamanga zapamwamba za chipangizocho.
CMP mu Njira ya Semiconductor
*
Kufunika kwakukulu kwakupukuta kwamakina a mankhwalaimachokera ku zofunikira zakuthupi za lithography yamakono. Popeza dera lophatikizidwa lili ndi kuchepa ndi zigawo zingapo zikukwera molunjika, kuthekera kwa njirayi kuchotsa zinthu mofanana ndikukhazikitsa malo ozungulira padziko lonse lapansi kumakhala kofunikira kwambiri. Mutu wopukutira wamphamvu umapangidwa kuti uzizungulira motsatira ma axes osiyanasiyana, ndikulinganiza bwino malo osakhazikika pa wafer. Kuti pakhale kusamutsa bwino mawonekedwe, makamaka ndi njira zamakono monga Extreme Ultraviolet (EUV) lithography, malo onse okonzedwa ayenera kukhala mkati mwa kuya kochepa kwambiri kwa munda - choletsa chomwe chimafuna kusalala kwa Angstrom paukadaulo wamakono wa sub-22 nm. Popanda mphamvu yolinganiza yanjira ya semiconductor ya cmp, njira zotsatizana zojambulira zithunzi zingayambitse kulephera kwa kulumikizana, kusokonekera kwa mapangidwe, ndi maulendo oopsa otuluka.
Kugwiritsidwa ntchito kwa CMP mochuluka kunayendetsedwa kwambiri ndi kusintha kwa makampani kuchoka pa ma conductor a aluminiyamu wamba kupita ku ma coupling a mkuwa ogwira ntchito kwambiri. Kupangidwa kwa zitsulo za mkuwa kumagwiritsa ntchito njira yowonjezera, njira ya Damascene, yomwe imadalira kwambiri mphamvu yapadera ya CMP yochotsa mkuwa wochulukirapo mosankha komanso mofanana ndikuletsa nthawi zonse kuchotsa komwe kuli pakati pa chitsulo ndi oxide insulating layer. Kuchotsedwa kwa zinthu zosankhidwa bwino kumeneku kukuwonetsa bwino momwe mankhwala ndi makina amagwirira ntchito zomwe zimafotokoza njira, zomwe zimawonongeka nthawi yomweyo chifukwa cha kusinthasintha pang'ono kwa zinthu zopukutira.
Ntchito za CMP mu Njira ya Semiconductor
Chofunikira chofunikira pakusintha kwa malo otsika kwambiri si cholinga cha peripheral koma chofunikira chogwira ntchito mwachindunji kuti chipangizo chigwire ntchito modalirika, kuonetsetsa kuti magetsi akuyenda bwino, kutentha kufalikira, komanso kugwirizana bwino m'mapangidwe okhala ndi zigawo zambiri. Cholinga chachikulu cha CMP ndi kuyang'anira malo, kukhazikitsa kusalala kwa zofunikira pazochitika zonse zofunika kwambiri.
Kugwiritsa ntchito kwake kumatanthauza kusankha zipangizo ndi zinthu zomwe zikugwirizana nazokapangidwe ka slurryNjira za CMP zapangidwa kuti zigwire ntchito zosiyanasiyana, kuphatikizapo tungsten, mkuwa, silicon dioxide (SiO2).2), ndi silicon nitride (SiN). Ma slurry amakonzedwa bwino kwambiri kuti azitha kugwira ntchito bwino komanso kusankha bwino zinthu zosiyanasiyana, kuphatikizapo Shallow Trench Isolation (STI) ndi Interlayer Dielectrics (ILD). Mwachitsanzo, slurry ya ceria yogwira ntchito kwambiri imagwiritsidwa ntchito makamaka pa ntchito za ILD chifukwa cha magwiridwe ake apamwamba pakuchepetsa masitepe, kufanana, komanso kuchepetsa ma frequency a zolakwika. Kapangidwe kapadera ka ma slurry awa kamatsimikizira kuti kusakhazikika kwa njira zomwe zimachitika chifukwa cha kusintha kwa mphamvu yamadzimadzi ya chopukutira kudzaphwanya nthawi yomweyo zofunikira zochotsera zinthu zosankhidwa.
2. Udindo Wofunika Kwambiri wa Umoyo wa CMP Slurry
CMP mu Njira ya Semiconductor
Kugwira ntchito bwino kwanjira yopukutira makina ya cmpimadalira kwathunthu kuperekedwa kosalekeza ndi magwiridwe antchito a slurry, yomwe imagwira ntchito ngati njira yofunika kwambiri yothandizira machitidwe ofunikira a mankhwala komanso kusweka kwa makina. Madzi ovuta awa, omwe amadziwika kuti ndi colloidal suspension, ayenera kupereka mosalekeza komanso mofanana zigawo zake zofunika, kuphatikiza mankhwala (oxidizers, accelerators, ndi corrosion inhibitors) ndi tinthu tating'onoting'ono tomwe timakhala ndi kukula kochepa, kupita pamwamba pa wafer.
Kapangidwe ka slurry kamapangidwa kuti kapangitse kuti pakhale mankhwala enaake: njira yabwino kwambiri imadalira kupanga gawo la oxide losasungunuka pa chinthu chomwe chikufunidwa, lomwe limachotsedwa ndi makina ndi tinthu tomwe timayabwa. Njirayi imapereka kusankha kwapamwamba kwa pamwamba kofunikira kofunikira kuti pakhale planarization yogwira mtima, ndikuyika mphamvu yochotsa pamalo okwera kapena otuluka. Mosiyana ndi zimenezi, ngati kuchitapo kanthu kwa mankhwala kumabweretsa mkhalidwe wa oxide wosungunuka, kuchotsa kwa zinthuzo kumakhala isotropic, motero kumachotsa kusankha kwa topographic kofunikira. Zigawo zakuthupi za slurry nthawi zambiri zimakhala ndi tinthu toyabwa (monga silica, ceria) tomwe timakhala ndi kukula kuyambira 30 mpaka 200 nm, tomwe timayimitsidwa pamlingo wa pakati pa 0.3 ndi 12 peresenti ya zinthu zolimba.
CMP Slurry Semiconductor
Kusunga thanzi laCMP slurry semiconductorimafuna kufotokozedwa kosalekeza ndi kulamulidwa nthawi zonse m'moyo wake wonse, chifukwa kuwonongeka kulikonse panthawi yogwira ntchito kapena kufalikira kwa madzi kungayambitse kutayika kwakukulu kwa ndalama. Ubwino wa wafer wopukutidwa womaliza, womwe umafotokozedwa ndi kusalala kwake pang'ono komanso kuchuluka kwa zolakwika, umagwirizana mwachindunji ndi kukhulupirika kwa kugawa kwa tinthu tating'onoting'ono ta slurry (PSD) komanso kukhazikika konse.
Chikhalidwe chapadera cha mitundu yosiyanasiyanaMitundu ya cmp slurryzikutanthauza kuti tinthu tating'onoting'ono tomwe timapangidwa ndi zinthu zazing'ono timakhazikika ndi mphamvu zofooka zamagetsi zomwe zimachotsedwa mkati mwa kuyimitsidwa. Ma slurries nthawi zambiri amaperekedwa mu mawonekedwe okhuthala ndipo amafunika kusungunuka bwino ndikusakanikirana ndi madzi ndi ma oxidizer pamalo opangira. Chofunika kwambiri, kudalira ma static blending ratios ndi cholakwika chachikulu chifukwa zinthu zomwe zikubwera zimakhala ndi kusiyana kwa kuchuluka kwa batch-to-batch.
Pakuwongolera njira, ngakhale kusanthula mwachindunji kwa PSD ndi zeta potential (colloidal stability) ndikofunikira, njira izi nthawi zambiri zimayikidwa ku kusanthula kwakanthawi, kopanda intaneti. Kugwira ntchito kwa HVM kumafuna mayankho a nthawi yeniyeni komanso nthawi yomweyo. Chifukwa chake, kuchulukana ndi kukhuthala kumakhala ngati ma proxies ogwira mtima komanso otheka kuchitapo kanthu kuti pakhale thanzi la slurry. Kuchulukana kumapereka muyeso wofulumira komanso wopitilira wa kuchuluka kwa zinthu zolimba zomwe zimakhala mu sing'anga. Kukhuthala n'kofunikanso, kumagwira ntchito ngati chizindikiro chodziwika bwino cha momwe madziwo alili komanso kutentha kwake. Kukhuthala kosakhazikika nthawi zambiri kumawonetsa tinthu tating'onoting'ono tomwe timakhala ta abrasive.kusonkhanakapena kubwezeretsanso, makamaka pansi pa mikhalidwe yosinthasintha ya shear. Chifukwa chake, kuyang'anira kosalekeza ndi kuwongolera magawo awiriwa a rheological kumapereka njira yofulumira komanso yothandiza yolumikizirana yomwe ikufunika kuti itsimikizire kuti slurry imasungabe momwe imagwirira ntchito mankhwala ndi thupi lake panthawi yomwe imagwiritsidwa ntchito.
3. Kusanthula Kulephera kwa Makina: Zoyendetsa Zolakwika
Zotsatira Zoipa Zoyambitsidwa ndi Kuchulukana kwa CMP ndi Kusinthasintha kwa Kukhuthala
Kusinthasintha kwa njira kumazindikirika ngati chinthu chimodzi chachikulu chomwe chimapangitsa kuti pakhale chiopsezo chachikulu pakugwiritsa ntchito kwambiricmp mu kupanga ma semiconductorMakhalidwe a matope, omwe onse amatchedwa "thanzi la matope," amakhala osavuta kusintha chifukwa cha kupopera, kusinthasintha kwa kutentha, ndi kusagwirizana kosakanikirana. Kulephera kochokera ku dongosolo la matope ndi kosiyana ndi mavuto amakina okha, koma zonsezi zimapangitsa kuti pakhale zidutswa zofunika kwambiri za wafer ndipo nthawi zambiri zimazindikirika mochedwa kwambiri ndi makina otsiriza pambuyo pa ndondomekoyi.
Kupezeka kwa tinthu tating'onoting'ono kapena ma agglomerate akuluakulu kwambiri musemiconductor ya cmpZinthuzi zimagwirizana kwambiri ndi kupangika kwa mikwingwirima yaying'ono ndi zolakwika zina zoopsa pamwamba pa wafer wopukutidwa. Kusinthasintha kwa magawo ofunikira a rheological—kukhuthala ndi kuchulukana—ndizo zizindikiro zopitilira, zotsogola kuti umphumphu wa slurry wawonongeka, zomwe zimayambitsa njira yopangira chilema.
Kusinthasintha kwa Kukhuthala kwa Madzi (monga, zomwe zimapangitsa kuti madzi azitha kusonkhana, kumeta tsitsi mosintha)
Kukhuthala ndi khalidwe la thermodynamic lomwe limayang'anira kayendedwe ka kayendedwe ka madzi ndi mphamvu zokangana pa malo opukutira, zomwe zimapangitsa kuti ikhale yogwirizana kwambiri ndi kupsinjika kwa chilengedwe ndi makina.
Kagwiridwe ka mankhwala ndi thupi kasemiconductor ya kukhuthala kwa slurryDongosololi limadalira kwambiri kuwongolera kutentha. Kafukufuku akutsimikizira kuti ngakhale kusintha pang'ono kwa kutentha kwa 5°C kungayambitse kuchepa kwa kukhuthala kwa slurry pafupifupi 10%. Kusinthaku kwa rheology kumakhudza mwachindunji makulidwe a hydrodynamic film omwe amalekanitsa wafer ndi polishing pad. Kuchepa kwa kukhuthala kumabweretsa mafuta osakwanira, zomwe zimapangitsa kuti makina azikangana kwambiri, zomwe zimayambitsa kukanda pang'ono komanso kugwiritsa ntchito ma pad mwachangu.
Njira yowononga kwambiri imaphatikizapo kusonkhanitsa tinthu tomwe timadulidwa ndi shear-induced particles. Ma slurry okhala ndi silica amasunga kulekanitsidwa kwa tinthu kudzera mu mphamvu zofooka zamagetsi. Pamene slurry ikukumana ndi kupsinjika kwakukulu kwa shear—komwe nthawi zambiri kumachitika chifukwa cha mapampu osayenera a centrifugal kapena kubwerezabwereza kwakukulu mu distribution loop—mphamvu zimenezi zimatha kugonjetsedwa, zomwe zimapangitsa kuti zikhale zofulumira komanso zosasinthika.kusonkhanaza tinthu tomwe timayabwa. Ma aggregates akuluakulu omwe amatuluka amagwira ntchito ngati zida zoboola tinthu tating'onoting'ono, zomwe zimapangitsa kuti pakhale kukanda kwa tizilombo toyambitsa matenda tomwe timawononga kwambiri pamwamba pa wafer. Kuyeza kwa viscometry nthawi yeniyeni ndiyo njira yofunikira yodziwira zochitika izi, zomwe zimapereka chitsimikizo chofunikira cha "kufatsa" kwa makina opopera ndi kugawa zinthu asanayambe kupanga zolakwika zazikulu.
Kusintha kwa kukhuthala kumeneku kumawononganso kwambiri mphamvu ya kukhazikika kwa planarization. Popeza kukhuthala ndi chinthu chachikulu chomwe chimakhudza kuchuluka kwa kugwedezeka panthawi yopukuta, mawonekedwe a kukhuthala osafanana amabweretsa kuchuluka kosasinthasintha kwa zinthu. Kuwonjezeka kwa kukhuthala komwe kumachitika m'deralo, makamaka pamlingo wapamwamba wa kudulidwa komwe kumachitika pamwamba pa mawonekedwe okwera a wafer topography, kumasintha mphamvu ya kugwedezeka ndikuwononga cholinga cha kukhazikika kwa planarization, pamapeto pake kumabweretsa zolakwika za malo monga kupukuta ndi kukokoloka.
Kusinthasintha kwa Kuchuluka kwa Madzi Oundana
Kuchuluka kwa matope ndi chizindikiro chodalirika komanso chofulumira cha kuchuluka kwa zinthu zolimba zomwe zimayikidwa mkati mwa madzi. Kusinthasintha kwa kachulukidwe ka madzi kumasonyeza kuti matope atuluka osafanana, zomwe zimagwirizanitsidwa ndi kusintha kwa kuchuluka kwa zinthu (MRR) ndi kapangidwe ka chilema.
Malo ogwirira ntchito amafunika kutsimikizira kwamphamvu kwa kapangidwe ka matope. Kungodalira kuwonjezera madzi ndi oxidizer ku magulu odzaza omwe akubwera sikokwanira, chifukwa kuchuluka kwa zinthu zopangira nthawi zambiri kumasiyana, zomwe zimapangitsa kuti zotsatira zake zisagwirizane bwino pamutu wa chida. Kuphatikiza apo, tinthu tating'onoting'ono tomwe timakhala ...
How DmaloDmaulendo othawaAffect ManufaculendoingProcess?.
Zotsatira zachindunji za kuchulukana kosakhazikika kwa slurry zimawonekera ngati zolakwika zazikulu zakuthupi pamwamba popukutidwa:
Mitengo Yochotsera Yosafanana (WIWNU):Kusiyanasiyana kwa kuchuluka kwa tinthu tating'onoting'ono tomwe timapanga ...
Kuphulika kwa ming'alu chifukwa cha kufalikira kwa ming'alu m'malo osiyanasiyana:Kuchuluka kwa zinthu zolimba zomwe zimakhala zolimba m'deralo, nthawi zambiri chifukwa cha kukhazikika kapena kusakanizika bwino, kumapangitsa kuti pakhale katundu wambiri pamalo amodzi pa tinthu tating'onoting'ono pamwamba pa wafer. Pamene tinthu tating'onoting'ono tomwe timagunda, makamaka ceria, timamatira kwambiri ku galasi la oxide, ndipo pali kupsinjika kwa pamwamba, katundu wamakina amatha kupangitsa kuti galasi lisweke, zomwe zimapangitsa kuti likhale lakuya komanso lakuthwa.kuponya dzenjeZolakwika. Kusintha kwa zinthu zokwawa kumeneku kungayambitsidwe ndi kusefa kolakwika, zomwe zimapangitsa kuti zinthu zazikulu (tinthu tating'onoting'ono toposa $0.5\\mu m$) zidutse, zomwe zimachitika chifukwa cha kuimitsa bwino kwa tinthu tating'onoting'ono. Kuwunika kuchuluka kwa zinthu kumapereka njira yofunikira komanso yowonjezera yochenjeza zinthu zowerengera tinthu, zomwe zimathandiza mainjiniya kuti azindikire kuyambika kwa magulu a zinthu zokwawa ndikukhazikitsa katundu wokwawa.
Kupanga Zotsalira Kuchokera ku Kuyimitsidwa Kosauka kwa Tinthu Tating'onoting'ono:Pamene kuyimitsidwa sikukhazikika, zomwe zimapangitsa kuti pakhale kuchuluka kwa ma gradients, zinthu zolimba zimasonkhana mu kapangidwe ka kayendedwe ka madzi, zomwe zimapangitsa kuti mafunde achuluke komanso kusonkhana kwa zinthu mu dongosolo logawa.17Kuphatikiza apo, panthawi yopukuta, matope ayenera kunyamula bwino zinthu zomwe zimayambitsa kusintha kwa mankhwala komanso zinyalala zomwe zimawonongeka ndi makina. Ngati kusungunuka kwa tinthu tating'onoting'ono kapena mphamvu yamadzimadzi sizikuyenda bwino chifukwa cha kusakhazikika, zotsalirazi sizichotsedwa bwino pamwamba pa wafer, zomwe zimapangitsa kuti tinthu tating'onoting'ono ndi mankhwala a post-CMP atuluke.zotsaliraZolakwika. Kuyimitsidwa kwa tinthu tokhazikika, komwe kumatsimikiziridwa ndi kuyang'anira kosalekeza kwa rheological, ndikofunikira kuti zinthu zichotsedwe bwino komanso mosalekeza.
Dziwani Zambiri Zokhudza Ma Meter Ochulukirachulukira
Mayeso Ena Ogwiritsa Ntchito Paintaneti
4. Kupambana kwaukadaulo kwa Inline Metrology
Ma Densitometer a Lonnmeter Inline & Viscometers
Kuti mukhazikitse bwino njira yosinthasintha ya CMP, kuyeza kosalekeza komanso kosawononga magawo a thanzi la slurry ndikofunikira.Ma Densitometer a Lonnmeter Inline & ViscometersGwiritsani ntchito ukadaulo wapamwamba kwambiri wa sensor yowunikira, kupereka magwiridwe antchito apamwamba poyerekeza ndi zida zachikhalidwe, zomwe zimakhala ndi nthawi yocheperako. Mphamvu imeneyi imalola kuwunika kosasunthika komanso kosalekeza komwe kumalumikizidwa mwachindunji munjira yoyenda, zomwe ndizofunikira kwambiri kuti zikwaniritse miyezo yoyera komanso yolondola yosakanikirana ya ma node amakono a sub-28nm.
Tsatirani mfundo zawo zazikulu zaukadaulo, kulondola kwa muyeso, liwiro la mayankho, kukhazikika, kudalirika m'malo ovuta a CMP, ndikusiyanitsa ndi njira zachikhalidwe zosagwiritsa ntchito intaneti.
Kuchita zinthu mwadongosolo moyenera kumafuna masensa opangidwa kuti azigwira ntchito moyenera pansi pa mikhalidwe yosinthasintha ya kuyenda kwa madzi ambiri, kuthamanga kwambiri, komanso kuwonetsedwa ndi mankhwala owononga, zomwe zimapereka mayankho nthawi yomweyo ku machitidwe owongolera.
Mfundo Zazikulu Zaukadaulo: Ubwino wa Resonator
Zipangizo za Lonnmeter zimagwiritsa ntchito ukadaulo wamphamvu wowunikira womwe umapangidwa makamaka kuti uchepetse zovuta zomwe zimachitika chifukwa cha ma U-tube densitometers achikhalidwe, omwe ndi ovuta kugwiritsa ntchito ndi ma colloidal suspensions okhwima.
Kuyeza kwa kachulukidwe:Themita yoyezera kuchuluka kwa slurryimagwiritsa ntchito chinthu chogwedezeka cholumikizidwa bwino, nthawi zambiri chimakhala ngati foloko kapena co-axial resonator. Chinthuchi chimalimbikitsidwa ndi piezo-electrically kuti chizisinthasintha pa ma frequency ake achilengedwe. Kusintha kwa kuchuluka kwa madzi ozungulira kumapangitsa kusintha kolondola kwa ma frequency achilengedwe awa, zomwe zimapangitsa kuti kuchuluka kwa madziwo kudziwike mwachindunji komanso modalirika.
Muyeso wa kukhuthala:TheViscometer yoyezera matope mkati mwa ndondomekoyiimagwiritsa ntchito sensa yolimba yomwe imasinthasintha mkati mwa madzi. Kapangidwe kake kamaonetsetsa kuti muyeso wa kukhuthala umasiyana ndi zotsatira za kuyenda kwa madzi ambiri, zomwe zimapangitsa kuti muyeso wamkati wa rheology ya chinthucho ukhale wofanana.
Kugwira Ntchito ndi Kulimba Mtima
Kuyeza kwa resonant komwe kuli mkati kumapereka miyezo yofunika kwambiri yogwirira ntchito yofunika kwambiri pakuwongolera bwino kwa HVM:
Liwiro Lolondola ndi Kuyankha:Machitidwe ozungulira amapereka kuthekera kobwerezabwereza kwambiri, nthawi zambiri amafika pamlingo woposa 0.1% kuti kukhuthala ndi kuchulukana kukhale kolondola mpaka 0.001 g/cc. Kuti muwongolere bwino njira yogwirira ntchito, izi ndi zapamwamba kwambiri.kulondola—kuthekera koyesa mtengo womwewo nthawi zonse ndikupeza zolakwika zazing'ono moyenera—nthawi zambiri kumakhala kofunikira kwambiri kuposa kulondola kwenikweni kwa m'mphepete. Chofunika kwambiri, chizindikirochonthawi yoyankhiraKwa masensa awa ndi achangu kwambiri, nthawi zambiri pafupifupi masekondi 5. Kuyankha kumeneku nthawi yomweyo kumalola kuzindikira zolakwika nthawi yomweyo komanso kusintha kozungulira, chinthu chofunikira kwambiri popewa maulendo.
Kukhazikika ndi Kudalirika M'malo Ovuta:Ma CMP slurry ndi amphamvu kwambiri. Zipangizo zamakono zokhazikika zimamangidwa kuti zikhale zolimba, pogwiritsa ntchito zipangizo zinazake ndi ma configurations kuti zikhazikike mwachindunji m'mapaipi. Masensawa adapangidwa kuti azigwira ntchito pamavuto osiyanasiyana (monga, mpaka 6.4 MPa) ndi kutentha (mpaka 350 ℃). Kapangidwe kake kosakhala ka U-tube kamachepetsa madera akufa komanso zoopsa zotsekeka zomwe zimagwirizanitsidwa ndi abrasive media, zomwe zimapangitsa kuti sensa igwire ntchito bwino komanso kuti ikhale yodalirika.
Kusiyana ndi Njira Zachikhalidwe Zopanda Paintaneti
Kusiyana kwa magwiridwe antchito pakati pa machitidwe okhazikika omwe ali mkati ndi njira zogwiritsira ntchito pamanja zomwe sizili pa intaneti kumatanthauza kusiyana pakati pa kuwongolera zolakwika zomwe zimachitika komanso kukonza njira zogwirira ntchito mwachangu.
| Muyeso Woyang'anira | Osagwiritsa ntchito intaneti (Kuyesa Kuyesa mu Lab/U-Tube Densitometer) | Inline (Lonnmeter Densitometer/Viscometer) | Zotsatira za Njira |
| Liwiro Loyezera | Yachedwa (Maola) | Pompopompo, Mosalekeza (Nthawi yoyankha nthawi zambiri masekondi 5) | Zimathandiza kuti njira zopewera komanso zotsekeka ziziyang'aniridwa. |
| Kugwirizana kwa Deta/Kulondola | Yotsika (Imatha kulakwitsa pamanja, kuwonongeka kwa zitsanzo) | Yapamwamba (Yodzipangira yokha, yobwerezabwereza/yolondola kwambiri) | Kuwongolera njira molimbika komanso kuchepetsa zabwino zabodza. |
| Kugwirizana Kosakhazikika | Chiwopsezo chachikulu cha kutsekeka kwa denga (Kapangidwe ka chibowo cha U-chubu chopapatiza) | Chiwopsezo chochepa cha kutsekeka (Kapangidwe ka resonator kolimba, kosakhala U-tube) | Kugwira ntchito bwino kwa sensa komanso kudalirika kwake mu abrasive media. |
| Kutha Kuzindikira Zolakwika | Kuyankha (kumazindikira maulendo omwe anachitika maola angapo apitawo) | Yogwira ntchito (imayang'anira kusintha kwa mphamvu, imazindikira maulendo msanga) | Zimaletsa zinyalala zoopsa za wafer komanso kubweretsa phindu lalikulu. |
Gome 3: Kusanthula Koyerekeza: Inline vs. Traditional Slurry Metrology
Kusanthula kwachikhalidwe kosagwiritsa ntchito intaneti kumafuna njira yochotsera ndi kunyamula zitsanzo, zomwe zimapangitsa kuti nthawi ichedwe kwambiri mu metrology loop. Kuchedwa kumeneku, komwe kumatha maola ambiri, kumatsimikizira kuti ulendo ukapezeka, kuchuluka kwa ma wafers kumakhala kofooka kale. Kuphatikiza apo, kugwiritsa ntchito pamanja kumabweretsa kusinthasintha ndipo kungayambitse kuwonongeka kwa zitsanzo, makamaka chifukwa cha kusintha kwa kutentha pambuyo poyesa zitsanzo, zomwe zingasokoneze kuwerenga kwa viscosity.
Kuyeza kwa mkati kumachotsa kuchedwa kumeneku, kupereka deta yopitilira mwachindunji kuchokera ku mzere wogawa. Liwiro ili ndilofunikira kwambiri pozindikira zolakwika; zikaphatikizidwa ndi kapangidwe kolimba, kosatsekeka kofunikira pa zinthu zonyamulika, zimapereka deta yodalirika yokhazikika pa dongosolo lonse logawa. Ngakhale kuti zovuta za CMP zimafuna kuyang'anira magawo angapo (monga refractive index kapena pH), kuchulukana ndi kukhuthala zimapereka ndemanga yolunjika komanso yeniyeni pa kukhazikika kwa thupi kwa kuimitsidwa kwa abrasive, komwe nthawi zambiri sikukhudzidwa ndi kusintha kwa magawo monga pH kapena Oxidation-Reduction Potential (ORP) chifukwa cha mankhwala oletsa kufalikira.
5. Zofunikira pa Zachuma ndi Ntchito
Ubwino wa Kuwunika Kuchulukana ndi Kukhuthala kwa Nthawi Yeniyeni
Pa mzere uliwonse wapamwamba wopanga komweCMP mu ndondomeko ya semiconductorNgati ntchito ikugwiritsidwa ntchito, kupambana kumayesedwa ndi kupititsa patsogolo zokolola mosalekeza, kukhazikika kwa njira, komanso kusamalira ndalama molimbika. Kuwunika kwa rheological nthawi yeniyeni kumapereka chidziwitso chofunikira chofunikira kuti tikwaniritse zofunikira zamalondazi.
Zimathandiza Kukhazikika kwa Njira
Kuyang'anira matope mosalekeza komanso molondola kwambiri kumatsimikizira kuti magawo ofunikira a matope omwe amaperekedwa pamalo ogwiritsira ntchito (POU) amakhalabe mkati mwa malire okhwima kwambiri, mosasamala kanthu za phokoso la njira yopitira patsogolo. Mwachitsanzo, poganizira kusiyanasiyana kwa kuchuluka kwa matope osaphika omwe akubwera, kungotsatira njira yophikira sikokwanira. Poyang'anira kuchuluka kwa matope mu thanki ya blender nthawi yeniyeni, makina owongolera amatha kusintha ma dilution ratios mosinthasintha, kuonetsetsa kuti kuchuluka kolondola kwa cholinga kumasungidwa nthawi yonse yosakaniza. Izi zimachepetsa kwambiri kusinthasintha kwa njira zomwe zimachitika chifukwa cha zinthu zopangira zosasinthasintha, zomwe zimapangitsa kuti magwiridwe antchito opukutira azidziwike bwino komanso kuchepetsa kwambiri kuchuluka ndi kuchuluka kwa maulendo okwera mtengo a njira.
Kuchulukitsa Zokolola
Kuthetsa mwachindunji kulephera kwa makina ndi mankhwala komwe kumachitika chifukwa cha kusakhazikika kwa matope ndiyo njira yabwino kwambiri yowonjezererakupanga ma semiconductor a cmpZiwerengero za zokolola. Machitidwe owunikira omwe amalosera nthawi yeniyeni amateteza zinthu zamtengo wapatali. Ma Fabs omwe agwiritsa ntchito machitidwe otere alemba bwino kwambiri, kuphatikizapo malipoti a kuchepa kwa 25% kwa zilema zomwe zatha. Mphamvu yopewera imeneyi imasintha njira yogwirira ntchito kuchoka pakuchitapo kanthu pa zolakwika zosapeŵeka kupita ku kupewa mapangidwe awo, motero kuteteza ma wafer amtengo wapatali mamiliyoni ambiri ku zipsera zazing'ono ndi kuwonongeka kwina komwe kumachitika chifukwa cha kuchuluka kwa tinthu tosakhazikika. Kutha kuyang'anira kusintha kwamphamvu, monga kutsika kwadzidzidzi kwa viscosity komwe kukuwonetsa kutentha kapena kupsinjika kwa shear, kumathandiza kulowererapo zinthu izi zisanafalitse zilema m'ma wafer ambiri.
Amachepetsa Kukonzanso
Chogulitsachokukonzanso ntchitoChiŵerengero, chomwe chimatanthauzidwa ngati kuchuluka kwa zinthu zopangidwa zomwe zimafunikira kukonzanso chifukwa cha zolakwika kapena zolakwika, ndi KPI yofunika kwambiri yoyezera kusagwira bwino ntchito konsekonse kopanga. Kuchuluka kwa ntchito zokonzanso kumawononga ntchito zamtengo wapatali, zinyalala, komanso kumayambitsa kuchedwa kwakukulu. Chifukwa zolakwika monga kuyika mbale, kuchotsa kosagwirizana, ndi kukanda ndi zotsatira zachindunji za kusakhazikika kwa rheological, kukhazikika kwa kuyenda kwa slurry kudzera mu kachulukidwe kosalekeza ndi kuwongolera kukhuthala kumachepetsa kwambiri kuyambitsa zolakwika zazikuluzi. Poonetsetsa kuti njira yokhazikika, kuchuluka kwa zolakwika zomwe zimafuna kukonzanso kapena kupukutanso kumachepetsedwa, zomwe zimapangitsa kuti ntchito igwire bwino ntchito komanso kugwira ntchito bwino kwa gulu lonse.
Zimakonza Ndalama Zogwirira Ntchito
Ma CMP slurry ndi mtengo waukulu wogwiritsidwa ntchito popanga zinthu. Pamene kusatsimikizika kwa njira kumafuna kugwiritsa ntchito njira zambiri zotetezera pakusakaniza ndi kugwiritsa ntchito, zotsatira zake zimakhala kusagwiritsidwa ntchito bwino komanso ndalama zambiri zogwirira ntchito. Kuwunika nthawi yeniyeni kumathandiza kuyang'anira slurry mopanda kuwononga ndalama zambiri. Mwachitsanzo, kuwongolera kosalekeza kumalola kusakaniza bwino, kuchepetsa kugwiritsa ntchito madzi osungunuka ndikuwonetsetsa kuti mtengo wake ndi wokwera.kapangidwe ka slurry ka cmpimagwiritsidwa ntchito bwino, kuchepetsa kutayika kwa zinthu ndi ndalama zogwirira ntchito. Kuphatikiza apo, kuzindikira matenda a rheological nthawi yeniyeni kungapereke machenjezo oyambirira a mavuto a zida—monga kuwonongeka kwa ma pad kapena kulephera kwa pampu—zomwe zimathandiza kukonza zinthuzo zisanawonongeke komanso nthawi yopuma yogwira ntchito.
Kupanga zinthu zokolola zambiri nthawi zonse kumafuna kuchotsa kusinthasintha kwa njira zonse zofunika kwambiri. Ukadaulo wa Lonnmeter resonant umapereka kulimba, liwiro, komanso kulondola kofunikira kuti uchotse chiopsezo cha zomangamanga zotumizira matope. Mwa kuphatikiza deta yeniyeni ya kuchuluka ndi kukhuthala, mainjiniya a njira amakhala ndi luntha lopitilira, lotha kuchitapo kanthu, kuonetsetsa kuti kupukuta kumagwira ntchito bwino komanso kuteteza kukhuthala kwa wafer ku kusakhazikika kwa colloidal.
Kuyambitsa kusintha kuchokera ku kasamalidwe ka phindu lochita zinthu mwachangu kupita ku kasamalidwe ka njira zogwirira ntchito mwachangu:
LimbikitsaniNthawi yopuma ndiChepetsaniKukonzanso:TsitsaniMafotokozedwe Athu Aukadaulo ndiYambitsanindi RFQ Lero.
Tikuitana mainjiniya akuluakulu a ntchito ndi zokolola kutitumizaRFQ yatsatanetsatane. Akatswiri athu aukadaulo adzapanga njira yolondola yogwiritsira ntchito, kuphatikiza ukadaulo wa Lonnmeter wolondola kwambiri mu zomangamanga zanu zogawa matope kuti ayese kuchepetsa komwe kukuyembekezeka kwa kuchuluka kwa zolakwika ndi kugwiritsa ntchito matope.LumikizananiGulu lathu la Machitidwe Odzipangira okha tsopano kutiotetezekaphindu lanu la phindu.Dziwanikulondola kofunikira kofunikira kuti mukhazikitse gawo lanu lofunika kwambiri lokonzekera.
