Te whakapūmautanga matū ā-mīhini(CMP) he tukanga taketake i roto i te hanga haurua-ā-ira matatau. Ka tukuna he papatahi taumata-atomika puta noa i ngā mata papatahi, ka taea ai ngā hoahoa paparanga maha, te tākai taputapu kia piri ake, me ngā hua pono ake. Ka whakauruhia e te CMP ngā mahi matū me ngā mahi miihini i te wā kotahi—mā te whakamahi i tētahi papa hurihuri me tētahi para whakakanapa motuhake—hei tango i ngā kiriata taikaha me ngā hapa mata maeneene, he mea nui mō te tauira āhuatanga me te whakahāngai i roto i ngā ara iahiko whakauru.
Ko te kounga o te anga i muri i te CMP e whakawhirinaki ana ki te āta tirotiro i te hanganga me ngā āhuatanga o te para whakakanapa. Kei roto i te para ngā matūriki whakakoi, pērā i te cerium oxide (CeO₂), e iri ana i roto i te ranunga matū kua hangaia hei arotau i te whakakoi ā-tinana me te tere tauhohenga matū. Hei tauira, ka tukuna e te cerium oxide te pakeke me te matū mata tino pai mō ngā kiriata e hangai ana ki te silicon, ā, koinei te rauemi whiriwhiri i roto i te maha o ngā tono CMP. Ko te whai huatanga o te CMP e whakatauhia ana ehara i te mea ko ngā āhuatanga matūriki whakakoi anake engari ko te whakahaere tika hoki o te kukū o te para, te pH, me te mātotoru.
Te Whakamahere Matū Ā-Mīhini
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Ngā Kaupapa Taketake o te Whakakanapa i ngā Parapara i roto i te Hanganga Ārahi-Haumaru
Ko ngā parapara whakakanapa he mea nui ki te tukanga whakapūmau matū me te miihini. He ranunga matatini ēnei i hangaia hei whakatutuki i te pakū ā-mīhini me te whakarerekētanga mata matū i runga i ngā mata wafer. Ko ngā mahi nui a ngā parapara CMP ko te tango rauemi whai hua, te whakahaere i te pūmau, te ōritetanga i runga i ngā wāhi wafer nui, me te whakaiti i ngā hapa.
Ngā Tūranga me ngā Hanganga o ngā Parapara Whakakanapa
Kei roto i te parai CMP noa ngā matūriki whakakoi e iri ana i roto i te hanganga wai, me ngā tāpiringa matū me ngā mea whakaū. He mahi motuhake tā ia wāhanga:
- Ngā mea whakakoi:Ko ēnei matūriki angiangi, totoka—ko te silica (SiO₂) te cerium oxide rānei (CeO₂) te nuinga i roto i ngā mahi semiconductor—ko rātou te kaiwhakahaere o te tango rauemi. Ko tō rātou kukū me te tohatoha rahi o te matūriki e whakahaere ana i te tere tango me te kounga o te mata. Ko te nui o te waikura e ahu mai ana i te 1% ki te 5% te taumaha, me ngā diameter matūriki i waenga i te 20 nm me te 300 nm, kua tohua kia kore ai e nui te rakuraku o te wafer.
- Ngā Tāpiri Matū:Mā ēnei matū ka whakatū te taiao matū mō te whakapūmautanga whai hua. Mā ngā matū whakapūmau (hei tauira, te hauwai waikura) ka āwhina i te hanganga o ngā paparanga mata e māmā ake ai te whakakoi. Mā ngā matū whakapūmau, whakakōkī rānei (pērā i te ammonium persulfate, te waikawa citric rānei) ka herea ngā katote whakarewa, ka whakarei ake i te tango me te pehi i te hanganga hapa. Ka whakaurua ngā aukati hei ārai i te whakairo kāore e hiahiatia o ngā paparanga paparanga tata, o raro rānei, ka whakapai ake i te whiriwhiringa.
- Ngā Kaiwhakaū:Ka pupuri ngā surfactants me ngā pH-pūmau i te pumau o te paru me te horapa ōrite. Ka ārai ngā surfactants i te kohikohinga oro, ka whakarite kia ōrite te tere tango. Ka taea e ngā pH-pūmau te tere tauhohenga matū, ā, ka whakaiti i te tūponotanga o te piri o ngā matūriki, te waikura rānei.
Ko te hanganga me te kukū o ia wāhanga he mea whakarite ki te rauemi papatahi motuhake, te hanganga o te taputapu, me te taahiraa tukanga e whai wāhi ana ki te tukanga whakarite matū me te miihini.
Ngā Paruparu Noa: Te Hiraka (SiO₂) me te Cerium Oxide (CeO₂)
Ngā paru whakakanapa silica (SiO₂)Ko ngā mahi whakapūmau waikura te mea nui rawa atu, pērā i te whakakanapa i waenga i ngā paparanga dielectric (ILD) me te whakakanapa i te wehenga awaawa papaku (STI). Ka whakamahia e rātou te silica colloidal, te silica waro rānei hei mea whakakanapa, he maha ngā wā i roto i te taiao taketake (pH ~10), ā, i ētahi wā ka tāpirihia ki ngā surfactants iti me ngā aukati waikura hei whakaiti i ngā hapa rakuraku me te arotau i ngā tere tango. E whai uara ana ngā matūriki silica mō tō rātou rahi ōrite me te iti o te pakeke, e whakarato ana i te tango rauemi ngawari, ōrite e tika ana mō ngā paparanga ngawari.
Ngā parapara whakakanapa cerium oxide (CeO₂)kua whiriwhiria mō ngā tono uaua e hiahia ana ki te whiriwhiri me te tika teitei, pērā i te whakakanapa i te papa karāhe whakamutunga, te whakapūmau papa matatau, me ētahi paparanga waikura i roto i ngā taputapu haurua-ira. He ahurei te tauhohenga a ngā mea whakakoi CeO₂, inā koa ki ngā mata silicon dioxide, e āhei ai ngā tikanga tango matū me te miihini. Mā tēnei whanonga mahi-rua ka nui ake ngā reiti whakapūmau i ngā taumata hapa iti ake, ka pai ake ai ngā para CeO₂ mō te karāhe, ngā papa kōpae mārō, ngā pūnga taputapu arorau matatau rānei.
Te Kaupapa Mahi o ngā Mea Whakakoi, ngā Tāpiri, me ngā Mea Whakaū
- Ngā mea whakakoiWhakahaerehia te pao ā-ringa. Ko tōna rahi, tōna āhua, me tōna kukū e whakatau ana i te tere tango me te mutunga o te mata. Hei tauira, mā ngā pao silica 50 nm ōrite ka whakarite kia ngawari, kia ōrite te papatahi o ngā paparanga waikura.
- Ngā Tāpiri MatūMā te whakahaere i te tango whiriwhiringa, ka taea te whakahaere i te waikura me te whakarewanga o te mata. I roto i te CMP parahi, ka mahi tahi te glycine (hei matū whakahiato) me te hauwai peroxide (hei matū whakahāngai), ko te BTA ia ka mahi hei aukati i te tiaki i ngā āhuatanga parahi.
- Ngā KaiwhakaūKia mau tonu te ōrite o te hanganga o te paru i roto i te wā. Ka āraihia e ngā matū horoi te whakapūpū me te kohikohi, kia rite ai te horapa o ngā matūriki whakakoi, kia wātea ai hoki mō te tukanga.
Ngā Āhuatanga Ahurei me ngā Whakamahinga: Ngā Parapara CeO₂ me SiO₂
Parai whakakanapa CeO₂He tino whai hua tēnei mō te whakarōpū i ngā papa mārō, pakarukaru, ngā puranga waikura hiato rānei, ina hiahiatia te tino whiriwhiri rauemi. Nā tēnei ka waiho ngā paru CeO₂ hei paerewa mō te whakarite papa matatau, te whakaotinga karāhe tika, me ngā taahiraa CMP motuhake mō te wehenga awaawa pāpaku (STI) i roto i te umanga haurua-ā-ira.
Parai whakakanapa SiO₂Ka whakaratohia he huinga taurite o te tango ā-ringa me te tango matū. He whānuitia te whakamahinga mō te waikura papatipu me te whakapūmautanga dielectric interlayer, ina hiahiatia he nui te rere me te iti o te hapa. Ko te rahi matūriki ōrite, whakahaeretia o te silica ka whakawhāiti hoki i te whakaputanga o ngā karawarawa, ā, ka whakarite kia pai ake te kounga o te mata whakamutunga.
Te Hiranga o te Rahi Matūriki me te Taurite o te Mararatanga
He mea nui te rahi o te matūriki me te ōritetanga o te mararatanga ki te mahi a te paru. Mā ngā matūriki whakakoi ōrite, he rite te tauine nanometer, ka oati te tere tango rauemi me te mata wafer kore hapa. Ko te kohikohinga ka arahi ki te rakuraku, ki te oro rānei e kore e taea te matapae, ko te tohatoha rahi ia ka arahi ki te kore ōrite o te papatahi me te pikinga o te kiato hapa.
Mā te whakahaere i te kukū o te paru whai hua—e aro turukihia ana e ngā hangarau pēnei i te mita kiato paru, i ngā taputapu ine kiato paru ultrasonic rānei—ka whakarite kia mau tonu te utaina o te kirikiri me ngā putanga tukanga e taea te matapae, e pā tika ana ki te hua me te mahi a te taputapu. Ko te whakatutuki i te whakahaere kiato tika me te horapa ōrite ngā whakaritenga matua mō te tāutanga taputapu whakarōpū matū me te arotau tukanga.
Hei whakarāpopototanga, ko te hanganga o ngā para whakakanapa—ina koa ko te whiriwhiri me te whakahaere i te momo whakakoi, te rahi o te matūriki, me ngā tikanga pumau—te pou herenga mō te pono me te whai huatanga o te tukanga whakapūmau matū i roto i ngā tono ahumahi haurua-waenga.
Te Hiranga o te Ine i te Matotoru o te Para i roto i te CMP
I roto i te tukanga whakapūmau matū, ka pā tika te ine me te whakahaere i te mātotoru o te paru ki te whai huatanga me te kounga o te whakakanapa i te papa. Ko te mātotoru o te paru—te kukū o ngā matūriki whakakoi i roto i te paru whakakanapa—he mahi matua hei hononga tukanga, e hanga ana i te tere whakakanapa, te kounga o te mata whakamutunga, me te hua whānui o te papa.
Te Hononga i waenga i te Matotoru o te Para, te Tere o te Whakakanapa, te Kounga o te Mata, me te Hua o te Wafer
Ko te kukū matūriki whakakoi i roto i te parapara whakakoi CeO₂, i tētahi atu hanganga parapara whakakoi rānei, e whakatau ana i te tere o te tango rauemi mai i te mata o te papa, e kiia nei ko te tere tango rauemi, ko te tere tango rauemi rānei (MRR). Ko te pikinga o te mātotoru parapara ka whakanui ake i te maha o ngā hononga whakakoi mō ia wāhanga horahanga, ka tere ake te tere whakakoi. Hei tauira, i kōrerohia e tētahi rangahau whakahaere i te tau 2024 ko te whakanui ake i te kukū matūriki silica ki te 5 wt% i roto i te parapara colloidal i whakanui ake i ngā tere tango mō ngā papapara silicon 200 mm. Heoi, ehara tēnei whanaungatanga i te mea rārangi—kei reira tētahi wāhi e heke ana ngā hokinga mai. I ngā mātotoru parapara teitei ake, ka puta he papatahi, he hekenga rānei i te tere tango i te kohikohinga matūriki nā te ngoikore o te kawe papatipu me te pikinga o te matotoru.
He rite tonu te tairongo o te kounga o te mata ki te matotoru o te paru. Mēnā he nui ngā kukū, ka nui haere ngā hapa pēnei i ngā karawarawa, ngā paru kua tāmau, me ngā poka. I kitea i roto i taua rangahau anō he pikinga rārangi o te taratara o te mata me te matotoru nui o te karawarawa ina piki ake te matotoru o te paru i runga ake i te 8–10 wt%. I tetahi atu taha, mā te whakaiti i te matotoru ka whakaiti i te mōrearea o te hapa engari ka taea te whakaroa i te tango me te whakararu i te papatahi.
Ko te hua o te anga anga, te ōwehenga o ngā anga anga e tutuki ana i ngā whakaritenga tukanga i muri i te whakakanapa, ka whakahaeretia e ēnei pānga whakakotahi. Ko te nui ake o ngā reiti hapa me te tango kore-ōrite ka whakaiti i te hua, e whakaatu ana i te taurite ngawari i waenga i te kaha whakaputa me te kounga i roto i te hanganga haurua-ā-ira hou.
Te Pānga o ngā Rerekētanga Iti o te Kukū o te Parapara ki te Tukanga CMP
Ahakoa he iti noa ngā rerekētanga mai i te mātotoru para pai rawa atu—he wāhanga o te ōrau—ka pā nui ki te putanga o te tukanga. Mēnā ka neke te kukū o te mea whakakoi ki runga ake i te ūnga, ka puta pea te whakarōpūtanga matūriki, ka tere te pakaru o ngā papa me ngā kōpae whakatikatika, ka nui ake ngā tere rakuraku o te mata, ā, ka taea te aukati, te memeha rānei o ngā wāhanga wai i roto i ngā taputapu whakapūmau matū. Ka waiho pea e te iti o te mātotoru he kiriata toenga me ngā āhua mata koretake, ka wero i ngā mahi whakaahua whakaahua e whai ake nei, ka whakaiti i te hua.
Ka pāngia hoki ngā tauhohenga matū-mīhini o te angaanga e ngā rerekētanga o te mātotoru o te paru, me ngā pānga ki te ngoikore me te mahi a te taputapu. Hei tauira, ko ngā matūriki iti ake, kāore rānei i te rite te horapa i roto i ngā paru kua whakakīia ka pā ki ngā tere tango ā-rohe, ka hanga he āhuahanga iti ka horapa hei hapa tukanga i roto i te hanga nui. Me whai mana pakari te kukū o te paru me te aroturuki pakari mō ēnei āhuatanga iti, inā koa i roto i ngā pūnga matatau.
Te Ine me te Arotau i te Kiato o te Parapara Wā-Tūturu
Ko te ine i te mātotoru o te paru i te wā tūturu, mā te whakatinanatanga o ngā mita mātotoru ā-roto—pērā i ngā mita mātotoru paru ultrasonic i hangaia e Lonnmeter—he mea paerewa inaianei i roto i ngā tono ahumahi semiconductor matatau. Mā ēnei taputapu ka taea te aroturuki tonu i ngā tawhā paru, ka tukuna he urupare tere ki ngā piki me ngā heke o te mātotoru i te nekehanga o te paru i roto i ngā huinga taputapu CMP me ngā pūnaha tohatoha.
Ko ngā painga matua o te ine i te mātotoru o te paru i te wā tūturu ko:
- Te kimi tonu i ngā āhuatanga kāore i te tino tika, te ārai i te horapa o ngā hapa mā roto i ngā tukanga utu nui o muri mai
- Te arotautanga tukanga—ka taea e ngā kaihangarau te pupuri i te matapihi kiato paru tino pai, te whakanui ake i te tere tango me te whakaiti i te hapa
- He pai ake te ōritetanga o te wafer ki te wafer me te ōritetanga o te rota ki te rota, e hua ake ai te hua hanga whānui.
- Te roa o te hauora o ngā taputapu, nā te mea ka tere ake te pakaru o ngā papa whakakanapa, ngā mīhini whakaranu, me ngā paipa tohatoha mēnā he nui rawa te kukū, he iti rānei te kukū o ngā para.
Ko ngā whakatakotoranga tāutanga mō ngā taputapu CMP he tikanga te arahi i ngā koropiko tauira, i ngā raina tohanga anō rānei mā te rohe ine, kia mōhio ai kei te rite ngā pānui mātotoru ki te rere tuturu e tukuna ana ki ngā papa.
Tika me te wā tūturute ine i te mātotoru o te parukoinei te poutokomanawa o ngā tikanga whakahaere pakari mō te mātotoru o te paru, e tautoko ana i ngā hanganga paru kua whakapumautia me ngā mea hou, tae atu ki ngā paru Cerium oxide (CeO₂) wero mō te paparanga matatau me te waikura CMP. Ko te pupuri i tēnei tawhā nui e hono tika ana ki te hua, te whakahaere utu, me te pono o te taputapu puta noa i te tukanga whakarite matū miihini.
Ngā Mātāpono me ngā Hangarau mō te Ine i te Matotoru o te Para
Ko te mātotoru o te paru e whakaahua ana i te papatipu o ngā totoka mō ia rōrahi i roto i te paru whakakanapa, pērā i ngā whakatakotoranga Cerium oxide (CeO₂) e whakamahia ana i roto i te whakapūmau matū miihini (CMP). Ka whakatau tēnei taurangi i ngā tere tango rauemi, te ōritetanga putanga, me ngā taumata hapa i runga i ngā papa whakakanapa. He mea nui te ine tika i te mātotoru o te paru mō te whakahaere kukū paru matatau, e pā tika ana ki te hua me te hapa i roto i ngā tono ahumahi semiconductor.
He whānuitanga o ngā mita mātotoru paru e whakamahia ana i roto i ngā mahi CMP, ia mita e whakamahi ana i ngā mātāpono ine rerekē. Ko ngā tikanga ine taumaha e whakawhirinaki ana ki te kohikohi me te pauna i tētahi rōrahi paru kua tautuhia, e tuku ana i te tika teitei engari kāore i te kaha i te wā tūturu, ā, e kore ai e whai hua mō te whakamahi tonu i roto i ngā whakatakotoranga tāutanga mō ngā taputapu CMP. Ka whakamahia e ngā mita mātotoru hikohiko ngā mara hikohiko hei whakatau i te mātotoru i runga i ngā huringa o te kawe hiko me te āheinga nā ngā matūriki whakatārewatanga. Ko ngā mita wiri, pērā i ngā mita mātotoru ngongo wiri, ka ine i te urupare auau o tētahi ngongo kua kī tonu i te paru; ka pā ngā rerekētanga o te mātotoru ki te auau wiri, ka taea ai te aroturuki tonu. Ka tautokohia e ēnei hangarau te aroturuki ā-roto engari ka taea te aro ki te poke, ki ngā rerekētanga matū rānei.
Ko ngā mita mātotoru paru ultrasonic he whanaketanga hangarau matua mō te aroturuki mātotoru wā-tūturu i roto i te whakapūmau matū-mīhini. Ka tukuna e ēnei taputapu ngā ngaru ultrasonic mā roto i te paru, ā, ka ine i te wā rere, te tere rānei o te horapa o te oro. Ko te tere o te oro i roto i te reo e whakawhirinaki ana ki tōna mātotoru me te kukū o ngā totoka, e āhei ai te whakatau tika i ngā āhuatanga o te paru. He tino pai te tikanga ultrasonic mō ngā taiao whakakoi me te kaha matū e rite ana ki te CMP, nā te mea kāore e pokanoa, ā, ka whakaiti i te paru o te pūoko ki te whakataurite ki ngā mita whakapā tika. Ka hangaia e Lonnmeter ngā mita mātotoru paru ultrasonic ā-roto kua whakaritea mō ngā raina CMP o te umanga semiconductor.
Ko ngā painga o ngā mita matotoru paru ultrasonic ko:
- Ine kore-whakaeke: I te nuinga o te wā ka tāutahia ngā pūoko ki waho, ki roto rānei i ngā pūtau rere taha, hei whakaiti i te whakararuraru ki te paru me te karo i te pakū o ngā mata pūoko.
- Te āheinga wā-tūturu: Mā te putanga tonu ka taea te whakarerekē tonu i ngā tukanga, kia mau tonu ai te mātotoru o te paru ki roto i ngā tawhā kua tautuhia mō te kounga whakakanapa wafer tino pai.
- Te tino tika me te pakari: Ka tukuna e ngā matawai ultrasonic ngā pānui pumau me te auau, kāore e pāngia e te matū paru e rerekē ana, e te kawenga matūriki rānei i ngā whakaurunga roa.
- Te whakaurunga ki ngā taputapu CMP: Ka tautokohia e tā rātou hoahoa ngā whakatakotoranga tāutanga ki ngā raina paru hurihanga, ki ngā momo tuku rānei, ka whakangawari ake i te whakahaere tukanga me te kore e roa te wā whakatā.
E ai ki ngā rangahau take tata nei mō te hanga i ngā haurua-haurua, tae atu ki te 30% te hekenga o te hapa ina tautokona te aroturukitanga kiato ultrasonic ā-roto e te tāutanga taputapu whakapūmau matū miihini mō ngā tukanga whakakanapa para Cerium oxide (CeO₂). Mā te urupare aunoa mai i ngā pūoko ultrasonic ka taea te whakahaere pai ake i ngā hanganga para whakakanapa, ka hua ake he pai ake te ōritetanga o te matotoru me te iti ake o te para rauemi. Ko ngā mita kiato ultrasonic, ina honoa ki ngā kawa whakatikatika pakari, ka mau tonu te mahi pono ahakoa ngā panonitanga hanganga para, e kitea pinepine ana i roto i ngā mahi CMP matatau.
Hei whakarāpopototanga, ko te ine i te mātotoru o te paru i te wā tūturu—ina koa te whakamahi i te hangarau ultrasonic—kua noho hei kaupapa matua mō ngā tikanga whakahaere mātotoru o te paru tika i roto i te CMP. Ka whakapai ake tika ēnei whanaketanga i te hua, te pai o te tukanga, me te kounga o te wafer i roto i te umanga semiconductor.
Ngā Whakatakotoranga Tāutanga me te Whakaurunga ki ngā Pūnaha CMP
He mea nui te ine tika i te mātotoru o te paru hei whakahaere i te kukū o te paru i roto i te tukanga whakatōpū matū ā-pūkaha. Ko te whiriwhiri i ngā pūwāhi tāutanga whai hua mō ngā mita mātotoru o te paru ka pā tika ki te tika, te pumau o te tukanga, me te kounga o te wafer.
Ngā Take Matua mō te Kōwhiri i ngā Wāhi Tāutanga
I roto i ngā whakatakotoranga CMP, me whakanoho ngā mita kiato hei aroturuki i te paru tuturu e whakamahia ana mō te whakakanapa wafer. Ko ngā whakatakotoranga tāutanga matua ko:
- Tāke Whakahoki Anō:Mā te whakatakotoranga o te mita ki te putanga ka mārama ai te āhua o te paru turanga i mua i te tohatoha. Heoi anō, tērā pea ka ngaro i tēnei wāhi ngā huringa e puta ana i raro iho, pērā i te hanganga mirumiru, ngā pānga wera ā-rohe rānei.
- Ngā Raina Tukunga:Mā te tāutanga i muri i te whakaranu i ngā waeine me mua i te whakaurunga ki ngā manifold tohatoha ka whakarite kia whakaatahia te inenga mātotoru i te hanganga whakamutunga o te para, tae atu ki te para oro Cerium oxide (CeO₂) me ētahi atu tāpiringa. Mā tēnei tūranga ka taea te kite wawe i ngā nekehanga kukū para i mua tata i te tukatuka i ngā wafer.
- Te Aroturukitanga i te Wāhi Whakamahinga:Ko te wāhi tino pai kei mua tonu i te takirere, i te taputapu rānei e whakamahia ana. Ka hopukina e tēnei te mātotoru o te paru i te wā tūturu, ā, ka whakatūpato i ngā kaiwhakahaere ki ngā rerekētanga o ngā āhuatanga tukanga ka puta mai i te whakamahana raina, te wehewehe, te whakaputa mirumiru iti rānei.
I te wā e whiriwhiri ana i ngā wāhi tāutanga, me whai whakaaro ki ētahi atu āhuatanga pēnei i te rere o te wai, te aronga o ngā paipa, me te tata ki ngā papu, ki ngā takirere rānei:
- Manaakite whakairinga poutūme te rere whakarunga hei whakaiti i te mirumiru hau me te kohikohinga paru i runga i te wāhanga pūoko.
- Kia mau tonu te whānui o ngā paipa i waenganui i te mita me ngā pūtake nui o te aueue (ngā papu, ngā takirere) hei karo i ngā hapa pānui nā ngā raruraru rere.
- Whakamahiate whakatikatika rere(ngā mea whakatikatika, ngā wāhanga whakamarie rānei) hei aromatawai i te ine kiato i roto i te taiao papatahi pumau.
Ngā Wero Noa me ngā Mahi Pai mō te Whakaurunga Pūoko Pono
He maha ngā wero mō te whakaurunga o ngā pūnaha paru CMP:
- Te Whakaurunga Hau me ngā Mirumiru:Ka taea e ngā mita mātotoru paru ultrasonic te hē te pānui i te mātotoru mēnā he mirumiru iti kei roto. Kaua e whakanoho i ngā pūoko ki ngā wāhi e tomo mai ai te hau, e rere ohorere ana rānei, e puta pinepine ana i te taha o ngā tukunga papu, o ngā tāke whakaranu rānei.
- Te whakapūpūngao:I ngā rārangi whakapae, ka tūtaki pea ngā pūoko ki ngā totoka e tau ana, inā koa me te paru whakakanapa CeO₂. E taunakihia ana te whakairi poutū, te whakanoho rānei ki runga ake i ngā rohe taunga pea hei pupuri i te whakahaere tika o te kiato o te paru.
- Parahanga Pūoko:Kei roto i ngā paru CMP ngā matū whakakoi me ngā matū ka arahi pea ki te poke, ki te paninga rānei o te pūoko. Kua hangaia ngā taputapu mita-roto hei whakaiti i tēnei, engari he mea nui tonu te tirotiro me te horoi auau kia pono ai.
- Ngā wiri ā-ringa:Mā te whakatakotoranga tata ki ngā taputapu miihini kaha ka puta te haruru i roto i te pūoko, ka heke te tika o te ine. Kōwhiria ngā wāhi tāutanga me te iti rawa o te wiri.
Mō ngā hua whakauru pai rawa atu:
- Whakamahia ngā wāhanga rere laminar mō te tāutanga.
- Kia tika te tūnga poutū i ngā wāhi katoa e taea ai.
- Whakamāmāhia te uru atu mō te tiaki me te whakatikatika i ia wā.
- Wehea ngā pūoko i te wiri me ngā raruraru rere.
CMP
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Ngā Rautaki Whakahaere Kukū Para
He mea nui te whakahaere whai hua i te kukū o te paru i roto i te tukanga whakapūmau matū miihini kia mau tonu ai te tere tango rauemi, kia whakaitihia ai ngā hapa o te mata o te papa, kia rite ai hoki te āhua puta noa i ngā papa haurua-ira. He maha ngā tikanga me ngā hangarau e whakamahia ana hei whakatutuki i tēnei tika, hei tautoko i ngā mahi whakahaere māmā me te hua teitei o te taputapu.
Ngā Tikanga me ngā Utauta hei Pupuri i te Kukū Pai o te Para
Ka tīmata te whakahaere i te kukū o te paru mā te aroturuki i te wā-tūturu o ngā matūriki whakakoi me ngā momo matū i roto i te paru whakakoi. Mō te paru whakakoi Cerium oxide (CeO₂) me ētahi atu hanganga CMP, he mea nui ngā tikanga tika pēnei i te ine i te mātotoru o te paru ā-roto. Mā ngā mita mātotoru o te paru ultrasonic, pērā i ngā mea i hangaia e Lonnmeter, ka tukuna he ine tonu o te mātotoru o te paru, e hono kaha ana ki te ihirangi totoka katoa me te ōritetanga.
Ko ētahi atu tikanga tāpiri ko te tātaritanga o te paru—te wāhi e kitea ai e ngā pūoko whatu te marara mai i ngā matūriki whakakoi e iri ana—me ngā tikanga tirotiro pēnei i te tirotiro UV-Vis, te tirotiro Tata-Ira-Whawhā rānei (NIR) hei ine i ngā matū tauhohe matua i roto i te awa paru. Ko ēnei inenga te pou tuarā o ngā pūnaha whakahaere tukanga CMP, e āhei ai ngā whakarerekētanga ora hei pupuri i ngā matapihi kukū ūnga me te whakaiti i te rerekētanga o ia puranga.
E whakamahia ana ngā pūoko hikohiko i roto i ngā whakatakotoranga he nui ngā katote konganuku, hei whakarato i ngā mōhiohio urupare tere mō ngā kukū katote motuhake, me te tautoko i ngā whakatikatika pai ake i roto i ngā tono ahumahi haurua-waea matatau.
Ngā Porowhita Urupare me te Aunoatanga mō te Mana Porowhita-Kati
Kei te piki haere te whakamahinga o ngā pūnaha whakahaere porowhita-katia o ngā whakaurunga taputapu whakapūmau matū-mīhini hou e hono ana i te inenga ā-roto ki ngā pūnaha tohatoha aunoa. Ka tukuna tika ngā raraunga mai i ngā mita kiato paru me ngā pūoko e pā ana ki ngā kaiwhakahaere arorau ka taea te whakarite (PLC) me ngā pūnaha whakahaere tohatoha (DCS). Ka whakahohe aunoa ēnei pūnaha i ngā takirere mō te tāpiri wai whakakī, te inenga paru kukū, tae noa ki te werohanga whakaū, kia mau tonu ai te tukanga i roto i te kōpaki mahi e hiahiatia ana i ngā wā katoa.
Mā tēnei hoahoa urupare ka taea te whakatika tonu i ngā rerekētanga kua kitea e ngā pūoko wā-tūturu, ka karo i te waimeha nui rawa, ka pupuri i te kukū pai rawa o te whakakoi, me te whakaiti i te whakamahinga matū nui rawa. Hei tauira, i roto i tētahi taputapu CMP tere-whakaputa mō ngā pūnga wafer matatau, ka kitea e tētahi mita kiato paru ultrasonic ā-roto te hekenga o te kukū whakakoi, ā, ka tohu tonu ki te pūnaha ine kia whakanuia te whakaurunga paru, kia hoki rā anō te kiato ki tōna taumata tautuhinga. I tetahi atu taha, ki te nui ake te kiato ine i te whakatakotoranga, ka tīmata te arorau whakahaere i te tāpiri wai whakakī hei whakahoki mai i ngā kukū tika.
Te Tūranga o te Ine i te Mātotorutanga ki te Whakatikatika i te Wai Whakakapi me te Reiti Tāpiri Para
Ko te ine i te mātotoru o te paru te kaupapa matua o te whakahaere kukū hohe. Ko te uara mātotoru e whakaratohia ana e ngā taputapu pēnei i ngā mita mātotoru ā-roto a Lonnmeter e whakamōhio tika ana i ngā tawhā whakahaere matua e rua: te rōrahi wai whakakī me te tere whāngai paru kukū.
Mā te whakanoho i ngā mita mātotoru ki ngā wāhi rautaki—pērā i mua i te whakaurunga o te taputapu CMP, i muri rānei i te mīhini whakaranu—mā ngā raraunga wā-tūturu ka taea e ngā pūnaha aunoa te whakarerekē i te tere tāpiri wai tāpiri, ā, ka whakawaiwai i te paru ki ngā whakaritenga e hiahiatia ana. I te wā kotahi, ka taea e te pūnaha te whakarerekē i te tere whāngai o te paru kukū kia mau tonu ai ngā kukū o te kirikiri me te matū, me te whai whakaaro ki te whakamahinga o te taputapu, ngā pānga tawhito, me ngā ngaronga i puta mai i te tukanga.
Hei tauira, i te wā e roa ana te whakahaere i ngā hanganga NAND 3D, ka kitea e te aroturukitanga kiato tonu ngā ia o te kohikohinga paru, o te taunga rānei, ka puta ai te pikinga aunoa o te wai hanga, te whakaoho rānei, e hiahiatia ana mō te pumau o te tukanga. He mea nui tēnei porowhita whakahaere kua tino whakaritea hei pupuri i ngā whāinga ōrite o te wafer-ki-te-wafer me roto i te wafer, inā koa ka whaiti ngā āhuatanga o te taputapu me ngā matapihi tukanga.
Hei whakarāpopototanga, ko ngā rautaki whakahaere kukū paru i roto i te CMP e whakawhirinaki ana ki te ranunga o ngā inenga ā-roto matatau me ngā urupare aunoa ā-porowhita kati. Ko ngā mita kiato paru, inā koa ko ngā waeine ultrasonic pērā i a Lonnmeter, he mahi nui ki te tuku raraunga taumira teitei, wā tika e hiahiatia ana mō te whakahaere tukanga pakari i roto i ngā mahi hanga semiconductor nui. Ka whakaitihia e ēnei taputapu me ngā tikanga te rerekētanga, ka tautoko i te pumau mā te arotau i te whakamahinga matū, ā, ka taea te tika e hiahiatia ana mō ngā hangarau pūnga hou.
He Aratohu Kōwhiringa Mita Matotoru Para mō te Ahumahi Ārahi-Haupapa
Ko te whiriwhiri i tētahi mita kiato para mō te whakapūmau matū me te whakapūmau miihini (CMP) i roto i te umanga haurua-waea me aro nui ki ngā whakaritenga hangarau maha. Ko ngā paearu matua mō te mahi me te tono ko te aro, te tika, te hototahi ki ngā matū para kaha, me te ngāwari o te whakauru ki roto i ngā pūnaha tuku para CMP me ngā whakaurunga taputapu.
Ngā Whakaritenga Tairongo me te Tika
Ko te whakahaere tukanga CMP e whakawhirinaki ana ki ngā rerekētanga iti o te hanganga o te paru. Me kite te mita kiato i ngā huringa iti rawa o te 0.001 g/cm³, neke atu rānei. He mea nui tēnei taumata aro mō te tautuhi i ngā nekehanga iti rawa o te ihirangi whakakoi—pērā i ngā mea e kitea ana i roto i te paru whakakanapa CeO₂, i ngā paru hangai-silica rānei—nā te mea ka pā ēnei ki ngā tere tango rauemi, te papatahi o te wafer, me te hapa. Ko te awhe tika e whakaaetia ana mō ngā mita kiato paru semiconductor ko ±0.001–0.002 g/cm³.
Hototahi ki ngā Paraihe Kaha
Ka taea e ngā parapara e whakamahia ana i roto i te CMP te whakauru i ngā matūriki nano whakakoi pērā i te cerium oxide (CeO₂), te alumina, te silica rānei, e iri ana i roto i ngā rauemi matū hohe. Me tu te mita kiato i te wā roa e pāngia ana e te whakakoi tinana me ngā taiao waikura, me te kore e puta i waho o te whakatikatika, e pāngia rānei e te poke. Me noho koretake ngā rauemi e whakamahia ana i roto i ngā wāhanga mākū ki ngā matū parapara katoa e whakamahia whānuitia ana.
Ngāwari o te Whakaurunga
Me uru ngāwari ngā mita mātotoru paru ā-roto ki ngā whakaurunga taputapu CMP o nāianei. Ko ngā mea hei whakaaroaro ko:
- He iti rawa te rōrahi mate me te iti o te hekenga pēhanga hei karo i te pānga ki te tuku paru.
- Tautoko mō ngā hononga tukanga ahumahi paerewa mō te tāutanga me te tiaki tere.
- Te hototahitanga putanga (hei tauira, ngā tohu anaro/matihiko) mō te whakaurunga wā-tūturu ki ngā pūnaha whakahaere kukū paru, engari kāore e whakarato i aua pūnaha anō.
Ngā Āhuatanga Whakataurite o ngā Hangarau Pūoko Matua
Ko te whakahaere i te mātotorutanga o ngā para whakakanapa ka whakahaerehia mā roto i ngā momo pūoko e rua: ngā mita e hangai ana ki te densitometry me ngā mita e hangai ana ki te refractometry. He kaha kei ia mita e tika ana mō ngā tono ahumahi semiconductor.
Ngā Mita e hangai ana ki te Ine Matotoru (hei tauira, Mita Matotoru Parapara Ultrasonic)
- E whakamahi ana i te tere horapa o te oro i roto i te paru, e pā tika ana ki te mātotoru.
- Ka whakarato i te ine i te mātotorutanga teitei puta noa i te whānuitanga o ngā kukū paru me ngā momo whakakoi.
- He tino pai mō ngā para whakakanapa kaha, tae atu ki te CeO₂ me ngā hanganga silica, nā te mea ka taea te wehe ā-tinana i ngā huānga pūoko mai i ngā matū.
- E tutuki ana te aro me te tika noa i te whakaritenga i raro i te 0.001 g/cm³.
- Ko te tāutanga he mea hanga ā-roto, e āhei ai te ine tonu i te wā tūturu i te wā e whakamahia ana ngā taputapu whakatōpū matū.
Ngā Mita e hangai ana ki te Refractometry
- Ine i te taupū whakaata hei whakatau i te mātotoru o te paru.
- He whai hua mō te kite i ngā huringa ngawari o te hanganga o te paru nā te tino aro ki ngā nekehanga kukū; ka taea te whakatau i ngā huringa o te wāhanga papatipu <0.1%.
- Heoi, he tairongo te taupū whakaata ki ngā taurangi taiao pēnei i te pāmahana, me āta whakatikatika me te utu pāmahana.
- Kāore pea he hototahitanga matū, inā koa i roto i ngā paru tino kaha, mākūkū rānei.
Te Ine Rahi Matūriki hei Tāpiritanga
- Ka taea te whakapē i ngā pānui kiato e ngā panoni o te tohatoha rahi matūriki, e te kohikohinga rānei.
- E taunakihia ana te whakaurunga ki te tātari rahi matūriki ā-wā (hei tauira, te marara mārama hihiri, te karu hikohiko rānei) e ngā tikanga pai o te ahumahi, kia kore ai e puta noa mai ngā nekehanga kiato kitea i te kohikohinga matūriki.
Ngā Whakaaro mō ngā Mita Matotoru ā-Rāina Lonnmeter
- He tohunga a Lonnmeter ki te hanga i ngā mita matotoru me te matotoru ā-roto, me te kore e tautoko i ngā pūmanawa, i ngā whakaurunga pūnaha rānei.
- Ka taea te whakarite i ngā mita mita roa kia tu atu ki ngā paru CMP whakakoi, kaha matū hoki, ā, kua hangaia mō te tāutanga tika ki roto i ngā taputapu tukatuka haurua-haurua, kia rite ai ki ngā hiahia mō te ine i te mātotoru o te paru i te wā tūturu.
I te arotake i ngā kōwhiringa, arotahi ki ngā paearu matua mō te tono: kia tino tutuki te aro me te tika o te mita kiato, kia hangaia mai i ngā rauemi e hototahi ana ki tō matū paru, kia tu atu ki te mahi tonu, ā, kia uru pai ki roto i ngā raina tuku paru whakakanapa i roto i te tukanga CMP. Mō te umanga haurua-ira, ko te ine tika i te kiato paru te poutokomanawa o te ōritetanga o te wafer, te hua, me te kaha whakaputa.
Te Pānga o te Whakahaere Whai Hua i te Matū Para ki ngā Hua CMP
He mea nui te whakahaere tika i te matotoru o te paru i roto i te tukanga whakapūmau matū. Ina pumau te matotoru, ka noho pumau te nui o ngā matūriki whakakoi i te wā e whakakanapahia ana. Ka pā tika tēnei ki te tere tango rauemi (MRR) me te kounga o te mata o te papa.
Te Whakaiti i ngā Koha o te Mata Wafer me te Whakapai ake i te WIWNU
Kua whakamātauhia te pupuri i te mātotoru para pai hei whakaiti i ngā hapa o te mata o te papa wafer pērā i ngā rakuraku iti, te rihi, te horo, me te poke o ngā matūriki. E whakaatu ana ngā rangahau mai i te tau 2024 ko te awhe mātotoru whakahaere, i waenga i te 1 wt% ki te 5 wt% mō ngā hanganga e hangai ana ki te silica colloidal, ka puta te taurite pai i waenga i te pai o te tango me te whakaiti i ngā hapa. Ko te mātotoru nui rawa ka whakanui ake i ngā tukinga whakakoi, ka piki ake te maha o ngā hapa i ia henimita tapawha, e ai ki te whakaū a te karuārai kaha atomika me ngā tātaritanga ellipsometry. Ka whakapai ake hoki te whakahaere mātotoru pakari i te kore-ōrite i roto i te papa wafer (WIWNU), me te whakarite kia tangohia te rauemi kia ōrite puta noa i te papa wafer, he mea nui mō ngā taputapu semiconductor pūnga matatau. Ka āwhina te mātotoru pumau ki te aukati i ngā huringa tukanga ka raru pea ngā whāinga matotoru kiriata, te papatahi rānei.
Te Whakaroa i te Ora o te Parapara me te Whakaiti i te Utu o ngā Mea Whakapau
Mā ngā tikanga whakahaere kukū paru—tae atu ki te aroturukitanga wā-tūturu me ngā mita mātotoru paru ultrasonic—ka roa ake te roa o te oranga whai hua o te paru whakakanapa CMP. Mā te ārai i te nui rawa o te horopeta, te nui rawa rānei o te waimeha, ka tutuki i ngā taputapu whakatōpū matū miihini te whakamahinga pai rawa atu o ngā mea pau. Ka whakaitihia e tēnei huarahi te auau o te whakakapinga paru, ā, ka taea ai ngā rautaki hangarua, ka whakaitihia ngā utu katoa. Hei tauira, i roto i ngā tono paru whakakanapa CeO₂, mā te tiaki mātotoru tupato ka taea te whakahou i ngā puranga paru, ā, ka whakaitihia te nui o te para me te kore e whakaiti i te mahi. Mā te whakahaere mātotoru whai hua ka taea e ngā kaihanga tukanga te whakaora me te whakamahi anō i te paru whakakanapa e noho tonu ana i roto i ngā paepae mahi e whakaaetia ana, ka piki ake te penapena utu.
Te Whakarei Ake i te Pūruatanga me te Mana Tukanga mō te Hanga Pūnga Matatau
Ko ngā tono ahumahi haurua-ā-ira hou e hiahia ana kia nui te auautanga i roto i te taahiraa whakarārangi matū-mīhini. I roto i te hanga pūnga matatau, ahakoa ngā piki me ngā heke iti o te mātotoru paru ka hua ake he rerekētanga kāore e whakaaetia i roto i ngā putanga wafer. Mā te aunoatanga me te whakaurunga o ngā mita mātotoru paru ultrasonic-inline—pērā i ngā mea i hangaia e Lonnmeter—ka āwhina i te urupare tonu, wā-tūturu mō te whakahaere tukanga. Ka tukuna e ēnei taputapu ngā inenga tika i roto i ngā taiao matū uaua o te CMP, e tautoko ana i ngā pūnaha porowhita-kati e aro tonu ana ki ngā rerekētanga. Ko te ine mātotoru pono ko te tikanga he rite ake te ōritetanga mai i te wafer ki te wafer me te whakahaere pakari ake i runga i te MRR, he mea nui mō te hanga haurua-ā-ira iti iho i te 7nm. Ko te tāutanga taputapu tika—te tūnga tika i roto i te raina tuku paru—me te tiaki auau he mea nui kia pai ai te mahi a ngā mita me te whakarato raraunga nui mō te pumau o te tukanga.
He mea nui te pupuri i te kiato o te paru kia rawaka ai te hua o te hua, kia iti ai te hapa, kia pai ai hoki te hanga i ngā tukanga CMP i roto i te utu iti.
Ngā Pātai Auau (FAQs)
He aha te mahi a te mita kiato paru i roto i te tukanga whakapūmau matū?
He mahi nui tā te mita mātotoru paru i roto i te tukanga whakapūmau matū mā te ine tonu i te mātotoru me te kukū o te paru whakakanapa. Ko tana mahi matua he whakarato raraunga wā-tūturu mō te taurite o te kirikiri me te matū i roto i te paru, me te whakarite kei roto i ngā rohe tika ngā mea e rua mō te whakapūmau papatahi pai rawa atu. Ka ārai tēnei mana wā-tūturu i ngā hapa pēnei i te rakuraku, te tango rauemi kore taurite rānei, he mea noa ki ngā ranunga paru kua nui rawa, kua iti rawa rānei te waimeha. Mā te mātotoru paru ōrite ka āwhina i te pupuri i te kaha ki te whakaputa anō puta noa i ngā oma whakaputa, ka whakaiti i te rerekētanga o te papatahi ki te papatahi, ā, ka tautoko i te arotautanga tukanga mā te whakaoho i ngā mahi whakatika mena ka kitea he rerekētanga. I roto i ngā tono hanga semiconductor matatau me te pono teitei, ka whakaitihia hoki e te aroturuki tonu te para, ā, ka tautoko i ngā mehua whakapumau kounga pakari.
He aha i pai ake ai te para oro CeO₂ mō ētahi mahi whakapūtātanga i roto i te umanga haurua-waea?
Ko te parai whakakanapa Cerium oxide (CeO₂) he mea whiriwhiri mō ngā mahi whakatārewatanga haurua-haurua motuhake nā tōna kaha whiriwhiri me te kaha matū, inā koa mō ngā kiriata karāhe me te waikura. Ko ōna matūriki whakakanapa ōrite ka hua ake he whakatārewatanga kounga teitei me ngā reiti hapa tino iti me te iti o te rakuraku mata. Mā ngā āhuatanga matū o CeO₂ ka taea te pupuri me te whakahoki i ngā reiti tango, he mea nui mō ngā tono matatau pēnei i te photonics me ngā ara iahiko whakauru kiato teitei. Hei tāpiri, ka ātete te parai CeO₂ ki te whakakotahitanga, ka mau tonu te whakatārewatanga pumau ahakoa i roto i ngā mahi CMP roa.
He pēhea te mahi a te mita mātotoru paru ultrasonic ki te whakataurite ki ētahi atu momo ine?
Ka mahi te mita mātotoru paru ultrasonic mā te tuku ngaru oro mā roto i te paru, me te ine i te tere me te whakaiti o ēnei ngaru. Ka pā tika te mātotoru paru ki te tere o te haere o ngā ngaru me te nui o te hekenga o tō rātou kaha. Kāore tēnei huarahi ine e pokanoa, ā, ka whakarato i ngā raraunga kukū paru wā-tūturu me te kore e hiahiatia kia wehea, kia whakararuraru tinana rānei te rere o te tukanga. He iti ake te aro o ngā tikanga ultrasonic ki ngā taurangi pēnei i te tere rere, te rahi matūriki rānei ina whakaritea ki ngā pūnaha ine mātotoru miihini (e ahu mai ana i te mānu) me te taumaha taumaha rānei. I roto i te whakatōpūtanga matū miihini, ka puta tēnei hei ine pono, pakari ahakoa i roto i ngā paru rere-rahi, whai matūriki.
Kei hea te nuinga o te wā e tika ana kia tāutahia ngā mita mātotoru paru i roto i tētahi pūnaha CMP?
Ko ngā whakatakotoranga tāutanga tino pai mō te mita mātotoru paru i roto i ngā taputapu whakapūmau matū miihini ko:
- Te tāke tukurua: hei aroturuki tonu i te mātotorutanga o te paru i mua i te tohatoha.
- I mua i te tukunga atu ki te papa whakakanapa: kia mōhio ai koe ka tutuki te paru i tukuna mai i ngā whakaritenga matotoru kua whakaritea.
- Ngā pūwāhi whakaranu i muri i te parai: te whakarite kia tutuki ngā puranga hou kua whakaritea ki ngā whakatakotoranga e hiahiatia ana i mua i te urunga ki te porowhita tukanga.
Mā ēnei tūranga rautaki ka taea te kite wawe me te whakatika i tētahi rerekētanga o te kukū o te paru, ka ārai i te kounga o te wafer e heke ana me ngā aukati tukanga. Ko te whakatakotoranga e whakatauhia ana e ngā nekehanga rere o te paru, te whanonga whakaranu noa, me te hiahia mō te urupare tere tata ki te papa whakapūmau.
Me pēhea te whakapai ake i te mahi a te tukanga CMP e te whakahaere tika i te kukū o te paru?
Mā te whakahaere tika i te kukū o te paru ka whakapai ake i te tukanga whakapūmau matū mā te whakarite i ngā tere tango ōrite, te whakaiti i te rerekētanga ātete rau, me te whakaiti i te auau o ngā hapa mata. Mā te kiato paru pumau ka roa ake te ora o te papa whakakanapa me te papa whakarewa mā te ārai i te whakamahinga nui, te whakamahinga iti rānei o te mea whakakoi. Ka whakaitihia hoki ngā utu tukanga mā te arotau i te whakamahinga paru, te whakaiti i te mahi anō, me te tautoko i ngā hua taputapu haurua-ira teitei ake. Ina koa i roto i te hanga matatau me te hanga taputapu matū, ka tautokohia e te whakahaere pakari o te paru te papatahi ka taea te whakaputa anō, te mahi hiko ōrite, me te whakaiti i te turuturu puta noa i ngā hoahoa taputapu.
Wā tuku: Hakihea-09-2025
