1. Te Whakamārama i te Horopaki o te MatatauPte hinu
He aha te CMP i roto i te Semiconductor?
Ko te whakakanapa matū-ā-ringa (CMP), e mōhiotia ana ko te whakarārangi matū-ā-ringa, tētahi o ngā mahi waeine tino uaua ki te hangarau me te pūtea i roto i te hanganga haurua-ā-ringa hou. Ka mahi tēnei tikanga motuhake hei tukanga ranu tino nui, e whakangawari ana i ngā mata o te paparanga mā te whakamahi tahi o te whakairo matū me te ātete ā-tinana tino whakahaeretia. He mea nui te CMP mō te whakarite i ngā paparanga haurua-ā-ringa mō ngā paparanga e whai ake nei, e āhei tika ana i te whakaurunga kiato-teitei e hiahiatia ana e ngā hoahoa taputapu matatau.
CMP i roto i te Tukanga Ārahi-Haumaru
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Ko te hiahia nui ote whakakanapa matū ā-ringae ahu mai ana i ngā whakaritenga ā-tinana o te tuhi whakaahua o nāianei. I te mea ka mimiti haere ngā āhuatanga o te ara iahiko whakauru, ā, ka whakarārangihia poutū ngā paparanga maha, ka tino hira te kaha o te tukanga ki te tango i ngā rauemi me te whakatū i tētahi mata papatahi ā-ao. Kua hangaia te pane whakakanapa hihiri kia huri i ngā toki rerekē, kia ata whakatauritea te āhua whenua koretake puta noa i te papa. Mō te whakawhiti tauira angitu, inā koa me ngā tikanga matatau pēnei i te tuhi whakaahua Ultraviolet (EUV), me taka te mata tukatuka katoa ki roto i tētahi hōhonutanga o te mara tino whaiti—he herenga āhuahanga e hiahia ana kia papatahi te taumata Angstrom mō ngā hangarau hou o raro i te 22 nm. Ki te kore te mana papatahi o tetukanga haurua-ā-ira cmp, mā ngā mahi whakaahua i muri mai ka hua ake ngā rahunga whakarārangi, ngā hapa o te tauira, me ngā pikinga nui o te hua.
Ko te nekehanga o te umanga mai i ngā ara iahiko konumohe tuku iho ki ngā hononga parahi mahi-teitei te take i whānuitia ai te whakamahinga o te CMP. Mā te whakarewa parahi ka whakamahia he tukanga tauira tāpiri, arā, te tikanga Damascene, e whakawhirinaki ana ki te kaha ahurei o te CMP ki te tango i te parahi nui me te ōrite, me te aukati tonu i te mahi tango i te hononga i waenga i te konganuku me te paparanga ārai waikura. Ko tēnei tango rauemi tino whiriwhiri e whakaatu ana i te taurite matū me te miihini ngawari e tautuhi ana i te tukanga, he taurite ka whakararu tonutia e ngā huringa iti noa i roto i te reo whakakanapa.
Ngā Mahi a te CMP i roto i te Tukanga Ārahi-Haumaru
Ko te whakaritenga matua mō te rerekētanga o te whenua tino iti ehara i te whāinga taha engari he whakaritenga mahi tika mō te mahi pono o te taputapu, te whakarite i te rere tika o te iahiko, te tohatoha wera, me te whakaritenga mahi i roto i ngā hanganga maha-paparanga. Ko te whakaritenga matua a CMP ko te whakahaere whenua, te whakatū i te papatahi o mua mō ngā mahi tukatuka nui katoa e whai ake nei.
Ko te tono motuhake e tohu ana i te whiriwhiringa o ngā rauemi me te mea e tika anahanganga paruKua whakawhanakehia ngā tukanga CMP hei whakahaere i ngā rauemi kanorau, tae atu ki te tungsten, te parahi, te silicon dioxide (SiO2), me te silicon nitride (SiN). Ka tino arotauhia ngā parapara kia pai ai te whakarite me te whiriwhiri rauemi tino pai puta noa i te whānuitanga o ngā tono, tae atu ki te Shallow Trench Isolation (STI) me te Interlayer Dielectrics (ILD). Hei tauira, ka whakamahia motuhaketia te parapara ceria mahi-teitei mō ngā tono ILD nā te mea he pai ake tana mahi i roto i te whakawhāiti i ngā taahiraa, te ōritetanga, me te whakaiti i te auau hapa. Ko te āhua tino motuhake o ēnei parapara e whakaū ana ko te kore pumau o te tukanga e puta mai ana i ngā rerekētanga o te hihiri wai o te reo whakakanapa ka takahi tonu i ngā whakaritenga taketake mō te tango rauemi whiriwhiri.
2. Te Tūranga Matua o te Hauora Para CMP
CMP i roto i te Tukanga Ārahi-Haumaru
Te whai huatanga pumau o tetukanga whakakanapa matū miihini cmpe whakawhirinaki katoa ana ki te tuku me te mahi pumau o te para, e mahi ana hei reo nui hei whakahaere i ngā tauhohenga matū e tika ana me te pao ā-ringa. Ko tēnei wai matatini, e tohuhia ana he whakatārewatanga colloidal, me tuku tonu me te ōrite i ōna wāhanga matua, tae atu ki ngā matū (ngā kaiwhakaora, ngā whakateretere, me ngā aukati waikura) me ngā matūriki pao rahi-nano, ki te mata wafer hihiri.
Kua hangaia te hanganga paru hei whakaoho i tētahi tauhohenga matū motuhake: ko te tukanga tino pai e whakawhirinaki ana ki te hanga i tētahi paparanga waikura kore-rewa e kore e taea te whakakore i runga i te rauemi ūnga, kātahi ka tangohia ā-mīhini e ngā matūriki whakakoi. Mā tēnei tikanga ka whakawhiwhia te whiriwhiringa mata teitei e tika ana mō te whakapūmautanga whai hua, me te arotahi i te mahi tango ki ngā pūwāhi teitei, ki ngā pūwāhi rānei. He rerekē, ki te puta he āhua waikura wairewa i te tauhohenga matū, ka isotropic te tango rauemi, ā, ka whakakorea te whiriwhiringa mata e hiahiatia ana. Ko ngā wāhanga ā-tinana o te paru he matūriki whakakoi (hei tauira, te silica, te ceria) mai i te 30 ki te 200 nm te rahi, e iri ana i ngā kukū i waenga i te 0.3 me te 12 ōrau taumaha totoka.
Kaihautū Para CMP
Te pupuri i te hauora o teHe haurua haurua para CMPme whai whakaahuatanga me te whakahaere tonu i roto i tōna huringa ora, nā te mea ko te whakahekenga i te wā e whakahaeretia ana, e tohatohahia ana rānei, ka arahi pea ki te mate moni nui. Ko te kounga o te anga kua orohia whakamutunga, e tautuhia ana e tōna maeneene nano me ngā taumata hapa, e hono tika ana ki te pono o te tohatoha rahi matūriki (PSD) o te para me te pumau whānui.
Te āhua motuhake o ngā momongā momo paru cmpKo te tikanga, ka whakauhia ngā matūriki nano-rahi e ngā kaha hiko ātete ngawari i roto i te whakatārewatanga. He maha ngā wā ka tukuna ngā parai i roto i te āhua kukū, ā, me tino whakaranu me te whakaranu ki te wai me ngā waikura i te wāhi hanga. He mea nui, he hapa te whakawhirinaki ki ngā ōwehenga whakaranu pūmau nā te mea he rerekē te kiato o te puranga-ki-te-puranga o ngā rauemi kukū e haere mai ana.
Mō te whakahaere tukanga, ahakoa he mea nui te tātari tika o te PSD me te pūmanawa zeta (te pumau o te colloidal), ko ēnei tikanga ka tukuna ki te tātari wā-poto, tuimotu. Ko te mooni mahi o te taiao HVM e whakahau ana i te urupare wā-tūturu, tere tonu. Nō reira, ko te mātotoru me te matotoru te mea tino whai hua me te mahi hei tohu ā-roto mō te hauora o te paru. Ka whakaratohia e te mātotoru he ine tere, tonu o te kukū katoa o ngā totoka whakakoi i roto i te reo. He rite tonu te hiranga o te matotoru, e mahi ana hei tohu tino tairongo o te āhua colloidal me te pumau o te wai. He maha ngā wā ka tohuhia e te matotoru kore pumau he matūriki whakakoi.huihuingate whakakotahitanga rānei, inā koa i raro i ngā āhuatanga kutikuti hihiri. Nō reira, ko te aroturukitanga me te whakahaere tonu i ēnei tawhā rheological e rua ka whakarato i te porowhita urupare tere, mahi e hiahiatia ana hei manatoko kei te mau tonu te paru i tōna āhua matū me te āhua ā-tinana kua tohua i te wā e kainga ana.
3. Te Tātaritanga o te Rahunga Ā-Mīhini: Ngā Ārai o te Hapa
Ngā Pānga Kino i Pā mai i ngā Hurihuri o te Kiato me te Matatini CMP
E mōhiotia ana te rerekētanga o te tukanga ko te mea nui rawa atu ki te whakaputa mōrearea i roto i te putanga nuicmp i roto i te hangahanga haurua-iraKo ngā āhuatanga o te paru, e kiia nei ko te "hauora paru," he tino pāngia e ngā huringa e puta mai ana i te kutikuti papu, te piki me te heke o te pāmahana, me ngā rerekētanga o te ranunga. He rerekē ngā hapa e puta mai ana i te pūnaha rere paru i ngā take miihini noa iho, engari ko ngā mea e rua ka hua ake he para wafer nui, ā, he maha ngā wā ka kitea i muri rawa e ngā pūnaha mutunga-tukanga.
Te kitea o ngā matūriki nunui rawa, ngā mea rānei e kohikohi ana i roto i tehaurua-ā-ira cmpE kitea ana te hononga o te rauemi ki te hanganga o ngā karawarawa moroiti me ētahi atu hapa whakamate i runga i te mata o te papa kua orohia. Ko ngā piki me ngā heke o ngā tawhā rheological matua—te matotoru me te mātotoru—koia ngā tohu matua tonu kua ngoikore te kounga o te paru, ā, koinei te tīmatanga o te hanganga hapa.
Ngā Hurihuri o te Matotoru o te Para (hei tauira, ka hua ake te whakakotahitanga, te rerekētanga o te kutikuti)
Ko te matotoru he āhuatanga thermodynamic e whakahaere ana i te whanonga rere me ngā āhuatanga waku i te atanga oro, e tino pāngia ai e te ahotea taiao me te ahotea ā-mīhini.
Te mahi matū me te mahi ā-tinana o tehaurua-whakawhiti matotoru paraiHe tino whakawhirinaki te pūnaha ki te whakahaere pāmahana. E whakaū ana ngā rangahau ahakoa he nekehanga iti noa iho o te pāmahana tukanga ki te 5°C ka taea te heke iho i te matotoru o te paru mā te 10%. Ka pā tika tēnei huringa o te rheology ki te matotoru o te kiriata hydrodynamic e wehe ana i te wafer mai i te papa oro. Ko te hekenga o te matotoru ka hua ake he koretake o te hinu whakahinuhinu, ka hua ake he nui ake te waku miihini, he tino take o ngā karawarawa moroiti me te tere o te whakamahinga o te papa.
Ko tētahi ara whakararuraru nui ko te whakarōpūtanga matūriki i puta mai i te kutikuti. Ka pupurihia e ngā paru i ahu mai i te silica te wehenga o ngā matūriki mā roto i ngā kaha pana hiko ngawari. Ina tūtaki te paru ki ngā ahotea kutikuti teitei—e puta pinepine ana i ngā papu porotītaha tikanga hē, i te hurihanga whānui rānei i roto i te porowhita tohatoha—ka taea te wikitoria i ēnei kaha, ka arahi ki te tere me te kore e taea te huri.huihuingao ngā matūriki whakakoi. Ko ngā matūriki nunui ka puta mai he taputapu keri-moroiti, ka hanga tika i ngā karawarawa moroiti kino ki te mata o te papa. Ko te viscometry wā-tūturu te tikanga urupare e tika ana hei kite i ēnei kaupapa, e whakarato ana i te manatoko nui o te "ngawari" o te pūnaha papu me te tohatoha i mua i te puta o te hapa nui.
Ko te rerekētanga o te matotoru ka tino whakararu i te whai huatanga o te whakapūmau papatahi. Nā te mea he mea nui te matotoru e pā ana ki te tauwehenga o te waku i te wā e whakakanapahia ana, ka hua ake he tere tango rauemi kore-taurite i te kōtaha matotoru kore-taurite. Ko te pikinga o te matotoru ā-rohe, inā koa i ngā tere kutikuti teitei e puta ana i runga i ngā āhuatanga kua ara ake o te āhua o te papa o te papa, ka whakarerekē i ngā nekehanga waku, ā, ka whakararu i te whāinga whakapūmau papatahi, ā, ka mutu, ka hua ake he hapa āhua o te whenua pērā i te riu me te horo.
Ngā Hurihuri o te Matotoru o te Parai
Ko te mātotoru o te paru te tohu tere me te pono o te kukū whānui o ngā totoka whakakoi e iri ana i roto i te wai. Ko ngā rerekētanga mātotoru e tohu ana i te tuku paru kore-ōrite, e hono ana ki ngā huringa o te tere tango rauemi (MRR) me te hanganga hapa.
Me whakamanahia te hanganga o te paru i roto i ngā taiao mahi. Kāore e ranea te whakawhirinaki noa ki te tāpiri i ngā rahinga wai me te waikura kua tohua ki ngā puranga kukū e haere mai ana, nā te mea he rerekē te matotoru o te rauemi mata, ka hua ake he hua tukatuka koretake i te pane taputapu. Hei tāpiri, ko ngā matūriki whakakoi, inā koa ko ngā matūriki ceria kukū teitei ake, ka pāngia e te oneone mena kāore i te rawaka te tere rere, te pumau rānei o te colloidal. Ka hangaia e tēnei taunga he pikinga matotoru ā-rohe me te whakakotahitanga rauemi i roto i ngā raina rere, ka tino whakararu i te kaha ki te tuku i te kawenga whakakoi rite tonu.
How DkahaDngā whakarerengaAffētahi atu Manufachurite mahiProcess?.
Ko ngā hua tika o te matotoru o te paru kāore i te pumau ka puta ko ngā hapa tinana nui i runga i te mata kua orohia:
Ngā Reiti Tango Kore-Kōtahi (WIWNU):Ko ngā rerekētanga o te mātotoru ka huri tika ki ngā rerekētanga o te kukū o ngā matūriki whakakoi hohe e whakaatuhia ana i te atanga whakakanapa. Ko te mātotoru iti iho i te mea kua tohua e tohu ana i te hekenga o te kukū whakakoi, ka hua ake he MRR kua heke, ā, ka puta he kore-ōrite i roto i te wafer (WIWNU) e kore e whakaaetia. Ka whakararu te WIWNU i te whakaritenga papatahi taketake. I tetahi atu taha, ko te mātotoru teitei ā-rohe ka whakanui ake i te kawenga matūriki whai hua, ka arahi ki te tango rauemi nui rawa. Ko te whakahaere pakari i te mātotoru ka whakarite i te tuku whakakoi rite tonu, e hono kaha ana ki ngā kaha waku pumau me te MRR e taea te matapae.
Te Pokapū Nā Ngā Rerekētanga Whakahāngai Ā-Rohe:Ko te nui o ngā kukū ā-rohe o ngā totoka whakakoi, nā te taunga, te kore rānei e ranea te whakaranu, ka hua ake he kawenga nui ā-rohe mō ia matūriki i runga i te mata o te papa. Ina piri kaha ngā matūriki whakakoi, inā koa ko te ceria, ki te paparanga karāhe waikura, ā, kei te kitea ngā taumahatanga o te mata, ka taea e te kawenga ā-pūkaha te meinga te paparanga karāhe kia pakaru, ka hua ake he mata hohonu, koi.pokangā hapa. Ka puta pea ēnei rerekētanga whakakoi i te ngoikore o te tātari, ka taea ai te haere o ngā konganuku nui rawa (ngā matūriki nui atu i te $0.5\ \mu m$), nā te ngoikore o te whakatārewatanga matūriki. Mā te aroturuki i te mātotoru ka whakaratohia he pūnaha whakatūpato nui, tautoko hoki ki ngā kaute matūriki, e taea ai e ngā kaihanga tukanga te kite i te tīmatanga o te whakarōpū whakakoi me te whakaū i te kawenga whakakoi.
Te Hanganga Toenga mai i te Whakatārewatanga Matūriki Korekore:Ina kore e pumau te whakatārewatanga, ka hua ake he pikinga kiato teitei, ka kohikohi te rauemi totoka ki roto i te hanganga rere, ka hua ake ai ngā ngaru kiato me te whakakotahitanga o ngā rauemi ki roto i te pūnaha tohatoha.17Hei tāpiri atu, i te wā e whakakanapahia ana, me kawe pai e te paru ngā hua tauhohenga matū me ngā para ā-ringa. Mena he ngoikore te whakatārewatanga matūriki, te kaha rānei o te wai nā te kore pumau, kāore ēnei toenga e tangohia pai mai i te mata o te papa, ka hua ake he matūriki me te matū i muri i te CMP.toengangā hapa. He mea whakahau kia pumau te whakatārewatanga matūriki, mā te aroturukitanga rheological tonu, kia ma ai, kia haere tonu ai te tango rauemi.
Ako atu mō ētahi atu mita mātotoru
Ētahi atu Mita Tukanga Ipurangi
4. Te Hiranga Hangarau o te Ine Raina-ā-Rārangi
Inenga Rori Ngā Inenga Tātaritanga me ngā Inenga Mata
Hei whakatau i te tukanga CMP hurihuri, he mea nui te ine tonu, kore-whakaekenga, i ngā tawhā hauora o te paru.Inenga Rori Ngā Inenga Tātaritanga me ngā Inenga MataWhakamahia te hangarau pūoko oro matatau rawa atu, e tuku ana i te mahi tino pai ki te whakataurite ki ngā taputapu ine ine tuku iho, e ngāwari ana ki te whakaroa. Mā tēnei āheinga ka taea te aroturuki i te kiato me te haere tonu i roto i te ara rere, he mea nui mō te whakatutuki i ngā paerewa parakore me te tika o te ranunga o ngā pona tukanga sub-28nm hou.
Whakamāramahia ngā āhuatanga matua o ā rātou mātāpono hangarau, te tika o te ine, te tere o te urupare, te pumau, te pono i roto i ngā taiao CMP uaua, me te wehewehe i a rātou mai i ngā tikanga tuimotu tuku iho.
Ko te aunoatanga o ngā tukanga whai hua me hanga ngā pūoko kia mahi pono i raro i ngā āhuatanga hihiri o te rere nui, te pēhanga teitei, me te pānga o ngā matū whakakoi, kia tere ai te urupare ki ngā pūnaha whakahaere.
Ngā Mātāpono Hangarau Matua: Te Painga o te Resonator
Ka whakamahia e ngā taputapu mita-lonn ngā hangarau haruru pakari i hangaia mō te whakaiti i ngā ngoikoretanga ā-roto o ngā mita-taipitopito U whaiti tuku iho, he mea tino uaua mō te whakamahi ā-roto me ngā whakatārewatanga korori āwhati.
Te Ine i te Matotoru:Temita mātotoru parue whakamahi ana i tētahi huānga wiri kua oti te whakapiri, ko te nuinga he huihuinga marau, he resonator co-axial rānei. Ka whakaohokia tēnei huānga mā te hiko piezo kia wiri i tōna auau tūturu. Mā ngā huringa o te mātotoru o te wai e karapoti ana ka puta he nekehanga tika i roto i tēnei auau tūturu, ka taea ai te whakatau tika me te tino pono o te mātotoru.
Te Ine i te Matatini:TeIne matao paru kei te tukatukahiae whakamahi ana i tētahi pūoko pakari e wiri ana i roto i te wai. Mā te hoahoa ka wehea te ine matotoru mai i ngā pānga o te rere o te wai nui, e whakarato ana i tētahi ine ā-roto o te rheology o te rauemi.
Te Mahi Whakahaere me te Manawanui
Mā te inenga ā-roto e tuku ngā inenga mahi nui e tika ana mō te whakahaere HVM pakari:
Te Tika me te Tere o te Urupare:He tino kaha te whakahokinga o ngā pūnaha ā-roto, ā, he maha ngā wā ka eke ki te 0.1% te matotoru me te tika o te mātotoru tae noa ki te 0.001 g/cc. Mō te whakahaere tukanga pakari, ko tēnei teiteitika—te kaha ki te ine tonu i te uara kotahi me te kite pono i ngā pekapeka iti—he maha ngā wā he nui ake te uara i te tika tuturu taha. He mea nui, ko te tohuwā whakautuhe tino tere rawa atu mō ēnei pūoko, tata ki te 5 hēkona te nuinga. Mā tēnei urupare tata-wawe ka taea te kite hapa tonu me te whakatikatika aunoa i te porowhita kati, he whakaritenga matua mō te ārai i te toronga.
Te Pūmautanga me te Pono i roto i ngā Taiao Kino:He kaha rawa ngā paru CMP. He mea hanga ngā taputapu hou mō te manawanui, mā te whakamahi i ngā rauemi me ngā whirihoranga motuhake mō te whakairi tika ki roto i ngā paipa. Kua hangaia ēnei pūoko kia mahi puta noa i te whānuitanga o ngā pēhanga (hei tauira, tae atu ki te 6.4 MPa) me ngā pāmahana (tae atu ki te 350 ℃). Mā te hoahoa kore-ngūpu-U ka whakaitihia ngā rohe mate me ngā mōrearea aukati e pā ana ki ngā pāpāho whakakoi, ka whakanui ake i te wā mahi o te pūoko me te pono o te mahi.
Te Rerekētanga mai i ngā Tikanga Tuku Iho Tuimotu
Ko ngā rerekētanga mahi i waenga i ngā pūnaha ā-roto aunoa me ngā tikanga tuimotu ā-ringa e tautuhi ana i te āputa i waenga i te whakahaere hapa tauhohe me te arotau tukanga matatau.
| Paearu Aroturuki | Tuimotu (Tauira Taiwhanga/Inenga Ine-U) | Inline (Lonnmeter Densitometer/Viscometer) | Pānga Tukanga |
| Tere Ine | Kua whakaroa (Ngā Hāora) | Wā-tūturu, Tonu (Te wā urupare he 5 hēkona te nuinga) | Ka whakahohe i te whakahaere tukanga aukati, porowhita-katia. |
| Te Pūmautanga/Te Tika o ngā Raraunga | Iti (Ka pāngia e te hapa ā-ringa, te whakahekenga tauira) | Teitei (Aunoa, teitei te auautanga/tika) | He whakakaha ake i ngā here whakahaere tukanga, ā, he whakaiti i ngā hua teka. |
| Hototahi Whakakorikori | Te mōrearea nui o te aukati (Hoahoa poka U-ngongo whaiti) | He iti te mōrearea ārai (He hoahoa pakari, kāore he ngongo-U) | Te roa o te mahi me te pono o te pūoko i roto i ngā rauemi whakakoi. |
| Te Āheinga Kite Hapa | Tauhohe (ka kitea ngā haerenga i puta i ngā hāora kua hipa) | Matatau (e aroturuki ana i ngā huringa hihiri, e kite wawe ana i ngā haerenga) | Ka ārai i te kino o ngā para wafer me te hekenga o ngā hua. |
Ripanga 3: Tātaritanga Whakataurite: Inenga Parapara ā-roto me te Inenga Parapara Tuku Iho
Ko te tātari tuimotu tuku iho e hiahia ana ki te tukanga tango tauira me te kawe, ā, ka whakaurua he wā roa ki roto i te porowhita ine. Ko tēnei whakaroa, e roa ana mō ngā hāora, ka whakarite kia pakaru te nui o ngā wafers ina kitea he toronga. Hei tāpiri, ko te whakahaere ā-ringa ka whakaurua he rerekētanga, ā, ka tūpono te hekenga o te tauira, inā koa nā ngā nekehanga pāmahana i muri i te tango tauira, ka taea te whakapē i ngā pānui matotoru.
Ka whakakorea e te inenga ā-roto tēnei whakaroa ngoikore, ka whakaratohia he rerenga raraunga tonu mai i te raina tohatoha. He mea nui tēnei tere mō te kimi hapa; ina honoa ki te hoahoa pakari, kore-aukati e tika ana mō ngā rauemi whakakoi, ka whakaratohia he whāngai raraunga pono hei whakau i te pūnaha tohatoha katoa. Ahakoa te uaua o te CMP e whakahau ana i te aroturuki i ngā tawhā maha (pēnei i te taupū whakaata, te pH rānei), ko te mātotoru me te matotoru e whakarato ana i te urupare tino tika, wā-tūturu ki te pumau ā-tinana taketake o te whakatārewatanga whakakoi, he maha ngā wā kāore e pāngia e ngā huringa o ngā tawhā pēnei i te pH, te Pūmanawa Whakaiti-Okiokinga (ORP) rānei nā te parenga matū.
5. Ngā Āhuatanga Ōhanga me te Whakahaere
Ngā Painga o te Aroturukitanga o te Mātotoru me te Matatini Wā-Tūturu
Mō tētahi raina hanga matatau kei reira teCMP i roto i te tukanga haurua-iraina whakamahia, ka inehia te angitu mā te whakapai tonu i te hua, te pumau o te tukanga, me te whakahaere utu pakari. Ko te aroturukitanga rheological wā-tūturu e whakarato ana i te hanganga raraunga nui e hiahiatia ana hei whakatutuki i ēnei whakaritenga arumoni.
Whakarei ake i te Pūmautanga o te Tukanga
Mā te aroturuki tonu i te paru tino tika, ka oati kei roto tonu ngā tawhā paru nui e tukuna ana ki te wāhi whakamahi (POU) i ngā rohe whakahaere tino pakari, ahakoa te haruru o te tukanga o runga. Hei tauira, i te mea he rerekē te mātotoru o ngā puranga paru mata e haere mai ana, kāore e ranea te whai noa i tētahi tohutao. Mā te aroturuki i te mātotoru i roto i te tāke whakaranu i te wā tūturu, ka taea e te pūnaha whakahaere te whakarerekē i ngā ōwehenga waimeha, me te whakarite kia mau tonu te kukū ūnga tika puta noa i te tukanga whakaranu. Ka whakaitihia e tēnei te rerekētanga o te tukanga e puta mai ana i ngā rauemi mata kāore i te ōrite, ka hua ake he mahi whakakanapa tino matapae, ā, ka tino whakaitihia te auau me te nui o ngā haerenga tukanga utu nui.
Whakanuia te Hua
Ko te whakatika tika i ngā hapa ā-pūkaha me ngā hapa matū i puta mai i ngā āhuatanga paru kore pumau te huarahi tino whai pānga ki te whakatairangate hanga haurua-haurua cmpngā reiti hua. Mā ngā pūnaha aroturuki matapae, wā-tūturu ka tiakina ngā hua utu nui. Kua tuhia e ngā kamupene hanga kua whakatinana i ēnei pūnaha he angitu nui, tae atu ki ngā pūrongo mō te whakahekenga tae atu ki te 25% o ngā mawhitinga hapa. Mā tēnei āheinga ārai ka nekehia te tauira mahi mai i te urupare ki ngā hapa kāore e taea te karo ki te aukati kaha i tō rātou hanganga, ā, mā reira ka tiakina ngā miriona tāra o ngā wafer mai i ngā rakuraku moroiti me ētahi atu kino i puta mai i ngā taupori matūriki kore pumau. Mā te āheinga ki te aroturuki i ngā huringa hihiri, pērā i te hekenga ohorere o te matotoru e tohu ana i te ahotea wera, te ahotea kutikuti rānei, ka taea te wawao i mua i te horapa o ngā hapa puta noa i ngā wafer maha.
Whakaitihia te mahi anō
Te huamahi anōKo te reiti, e tautuhia ana ko te ōrau o te hua hanga e hiahia ana kia tukatukahia anō nā ngā hapa, ngā hapa rānei, he KPI nui e ine ana i te koretake o te hanga katoa. Ko ngā reiti mahi anō teitei e pau ana te mahi nui, ngā rauemi para, ā, ka puta he whakaroa nui. Nā te mea ko ngā hapa pēnei i te rihi, te tango kore-ōrite, me te karawarawa he hua tika o te kore pumau o te reo, ko te whakaū i te rere o te paru mā te whakahaere tonu i te matotoru me te matotoru ka whakaiti i te tīmatanga o ēnei hapa nui. Mā te whakarite i te pumau o te tukanga, ka whakaitihia te maha o ngā hapa e hiahia ana kia whakatikahia, kia orohia anō rānei, ka hua ake he pai ake te mahi me te pai o te kapa whānui.
Ka arotau i ngā utu whakahaere
He nui te utu paunga o ngā para CMP i roto i te taiao hanga. Ina hiahiatia he whānuitanga haumaru, ātaahua hoki mō te whakaranu me te kai e te koretake o te tukanga, ko te mutunga he whakamahinga koretake me te nui o ngā utu whakahaere. Mā te aroturukitanga wā-tūturu ka taea te whakahaere para kikokore, tika hoki. Hei tauira, mā te whakahaere tonu ka taea te whakarite i ngā ōwehenga whakaranu tika, ka whakaitihia te whakamahinga wai waimeha, ā, ka whakarite kia utu nui te utu.hanganga paru cmpka whakamahia pai rawa atu, ka whakaiti i te para rauemi me te whakapaunga whakahaere. Hei tāpiri, ka taea e ngā tātaritanga rheological wā-tūturu te whakarato i ngā tohu whakatūpato wawe mō ngā raruraru taputapu—pērā i te pakaru o te papa, te pakaru rānei o te papu—e āhei ai te tiaki i runga i te āhua i mua i te puta o te pakaru kino i te paru me te wā whakatā o te mahi.
Ko te hanga hua nui tonu me whakakore i te rerekētanga i roto i ngā tukanga matua katoa o te waeine. Ka whakaratohia e te hangarau resonant Lonnmeter te pakari, te tere, me te tika e tika ana hei whakaiti i te mōrearea o te hanganga tuku paru. Mā te whakauru i ngā raraunga matotoru me te matotoru i te wā tūturu, ka rite ngā kaihanga tukanga ki te mohiotanga tonu, ka taea te mahi, e whakarite ana i te mahi whakakanapa matapae me te tiaki i te hua wafer mai i te kore pumau o te colloidal.
Hei tīmata i te whakawhiti mai i te whakahaere hua tauhohe ki te whakahaere tukanga matatau:
WhakanuiaTe wā mahi me teWhakaitihiaMahi anō:TikiakeĀ mātou Whakatakotoranga Hangarau meTīmatahe RFQ i tēnei rā.
Ka tono mātou ki ngā kaiwhakahaere tukanga me ngā kaiwhakahaere hua matua kitukuhe RFQ taipitopito. Ka whakawhanakehia e ā mātou tohunga hangarau he mahere whakatinanatanga tika, ka whakauruhia te hangarau Lonnmeter tino tika ki roto i tō hanganga tohatoha paru hei ine i te whakahekenga e matapaetia ana mō te kiato hapa me te kai paru.Whakapā maitā mātou Tīma Aunoatanga Tukanga inaianei ki tehaumarutō painga hua.Kimihiate tika nui e hiahiatia ana hei whakau i tō taahiraa whakarite tino nui.
