Kupukuta kwa mankhwala ndi makina (CMP) nthawi zambiri kumachitika popanga malo osalala pogwiritsa ntchito mankhwala, makamaka ntchito mumakampani opanga zinthu za semiconductor.Lonnmeter, katswiri wodalirika wokhala ndi luso la zaka zoposa 20 poyesa kuchuluka kwa shuga m'magazi, amapereka zinthu zamakono kwambirimita yosakhala ya nyukiliyandi masensa a kukhuthala kuti athetse mavuto okhudzana ndi kasamalidwe ka matope.
Kufunika kwa Ubwino wa Slurry ndi Ukatswiri wa Lonnmeter
Kupukuta kwa makina opangidwa ndi mankhwala ndiye maziko a njira ya CMP, zomwe zimatsimikiza kufanana ndi mtundu wa malo. Kuchulukana kwa matope kapena kukhuthala kosasinthasintha kungayambitse zolakwika monga kukanda pang'ono, kuchotsa zinthu zosafanana, kapena kutsekeka kwa mapepala, kuwononga ubwino wa wafer ndikuwonjezera ndalama zopangira. Lonnmeter, mtsogoleri wapadziko lonse lapansi pa mayankho oyezera mafakitale, amadziwika kwambiri pakuyesa matope kuti atsimikizire kuti matope amagwira ntchito bwino. Ndi mbiri yotsimikizika yopereka masensa odalirika komanso olondola kwambiri, Lonnmeter yagwirizana ndi opanga otsogola opanga ma semiconductor kuti awonjezere kuwongolera kwa njira ndi magwiridwe antchito. Masensa awo oyezera matope osakhala a nyukiliya komanso ma viscosity amapereka deta yeniyeni, zomwe zimathandiza kusintha kolondola kuti asunge matope kukhala ogwirizana ndikukwaniritsa zofunikira zolimba za opanga ma semiconductor amakono.
Zaka zoposa makumi awiri za chidziwitso pakuyeza kuchuluka kwa magetsi, zodalirika ndi makampani akuluakulu a semiconductor. Masensa a Lonnmeter adapangidwa kuti azitha kuphatikiza bwino komanso osakonza chilichonse, kuchepetsa ndalama zogwirira ntchito. Mayankho opangidwa kuti akwaniritse zosowa zinazake, kuonetsetsa kuti ma wafers ndi ochulukirapo komanso kuti akutsatira malamulo.
Udindo wa Kupukuta kwa Makina a Mankhwala mu Kupanga Ma Semiconductor
Kupukuta kwa makina a mankhwala (CMP), komwe kumatchedwanso kuti kukonza kwa makina a mankhwala, ndi maziko opangira zinthu za semiconductor, zomwe zimathandiza kupanga malo athyathyathya, opanda chilema kuti apange ma chip apamwamba. Mwa kuphatikiza kupukuta kwa mankhwala ndi kuphulika kwa makina, njira ya CMP imatsimikizira kulondola kofunikira pamabwalo ophatikizika ambiri omwe ali pansi pa 10nm. Dothi lopukuta la makina a mankhwala, lopangidwa ndi madzi, ma reagents a mankhwala, ndi tinthu tating'onoting'ono tomwe timayamwa, limalumikizana ndi pulasitiki ndi wafer kuti lichotse zinthu mofanana. Pamene mapangidwe a semiconductor akusintha, njira ya CMP ikukumana ndi zovuta zambiri, zomwe zimafuna kuwongolera mwamphamvu mawonekedwe a slurry kuti apewe zolakwika ndikukwaniritsa ma wafer osalala, opukutidwa omwe amafunidwa ndi Semiconductor Foundries and Materials Suppliers.
Njirayi ndi yofunika kwambiri popanga ma chips a 5nm ndi 3nm okhala ndi zolakwika zochepa, zomwe zimapangitsa kuti malo osalala aziyikidwa bwino m'magawo otsatira. Ngakhale kusasinthasintha pang'ono kwa matope kungayambitse kukonzanso kokwera mtengo kapena kutayika kwa zokolola.
Mavuto pa Kuyang'anira Katundu wa Slurry
Kusunga kuchuluka kwa matope ndi kukhuthala kosalekeza mu njira yopukutira makina a mankhwala kumakhala ndi zovuta zambiri. Kapangidwe ka matope kumatha kusiyana chifukwa cha zinthu monga mayendedwe, kusungunuka ndi madzi kapena hydrogen peroxide, kusakanizirana kosakwanira, kapena kuwonongeka kwa mankhwala. Mwachitsanzo, kukhazikika kwa tinthu tating'onoting'ono m'matumba a matope kungayambitse kuchuluka kwa ma matope pansi, zomwe zimapangitsa kuti pakhale kupukuta kosafanana. Njira zowunikira zachikhalidwe monga pH, kuthekera kochepetsa okosijeni (ORP), kapena kuyendetsa bwino nthawi zambiri sizokwanira, chifukwa zimalephera kuzindikira kusintha pang'ono kwa kapangidwe ka matope. Zofooka izi zingayambitse zolakwika, kuchepa kwa kuchuluka kwa zochotsa, komanso kuwonjezeka kwa ndalama zomwe zimagwiritsidwa ntchito, zomwe zimayambitsa zoopsa zazikulu kwa opanga zida za semiconductor ndi opereka chithandizo cha CMP. Kusintha kwa kapangidwe kake panthawi yogwira ntchito ndi kupereka kumakhudza magwiridwe antchito. Ma node a Sub-10nm amafunika kuwongolera kwambiri kuyera kwa matope ndi kulondola kwa kusakaniza. pH ndi ORP zimawonetsa kusinthasintha kochepa, pomwe kuyendetsa bwino kumasiyana ndi kukalamba kwa matope. Kapangidwe ka matope kosasinthasintha kumatha kuwonjezera kuchuluka kwa ma pores ndi 20%, malinga ndi kafukufuku wamakampani.
Masensa Olowera a Lonnmeter Oyang'anira Nthawi Yeniyeni
Lonnmeter imathetsa mavutowa ndi makina ake apamwamba oyezera kuchuluka kwa slurry omwe si a nyukiliya komansomasensa a kukhuthala, kuphatikizapo mita yoyezera kukhuthala mkati mwa mzere kuti muyeze kukhuthala mkati mwa mzere ndi mita yoyezera kukhuthala kwa ultrasonic kuti muyeze kukhuthala ndi kuyang'anira kukhuthala nthawi imodzi. Masensa awa adapangidwa kuti agwirizane bwino ndi njira za CMP, zomwe zimakhala ndi maulumikizidwe ofanana ndi makampani. Mayankho a Lonnmeter amapereka kudalirika kwa nthawi yayitali komanso kusakonza kocheperako chifukwa cha kapangidwe kake kolimba. Deta yeniyeni imalola ogwiritsa ntchito kukonza kusakaniza kwa matope, kupewa zolakwika, ndikukonza magwiridwe antchito opukuta, zomwe zimapangitsa kuti zida izi zikhale zofunika kwambiri kwa Opereka Zida Zowunikira ndi Kuyesa ndi Opereka Zogwiritsa Ntchito CMP.
Ubwino wa Kuwunika Kosalekeza kwa Kukonza CMP
Kuyang'anira kosalekeza pogwiritsa ntchito masensa a Lonnmeter omwe ali pamzere kumasintha njira yopukutira makina pogwiritsa ntchito mankhwala mwa kupereka chidziwitso chogwira ntchito komanso kusunga ndalama zambiri. Kuyeza kuchuluka kwa slurry nthawi yeniyeni ndi kuwunika kwa viscosity kumachepetsa zolakwika monga kukanda kapena kupukuta kwambiri ndi 20%, malinga ndi miyezo yamakampani. Kuphatikiza ndi dongosolo la PLC kumathandiza kuti dosing yodziyimira payokha komanso kuwongolera njira, kuonetsetsa kuti slurry imakhala mkati mwa miyeso yoyenera. Izi zimapangitsa kuti ndalama zomwe zimagwiritsidwa ntchito zikhale zochepa ndi 15-25%, kuchepetsa nthawi yopuma, komanso kusintha kufanana kwa wafer. Kwa Semiconductor Foundries ndi CMP Services Providers, maubwino awa amatanthauza kuti pakhale zokolola zambiri, phindu lalikulu, komanso kutsatira miyezo monga ISO 6976.
Mafunso Ofala Okhudza Kuwunika kwa Slurry mu CMP
Chifukwa chiyani kuyeza kuchuluka kwa slurry ndikofunikira pa CMP?
Kuyeza kuchuluka kwa tinthu tating'onoting'ono kumatsimikizira kufalikira kwa tinthu tofanana komanso kusasinthasintha kwa kaphatikizidwe, kupewa zolakwika ndikuwonjezera kuchuluka kwa zochotsera mu njira yopukutira yamakina. Kumathandizira kupanga ma wafer apamwamba kwambiri komanso kutsatira miyezo yamakampani.
Kodi kuyang'anira kukhuthala kwa thupi kumawonjezera bwanji mphamvu ya CMP?
Kuwunika kukhuthala kwa madzi kumasunga kuyenda kwa madzi kosalekeza, kupewa mavuto monga kutsekeka kwa ma pad kapena kupukuta kosagwirizana. Masensa a Lonnmeter omwe ali pamzere amapereka deta yeniyeni kuti akonze bwino njira ya CMP ndikuwonjezera kuchuluka kwa ma wafer.
Kodi n’chiyani chimapangitsa kuti mita ya Lonnmeter yosakhala ya nyukiliya ikhale yapadera?
Mamita oyezera matope a Lonnmeter omwe si a nyukiliya amapereka miyeso yoyezera matope ndi kukhuthala nthawi imodzi molondola kwambiri komanso osakonza chilichonse. Kapangidwe kake kolimba kamatsimikizira kudalirika m'malo ovuta a CMP.
Kuyeza kuchuluka kwa slurry nthawi yeniyeni komanso kuwunika kukhuthala ndikofunikira kwambiri pakukonza njira yopukutira mankhwala popanga semiconductor. Ma sensor a slurry density a Lonnmeter omwe si a nyukiliya komanso oyezera kukhuthala amapatsa Opanga Zida za Semiconductor, Ogulitsa Zogwiritsidwa Ntchito za CMP, ndi Oyambitsa Semiconductor zida zothanirana ndi zovuta zoyendetsera slurry, kuchepetsa zolakwika, komanso kuchepetsa ndalama. Mwa kupereka deta yolondola komanso yeniyeni, mayankho awa amathandizira magwiridwe antchito, kuonetsetsa kuti akutsatira malamulo, ndikuyendetsa phindu pamsika wopikisana wa CMP. Pitani kuWebusaiti ya Lonnmeterkapena funsani gulu lawo lero kuti mudziwe momwe Lonnmeter ingasinthire ntchito zanu zopukuta makina a mankhwala.
Nthawi yotumizira: Julayi-22-2025
