Chemical Mechanical Polishing

Ko te oro matū-mīhini (CMP) he mea e pā ana ki te whakaputa mata maeneene mā te tauhohenga matū, inā koa ngā mahi i roto i te umanga hanga haurua-haurua.Mita Rona, he kaihanga auaha pono, neke atu i te 20 tau o te tohungatanga ki te ine kukū ā-roto, e tuku ana i te hangarau hou rawa atungā mita mātotoru kore-karihime ngā pūoko matotoru hei whakatika i ngā wero o te whakahaere paru.

Te Hiranga o te Kounga o te Parapara me te Tohungatanga o Lonnmeter

Ko te parapara whakakanapa matū te poutokomanawa o te tukanga CMP, e whakatau ana i te ōritetanga me te kounga o ngā mata. Ka taea e te matotoru, te matotoru rānei o te parapara te arahi ki ngā hapa pēnei i te rakuraku moroiti, te tango rauemi kore ōrite, te aukati papa rānei, ka whakararu i te kounga o te wafer me te pikinga o ngā utu whakaputa. Ko Lonnmeter, he kaiārahi o te ao i roto i ngā otinga ine ahumahi, he tohunga ki te ine parapara ā-roto hei whakarite i te mahi parapara tino pai. Me te hītori kua whakamātauhia mō te tuku i ngā pūoko pono, tino tika, kua mahi tahi a Lonnmeter me ngā kaihanga semiconductor matua ki te whakarei ake i te whakahaere tukanga me te whai huatanga. Ka whakaratohia e ā rātou mita matotoru parapara kore-karihi me ngā pūoko matotoru ngā raraunga wā-tūturu, ka taea ai ngā whakatikatika tika hei pupuri i te ōritetanga o te parapara me te whakatutuki i ngā tono uaua o te hanga semiconductor hou.

Neke atu i te rua tekau tau o te wheako ki te ine kukū ā-roto, e whakawhirinakihia ana e ngā kamupene semiconductor matua. Kua hangaia ngā pūoko o Lonnmeter mō te whakaurunga maeneene me te kore tiaki, ka whakaiti i ngā utu whakahaere. He otinga kua whakaritea kia tutuki ai ngā hiahia tukanga motuhake, kia whakarite ai i ngā hua wafer teitei me te tutuki i ngā whakaritenga.

Te Tūranga o te Whakakanapa Matū Ā-Mīhini i roto i te Hanganga Ārahi-Haupapa

Ko te whakakanapa matū-mīhini (CMP), e mōhiotia ana ko te whakarārangi matū-mīhini, he tūāpapa o te hanga haurua-haurua, e āhei ai te hanga i ngā mata papatahi, kore-hapa mō te hanga maramara matatau. Mā te whakakotahi i te whakairo matū me te whakakākahu mīhini, ka whakarite te tukanga CMP i te tika e hiahiatia ana mō ngā ara iahiko whakauru maha-paparanga i ngā pūnga i raro i te 10nm. Ko te parai whakakanapa matū-mīhini, he mea tito mai i te wai, ngā matūriki matū, me ngā matūriki whakakākahu, ka taunekeneke ki te papa whakakanapa me te papa whakakanapa hei tango i te rauemi kia ōrite. I te whanaketanga o ngā hoahoa haurua-haurua, ka anga atu te tukanga CMP ki te uaua haere, me te hiahia kia kaha te whakahaere i ngā āhuatanga parai hei ārai i ngā hapa me te whakatutuki i ngā papa maeneene, whakakanapa e hiahiatia ana e ngā Kaihanga Rauemi-Mīhini me ngā Kaiwhakarato Rauemi.

He mea nui tēnei tukanga mō te whakaputa maramara 5nm me te 3nm me te iti o ngā hapa, e whakarite ana i ngā mata papatahi mō te whakatakotoranga tika o ngā paparanga e whai ake nei. Ahakoa ngā hapa iti o te paru ka arahi pea ki te mahi anō utu nui, ki te ngaronga hua rānei.

Ngā Wero i te Aroturuki i ngā Āhuatanga Para

He uaua te pupuri i te matotoru me te matotoru o te paru i roto i te tukanga whakakanapa matū. Ka rerekē pea ngā āhuatanga o te paru nā ngā āhuatanga pēnei i te kawe, te whakaranu ki te wai, ki te hauwai waikura rānei, te whakaranu koretake, te pirau matū rānei. Hei tauira, ko te taunga o ngā matūriki ki roto i ngā kete paru ka nui ake te matotoru ki raro, ka hua ake te whakakanapa koretake. He maha ngā wā kāore e ranea ngā tikanga aroturuki tuku iho pēnei i te pH, te pūmanawa whakaiti-hauota (ORP), te kawe hiko rānei, nā te mea kāore e kitea ngā huringa ngawari o te hanganga paru. Ka hua ake ēnei herenga i ngā hapa, i ngā tere tango iti iho, me ngā utu paunga kua piki ake, ka nui ake ngā mōrearea mō ngā kaihanga taputapu haurua-ira me ngā kaiwhakarato ratonga CMP. Ka pāngia te mahi e ngā huringa hanganga i te wā e whakahaere ana me te tohatoha. Me kaha ake te whakahaere i ngā pona sub-10nm ki te parakore o te paru me te tika o te ranunga. He iti noa te rerekētanga o te pH me te ORP, engari he rerekē te kawe hiko me te koroheketanga o te paru. Ka taea e ngā āhuatanga paru koretake te whakanui ake i ngā tere hapa tae atu ki te 20%, e ai ki ngā rangahau ahumahi.

Ngā Pūoko Ā-Rārangi a Lonnmeter mō te Aroturuki Wā-tūturu

Ka aro atu a Lonnmeter ki ēnei wero mā roto i āna mita matotoru paru kore-karihi matatau, mengā pūoko matotoru, tae atu ki te mita matotoru ā-roto mō ngā ine matotoru ā-roto me te mita matotoru ultrasonic mō te aroturuki i te matotoru paru me te matotoru i te wā kotahi. Kua hangaia ēnei pūoko mō te whakaurunga maeneene ki ngā tukanga CMP, me ngā hononga paerewa-ahumahi. Ka tukuna e ngā otinga a Lonnmeter te pono mō te wā roa me te iti o te tiaki mō tōna hanganga pakari. Mā ngā raraunga wā-tūturu ka taea e ngā kaiwhakahaere te whakatikatika i ngā ranunga paru, te ārai i ngā hapa, me te arotau i te mahi whakakanapa, ka waiho ēnei taputapu hei mea nui mā ngā Kaiwhakarato Taputapu Tātari me te Whakamātautau me ngā Kaiwhakarato Utu CMP.

Ngā Painga o te Aroturuki Tonu mō te Arotautanga CMP

Mā te aroturuki tonu me ngā pūoko ā-roto o Lonnmeter ka huri te tukanga whakakanapa matū mā te tuku māramatanga mahi me te penapena utu nui. Mā te ine i te matotoru o te paru i te wā tūturu me te aroturuki i te matotoru ka whakaiti i ngā hapa pēnei i te karawarawa, te whakakanapa nui rānei tae atu ki te 20%, e ai ki ngā paearu ahumahi. Mā te whakaurunga ki te pūnaha PLC ka taea te whakahaere aunoa i te horopeta me te tukanga, me te whakarite kia noho tonu ngā āhuatanga paru i roto i ngā awhe tino pai. Ka hua ake tēnei i te 15-25% te whakahekenga o ngā utu pau, te whakaiti i te wā kore mahi, me te whakapai ake i te ōritetanga o te wafer. Mō ngā Kaihanga Semiconductor me ngā Kaiwhakarato Ratonga CMP, ka puta ēnei painga ki te whakapiki ake i te hua, ngā tawhē hua teitei ake, me te tutuki i ngā paerewa pēnei i te ISO 6976.

Ngā Pātai Noa mō te Aroturukitanga o te Parapara i roto i te CMP

He aha te mea nui ai te ine i te mātotoru o te paru mō te CMP?

Mā te ine i te mātotoru o te paru ka whakarite kia ōrite te tohatoha o ngā matūriki me te ōritetanga o te ranunga, ka ārai i ngā hapa me te arotau i ngā tere tango i roto i te tukanga whakakanapa matū. Ka tautoko i te hanga wafer kounga teitei me te tutuki i ngā paerewa ahumahi.

Me pēhea te whakapai ake i te whai huatanga o te CMP e te aroturukitanga matotoru?

Mā te aroturuki i te matotoru ka mau tonu te rere o te paru, ka ārai i ngā raruraru pēnei i te aukati i te papa, te oro koretake rānei. Ka whakaratohia e ngā pūoko ā-roto o Lonnmeter ngā raraunga wā-tūturu hei arotau i te tukanga CMP me te whakapai ake i ngā hua o te wafer.

He aha te mea motuhake ai ngā mita mātotoru paru kore-karihi a Lonnmeter?

Ka tukuna e ngā mita mātotoru paru kore-karihi a Lonnmeter ngā inenga mātotoru me te matotoru i te wā kotahi, he tino tika, ā, kāore he tiaki. Mā te hoahoa pakari ka pono te mahi i roto i ngā taiao tukanga CMP uaua.

He mea nui te ine i te matotoru o te paru i te wā tūturu me te aroturuki i te matotoru mō te arotau i te tukanga whakakanapa matū miihini i roto i te hanga haurua-haurua. Mā ngā mita matotoru o te paru kore-karihi me ngā pūoko matotoru a Lonnmeter ka whakaratohia ki ngā Kaihanga Taputapu Haurua-haurua, ki ngā Kaiwhakarato Mea Whakapau CMP, me ngā Huinga Haurua-haurua ngā taputapu hei wikitoria i ngā wero whakahaere paru, hei whakaiti i ngā hapa, me te whakaiti i ngā utu. Mā te tuku raraunga tika, wā tūturu, ka whakarei ake ēnei otinga i te pai o te tukanga, ka whakarite kia tutukihia ngā whakaritenga, ā, ka akiaki i te hua i roto i te mākete CMP whakataetae. TirohiaPaetukutuku a Lonnmeterwhakapā atu rānei ki tā rātou tīma i tēnei rā tonu kia kitea ai me pēhea e taea ai e Lonnmeter te whakarerekē i ō mahi whakakanapa matū me te miihini.

Mahi Inaianei

Wā tuku: Hurae-22-2025