1. Kev Txheeb Xyuas Cov Ntsiab Lus Qib SiabPkev pleev xim
CMP hauv Semiconductor yog dab tsi?
Kev txhuam txhuam siv tshuaj lom neeg (CMP), uas tseem hu ua kev sib xyaw ua ke ntawm cov khoom siv tshuaj lom neeg, yog ib qho ntawm cov haujlwm nyuaj tshaj plaws thiab tseem ceeb tshaj plaws hauv kev tsim khoom siv semiconductor niaj hnub no. Cov txheej txheem tshwj xeeb no ua haujlwm ua ib qho txheej txheem sib xyaw uas tseem ceeb, ua kom cov nplaim wafer du thiab du los ntawm kev siv tshuaj lom neeg etching thiab kev tswj hwm lub cev zoo heev. Siv dav hauv lub voj voog tsim khoom, CMP yog qhov tseem ceeb rau kev npaj cov wafer semiconductor rau cov txheej tom ntej, ua rau muaj kev sib xyaw ua ke ntawm cov khoom siv siab heev uas xav tau.
CMP hauv Semiconductor Txheej Txheem
*
Qhov tseem ceeb ntawmkev txhuam tshuaj lom neegyog lub hauv paus ntawm qhov xav tau ntawm lub cev ntawm cov lithography niaj hnub no. Raws li cov yam ntxwv ntawm kev sib xyaw ua ke ntawm lub voj voog shrink thiab ntau txheej sib tshooj ntsug, cov txheej txheem muaj peev xwm tshem tawm cov khoom siv sib npaug thiab tsim kom muaj qhov chaw tiaj tiaj thoob ntiaj teb ua qhov tseem ceeb heev. Lub taub hau polishing dynamic yog tsim los tig raws cov axes sib txawv, ua tib zoo leveling tawm cov topography tsis sib xws thoob plaws lub wafer. Rau kev hloov pauv qauv zoo, tshwj xeeb tshaj yog nrog cov txheej txheem txiav-ntug xws li Extreme Ultraviolet (EUV) lithography, tag nrho cov nto ua tiav yuav tsum poob rau hauv qhov tob ntawm daim teb - qhov kev txwv geometric uas xav tau Angstrom-level flatness rau cov thev naus laus zis niaj hnub sub-22 nm. Yog tsis muaj lub zog planarizing ntawmtxheej txheem cmp semiconductor, cov kauj ruam photolithography tom qab ntawd yuav ua rau muaj kev sib dhos tsis zoo, kev cuam tshuam cov qauv, thiab kev hloov pauv loj heev.
Qhov kev siv CMP dav dav tau tsav los ntawm kev lag luam hloov ntawm cov hlau txhuas ib txwm mus rau cov khoom siv tooj liab ua haujlwm siab. Kev ua kom tooj liab siv cov txheej txheem ntxiv, cov txheej txheem Damascene, uas feem ntau vam khom CMP lub peev xwm tshwj xeeb los xaiv thiab sib npaug tshem tawm cov tooj liab ntau dhau thiab tsis tu ncua nres kev tshem tawm ntawm qhov sib txuas ntawm cov hlau thiab cov txheej txheem oxide insulating. Qhov kev tshem tawm cov khoom siv xaiv heev no qhia txog qhov sib npaug ntawm cov tshuaj lom neeg thiab cov khoom siv uas txhais cov txheej txheem, qhov sib npaug uas tam sim ntawd raug cuam tshuam los ntawm kev hloov pauv me me hauv cov khoom siv polishing.
Cov Haujlwm ntawm CMP hauv Cov Txheej Txheem Semiconductor
Qhov yuav tsum tau ua kom muaj kev hloov pauv ntawm thaj chaw qis heev tsis yog lub hom phiaj peripheral tab sis yog qhov yuav tsum tau ua kom ncaj qha rau kev ua haujlwm ntawm cov khoom siv txhim khu kev qha, xyuas kom meej tias cov dej ntws zoo, kev tshem tawm cua sov, thiab kev sib dhos ua haujlwm hauv cov qauv ntau txheej. CMP lub luag haujlwm tseem ceeb yog kev tswj hwm thaj chaw, tsim kom muaj qhov tiaj tiaj rau txhua kauj ruam ua tiav tom ntej.
Daim ntawv thov tshwj xeeb qhia txog kev xaiv cov ntaub ntawv thiab cov khoom sib xwskev npaj ntawm cov tshuaj slurryCov txheej txheem CMP tau tsim los siv ntau yam khoom siv, suav nrog tungsten, tooj liab, silicon dioxide (SiO2), thiab silicon nitride (SiN). Cov slurries raug kho kom zoo rau kev ua haujlwm siab planarization thiab kev xaiv cov khoom siv zoo tshaj plaws thoob plaws ntau yam kev siv, suav nrog Shallow Trench Isolation (STI) thiab Interlayer Dielectrics (ILD). Piv txwv li, high-function ceria slurry yog siv tshwj xeeb rau ILD daim ntawv thov vim nws qhov kev ua tau zoo tshaj plaws hauv kev ua kom tiaj tus, kev sib xws, thiab kev txo qhov tsis xws luag. Qhov xwm txheej tshwj xeeb ntawm cov slurries no lees paub tias qhov tsis ruaj khov ntawm cov txheej txheem los ntawm kev hloov pauv ntawm cov kua dej ntawm cov khoom siv polishing yuav ua txhaum cov kev cai tseem ceeb rau kev tshem tawm cov khoom siv xaiv.
2. Lub Luag Haujlwm Tseem Ceeb ntawm CMP Slurry Health
CMP hauv Semiconductor Txheej Txheem
Qhov ua tau zoo ntawm qhovcov txheej txheem cmp polishing tshuaj lom neegyog nyob ntawm qhov kev xa khoom tas mus li thiab kev ua tau zoo ntawm cov slurry, uas ua haujlwm ua qhov tseem ceeb nruab nrab pab txhawb ob qho tib si cov tshuaj tiv thaiv tsim nyog thiab kev puas tsuaj. Cov kua dej no, uas yog ib qho kev ncua colloidal, yuav tsum xa nws cov khoom tseem ceeb tas mus li thiab sib npaug, suav nrog cov tshuaj lom neeg (oxidizers, accelerators, thiab corrosion inhibitors) thiab cov khoom me me nano-sized abrasive, mus rau qhov chaw wafer dynamic.
Cov khoom siv Slurry yog tsim los ua kom muaj kev tshuaj lom neeg tshwj xeeb: cov txheej txheem zoo tshaj plaws yog nyob ntawm kev tsim cov txheej oxide uas tsis yaj tau ntawm cov khoom siv, uas tom qab ntawd raug tshem tawm los ntawm cov khoom siv abrasive. Lub tshuab no muab qhov kev xaiv siab ntawm qhov chaw saum npoo av uas tsim nyog rau kev npaj ua haujlwm zoo, tsom mus rau qhov kev tshem tawm ntawm cov ntsiab lus siab lossis cov protrusions. Qhov sib piv, yog tias cov tshuaj lom neeg ua rau muaj cov oxide yaj tau, kev tshem tawm cov khoom siv yog isotropic, yog li tshem tawm qhov kev xaiv topographic uas xav tau. Cov khoom siv lub cev ntawm cov slurry feem ntau muaj cov khoom siv abrasive (piv txwv li, silica, ceria) uas muaj qhov loj me ntawm 30 txog 200 nm, dai ntawm qhov sib xyaw ntawm 0.3 thiab 12 feem pua ntawm cov khoom khov.
CMP Slurry Semiconductor
Kev tswj hwm kev noj qab haus huv ntawmCMP slurry semiconductoryuav tsum tau ua kom pom tseeb thiab tswj hwm thoob plaws nws lub neej, vim tias kev puas tsuaj thaum lub sijhawm tuav lossis ncig tuaj yeem ua rau muaj kev poob nyiaj txiag ntau. Qhov zoo ntawm cov wafer polished kawg, txhais los ntawm nws cov nanoscale smoothness thiab cov qib tsis zoo, yog ncaj qha cuam tshuam nrog kev ncaj ncees ntawm slurry qhov faib tawm me me (PSD) thiab kev ruaj khov tag nrho.
Lub specialization ntawm ntau yam kev ua ub nocov hom cmp slurrytxhais tau hais tias cov khoom me me nano-sized tau ruaj khov los ntawm cov zog electrostatic repellent hauv cov tshuaj ncua. Cov slurries feem ntau muab rau hauv daim ntawv concentrated thiab xav tau kev dilution thiab sib tov nrog dej thiab oxidizers ntawm qhov chaw tsim khoom. Qhov tseem ceeb, kev cia siab rau cov piv sib xyaw zoo li qub yog qhov tsis zoo vim tias cov khoom siv concentrated tuaj yeem qhia txog kev hloov pauv ntawm cov khoom sib xyaw ua ke.
Rau kev tswj cov txheej txheem, thaum kev tshuaj xyuas ncaj qha ntawm PSD thiab zeta muaj peev xwm (colloidal stability) yog qhov tseem ceeb, cov txheej txheem no feem ntau raug txo qis rau kev tshuaj xyuas tsis tu ncua, offline. Qhov tseeb ua haujlwm ntawm HVM ib puag ncig yuam kom muaj kev tawm tswv yim tam sim ntawd. Yog li ntawd, qhov ceev thiab viscosity ua haujlwm ua cov neeg sawv cev inline zoo tshaj plaws thiab ua tau rau kev noj qab haus huv slurry. Qhov ceev muab kev ntsuas sai, txuas ntxiv ntawm tag nrho cov khoom siv abrasive solids concentration hauv nruab nrab. Viscosity kuj tseem ceeb heev, ua haujlwm ua tus qhia txog qhov rhiab heev ntawm cov kua dej lub xeev colloidal thiab thermal integrity. Qhov tsis ruaj khov viscosity feem ntau qhia txog cov khoom abrasive.kev sib sau ua kelossis kev sib xyaw ua ke, tshwj xeeb tshaj yog nyob rau hauv cov xwm txheej dynamic shear. Yog li ntawd, kev saib xyuas tas mus li thiab kev tswj hwm ntawm ob qho kev ntsuas rheological no muab cov lus teb tam sim ntawd, ua tau raws li qhov yuav tsum tau ua kom paub tseeb tias cov slurry tswj hwm nws cov tshuaj lom neeg thiab lub cev tshwj xeeb ntawm qhov chaw noj.
3. Kev Tshawb Fawb Txog Kev Ua Tsis Tau Zoo ntawm Lub Tshuab: Cov Yam Uas Ua Rau Muaj Qhov Tsis Zoo
Cov Kev Cuam Tshuam Tsis Zoo Uas Ua Los Ntawm CMP Qhov Ceev & Viscosity Hloov Pauv
Kev hloov pauv ntawm cov txheej txheem raug lees paub tias yog tib qho loj tshaj plaws uas ua rau muaj kev pheej hmoo ntawm kev ua haujlwm siabcmp hauv kev tsim khoom semiconductorCov yam ntxwv ntawm Slurry, hu ua "slurry health," muaj kev hloov pauv ntau heev los ntawm kev siv lub tshuab nqus dej, kev hloov pauv kub, thiab kev sib xyaw tsis sib xws. Kev ua tsis tiav los ntawm lub kaw lus ntws slurry txawv ntawm cov teeb meem kho tshuab xwb, tab sis ob qho tib si ua rau muaj cov khoom seem wafer tseem ceeb thiab feem ntau tsuas yog pom lig dhau los ntawm cov txheej txheem kawg tom qab.
Qhov muaj cov khoom me me lossis cov agglomerates loj heev nyob rau hauvcmp semiconductorcov khoom siv tau pom tseeb tias muaj feem cuam tshuam nrog kev tsim cov khawb me me thiab lwm yam kev puas tsuaj loj heev ntawm qhov chaw ci ntsa iab. Kev hloov pauv ntawm cov yam ntxwv tseem ceeb ntawm rheological - viscosity thiab density - yog cov cim qhia tas mus li uas qhia tias qhov kev ua haujlwm ntawm cov slurry tau raug cuam tshuam, pib ua rau muaj qhov tsis zoo.
Kev hloov pauv hauv Slurry Viscosity (piv txwv li, ua rau agglomeration, hloov pauv shear)
Viscosity yog ib qho khoom siv thermodynamic uas tswj hwm tus cwj pwm ntws thiab kev sib txhuam ntawm qhov sib txuas polishing, ua rau nws rhiab heev rau kev ntxhov siab ib puag ncig thiab kev kho tshuab.
Kev ua haujlwm ntawm lub cev thiab tshuaj lom neeg ntawm cov khoom nosemiconductor viscosity slurryLub kaw lus no nyob ntawm kev tswj qhov kub thiab txias heev. Kev tshawb fawb lees paub tias txawm tias qhov hloov pauv me me 5 ° C hauv qhov kub thiab txias tuaj yeem ua rau kwv yees li 10% txo qis hauv cov viscosity slurry. Qhov kev hloov pauv no hauv rheology cuam tshuam ncaj qha rau qhov tuab ntawm zaj duab xis hydrodynamic uas cais cov wafer ntawm lub polishing pad. Qhov viscosity txo qis ua rau tsis txaus lubrication, ua rau muaj kev sib txhuam ntawm cov khoom siv, uas yog qhov ua rau muaj kev khawb me me thiab kev siv cov pad sai dua.
Ib txoj kev puas tsuaj tseem ceeb yog kev sib sau ua ke ntawm cov khoom me me uas raug txiav. Cov slurries uas muaj silica tswj kev sib cais ntawm cov khoom me me los ntawm cov zog electrostatic repulsion. Thaum cov slurry ntsib kev ntxhov siab siab - feem ntau tsim los ntawm cov twj centrifugal tsis zoo lossis kev rov ua dua tshiab hauv lub voj voog faib khoom - cov zog no tuaj yeem kov yeej, ua rau muaj kev sib sau ua ke sai thiab tsis rov qab tau.kev sib sau ua kentawm cov khoom me me uas ua rau puas tsuaj. Cov khoom loj loj ua rau ua cov cuab yeej me me, ncaj qha tsim cov khawb me me ntawm qhov chaw wafer. Lub sijhawm tiag tiag viscometry yog lub tshuab tawm tswv yim tsim nyog los ntes cov xwm txheej no, muab kev lees paub tseem ceeb ntawm "kev mos mos" ntawm lub twj tso kua mis thiab kev faib tawm ua ntej muaj qhov tsis zoo loj tshwm sim.
Qhov kev hloov pauv ntawm viscosity kuj ua rau muaj kev cuam tshuam loj heev rau kev ua haujlwm ntawm planarization. Vim tias viscosity yog ib qho tseem ceeb uas cuam tshuam rau qhov coefficient ntawm kev sib txhuam thaum lub sijhawm polishing, qhov profile viscosity tsis sib xws yuav ua rau cov nqi tshem tawm cov khoom tsis sib xws. Kev nce hauv zos hauv viscosity, tshwj xeeb tshaj yog ntawm cov nqi shear siab tshwm sim ntawm cov yam ntxwv siab ntawm wafer topography, hloov pauv qhov sib txhuam dynamics thiab ua rau lub hom phiaj planarization puas tsuaj, thaum kawg ua rau muaj qhov tsis zoo ntawm topographical xws li dishing thiab erosion.
Kev hloov pauv ntawm Slurry Density
Qhov ceev ntawm cov slurry yog qhov qhia tau sai thiab txhim khu kev qha ntawm qhov sib xyaw tag nrho ntawm cov khoom tawv uas dai hauv cov kua dej. Kev hloov pauv ntawm qhov ceev qhia txog kev xa cov slurry tsis sib xws, uas yog txuas nrog kev hloov pauv ntawm qhov nrawm ntawm cov khoom tshem tawm (MRR) thiab kev tsim cov qhov tsis zoo.
Cov chaw ua haujlwm yuav tsum tau kuaj xyuas cov khoom sib xyaw ua ke. Kev tsuas yog ntxiv cov dej thiab oxidizer rau hauv cov khoom sib xyaw ua ke tsis txaus, vim tias qhov ceev ntawm cov khoom siv raw feem ntau sib txawv, ua rau cov txheej txheem tsis sib xws ntawm lub taub hau cuab yeej. Ntxiv mus, cov khoom sib xyaw ua ke, tshwj xeeb tshaj yog cov khoom sib xyaw ua ke ntau dua, yuav raug tso rau hauv av yog tias qhov ceev ntawm cov dej ntws lossis kev ruaj khov ntawm colloidal tsis txaus. Qhov kev tso dej no tsim cov qhov sib txawv ntawm qhov ceev thiab cov khoom sib sau ua ke hauv cov kab ntws, ua rau muaj kev cuam tshuam loj heev rau kev xa cov khoom sib xyaw ua ke.
How Dkev ua siab lojDkev zam tximAfflwm yam Manufacturkev uaProcess?.
Cov txiaj ntsig ncaj qha ntawm qhov tsis ruaj khov ntawm cov slurry qhia tau tias yog qhov tsis zoo ntawm lub cev ntawm qhov chaw ci ntsa iab:
Cov Nqi Tshem Tawm Tsis Sib Xws (WIWNU):Kev hloov pauv ntawm qhov ceev txhais tau ncaj qha mus rau hauv kev hloov pauv ntawm qhov concentration ntawm cov khoom siv abrasive uas tau nthuav tawm ntawm qhov sib tshuam polishing. Qhov ceev qis dua qhov tau teev tseg qhia txog qhov txo qis ntawm qhov concentration abrasive, uas ua rau MRR txo qis thiab ua rau tsis sib xws hauv-wafer (WIWNU). WIWNU ua rau qhov yuav tsum tau ua kom tiaj tus. Ntawm qhov tod tes, qhov ceev siab hauv zos ua rau cov khoom siv zoo dua, ua rau cov khoom siv raug tshem tawm ntau dhau. Kev tswj hwm qhov ceev nruj ua kom muaj kev xa khoom abrasive tas li, uas sib raug zoo nrog cov zog sib txhuam ruaj khov thiab MRR kwv yees tau.
Kev tawg vim muaj kev hloov pauv ntawm thaj chaw:Cov khoom siv abrasive uas muaj ntau hauv zos, feem ntau yog vim muaj kev sib xyaw lossis kev sib xyaw tsis zoo, ua rau muaj kev thauj khoom ntau hauv ib qho me me ntawm qhov chaw wafer. Thaum cov khoom siv abrasive, tshwj xeeb tshaj yog ceria, lo rau ntawm txheej iav oxide, thiab muaj kev ntxhov siab ntawm qhov chaw, qhov kev thauj khoom tuaj yeem ua rau txheej iav tawg, ua rau tob, ntse-ntug.kev khawb avqhov tsis zoo. Cov kev hloov pauv ntawm cov khoom sib xyaw no tuaj yeem tshwm sim los ntawm kev lim dej tsis zoo, ua rau cov khoom sib xyaw loj dhau (cov khoom me me loj dua $0.5 \mu m$) hla dhau, uas yog los ntawm kev tsis zoo ntawm cov khoom sib xyaw. Kev saib xyuas qhov ceev muab lub kaw lus ceeb toom tseem ceeb, ua kom tiav rau cov suav cov khoom me me, uas tso cai rau cov kws ua haujlwm txheej txheem kom pom qhov pib ntawm kev sib sau ua ke ntawm cov khoom sib xyaw thiab ua kom lub nra hnyav ntawm cov khoom sib xyaw ruaj khov.
Kev Tsim Cov Khoom seem los ntawm Kev Nchuav Cov Khoom Me Me Tsis Zoo:Thaum qhov kev ncua tsis ruaj khov, ua rau muaj qhov sib txawv ntawm qhov ceev ceev, cov khoom khov kho yuav sib sau ua ke hauv cov qauv ntws, ua rau muaj cov nthwv dej ceev thiab cov khoom sib sau ua ke hauv lub kaw lus faib khoom.17Ntxiv mus, thaum lub sijhawm polishing, cov slurry yuav tsum nqa tawm ob qho tib si cov tshuaj lom neeg thiab cov khib nyiab hnav. Yog tias cov khoom me me lossis cov kua dej tsis zoo vim tsis ruaj khov, cov seem no tsis raug tshem tawm ntawm qhov chaw wafer, ua rau cov khoom me me tom qab CMP thiab tshuaj lom neegcov seem seemqhov tsis zoo. Kev ncua cov khoom me me kom ruaj khov, ua kom ntseeg tau los ntawm kev saib xyuas rheological tas mus li, yog qhov yuav tsum tau ua rau cov khoom huv si thiab tas mus li.
Kawm Txog Ntau Cov Ntsuas Qhov Ceev
Ntau Cov Txheej Txheem Online
4. Kev Ua Tau Zoo Tshaj Plaws ntawm Inline Metrology
Lonnmeter Inline Densitometers & Viscometers
Yuav kom ua tiav qhov ruaj khov ntawm cov txheej txheem CMP uas tsis ruaj khov, kev ntsuas tas mus li, tsis muaj kev cuam tshuam ntawm cov kev ntsuas kev noj qab haus huv ntawm cov slurry yog qhov tseem ceeb.Lonnmeter Inline Densitometers & Viscometerssiv cov thev naus laus zis resonant sensor siab heev, xa cov kev ua tau zoo dua piv rau cov khoom siv metrology ib txwm muaj, latency-prone. Lub peev xwm no ua rau muaj kev soj ntsuam qhov ceev tsis muaj kev sib txuas thiab txuas ntxiv ncaj qha rau hauv txoj kev ntws, uas yog qhov tseem ceeb rau kev ua tau raws li cov qauv kev huv thiab kev sib xyaw ua ke ntawm cov txheej txheem niaj hnub sub-28nm.
Piav qhia txog lawv cov ntsiab cai tseem ceeb ntawm thev naus laus zis, kev ntsuas qhov tseeb, kev teb ceev, kev ruaj khov, kev ntseeg tau hauv cov chaw CMP nyuaj, thiab sib txawv ntawm cov txheej txheem offline ib txwm muaj.
Kev ua haujlwm tsis siv neeg zoo yuav tsum muaj cov sensors uas tau tsim los ua haujlwm tau zoo nyob rau hauv cov xwm txheej dynamic ntawm kev ntws siab, kev kub siab, thiab kev raug tshuaj lom neeg, muab cov lus teb tam sim ntawd rau cov kab ke tswj.
Cov Ntsiab Cai Tseem Ceeb ntawm Kev Siv Tshuab: Qhov Zoo ntawm Resonator
Cov cuab yeej Lonnmeter siv cov thev naus laus zis resonant muaj zog tshwj xeeb tsim los txo qhov tsis muaj zog ntawm cov qauv ib txwm muaj, nqaim-bore U-tube densitometers, uas muaj teeb meem rau kev siv inline nrog abrasive colloidal suspensions.
Kev Ntsuas Qhov Ceev:Lublub ntsuas qhov ntom ntawm cov kua nplaumsiv cov khoom siv vibrating uas vuam tag nrho, feem ntau yog lub fork assembly lossis lub co-axial resonator. Cov khoom no raug txhawb nqa los ntawm piezo-electrically kom oscillate ntawm nws qhov zaus ntuj tsim. Kev hloov pauv ntawm qhov ceev ntawm cov kua dej ib puag ncig ua rau muaj kev hloov pauv meej hauv qhov zaus ntuj no, uas tso cai rau kev txiav txim siab qhov ceev ncaj qha thiab ntseeg tau.
Kev Ntsuas Viscosity:LubCov viscometer slurry hauv cov txheej txheemsiv lub sensor ruaj khov uas oscillates hauv cov kua dej. Tus qauv tsim kom ntseeg tau tias qhov kev ntsuas viscosity raug cais tawm ntawm cov teebmeem ntawm cov kua dej ntws, muab kev ntsuas intrinsic ntawm cov khoom siv rheology.
Kev Ua Haujlwm Zoo thiab Kev Ruaj Ntseg
Inline resonant metrology muab cov kev ntsuas kev ua tau zoo tseem ceeb rau kev tswj hwm HVM nruj:
Kev Ntsuas thiab Kev Teb Ceev:Cov txheej txheem inline muab kev rov ua dua siab, feem ntau ua tiav zoo dua 0.1% rau viscosity thiab qhov tseeb ntawm qhov ceev mus txog 0.001 g / cc. Rau kev tswj hwm cov txheej txheem muaj zog, qhov siab nokev ua kom raug—lub peev xwm ntsuas tib yam nqi tas li thiab ntes tau qhov sib txawv me me—feem ntau muaj nqis dua li qhov tseeb tsis muaj qhov kawg. Qhov tseem ceeb, lub teeb liablub sijhawm tebrau cov sensors no yog ceev heev, feem ntau yog li ntawm 5 vib nas this. Qhov kev tawm tswv yim ze li tam sim ntawd no tso cai rau kev kuaj pom qhov txhaum tam sim ntawd thiab kev kho qhov kaw-voj tsis siv neeg, qhov yuav tsum tau ua rau kev tiv thaiv kev txav mus los.
Kev Ruaj Ntseg thiab Kev Ntseeg Tau Hauv Cov Chaw Nyuaj Siab:Cov khoom siv CMP slurries yog qhov ua rau muaj kev kub ntxhov. Cov cuab yeej siv niaj hnub no yog tsim los rau kev ua kom muaj zog, siv cov ntaub ntawv tshwj xeeb thiab cov kev teeb tsa rau kev teeb tsa ncaj qha rau hauv cov kav dej. Cov sensors no yog tsim los ua haujlwm thoob plaws ntau yam kev nyuaj siab (piv txwv li, txog li 6.4 MPa) thiab kub (txog li 350 ℃). Tus qauv tsim tsis yog U-tube txo cov cheeb tsam tuag thiab kev pheej hmoo ntawm kev txhaws uas cuam tshuam nrog cov xov xwm abrasive, ua kom lub sijhawm ua haujlwm ntawm sensor siab tshaj plaws thiab kev ntseeg siab ua haujlwm.
Kev Sib Txawv ntawm Cov Txheej Txheem Offline Ib Txwm Muaj
Qhov sib txawv ntawm kev ua haujlwm ntawm cov txheej txheem inline tsis siv neeg thiab cov txheej txheem offline tes txhais qhov sib txawv ntawm kev tswj hwm qhov tsis zoo thiab kev ua kom zoo dua qub.
| Cov Qauv Saib Xyuas | Offline (Kev kuaj hauv chaw kuaj/U-Tube Densitometer) | Inline (Lonnmeter Densitometer/Viscometer) | Kev Cuam Tshuam ntawm Cov Txheej Txheem |
| Kev Ntsuas Ceev | Ncua (teev) | Lub Sijhawm Tiag Tiag, Txuas ntxiv (Lub sijhawm teb feem ntau yog 5 vib nas this) | Ua kom muaj kev tiv thaiv, kev tswj cov txheej txheem kaw-voj. |
| Kev Sib Xws/Kev Tseeb ntawm Cov Ntaub Ntawv | Qis (Risk rau qhov yuam kev ntawm tes, cov qauv puas tsuaj) | Siab (Tsis siv neeg, rov ua dua / raug siab) | Cov kev txwv tswj cov txheej txheem nruj dua thiab txo cov kev pom zoo cuav. |
| Kev Sib Haum Xeeb ntawm Abrasive | Muaj kev pheej hmoo siab ntawm kev txhaws (tsim qhov nqaim U-tube) | Kev pheej hmoo tsawg ntawm kev txhaws (Robust, tsis yog U-tube resonator tsim) | Ua kom lub sensor ua haujlwm tau zoo tshaj plaws thiab ntseeg tau hauv cov khoom siv abrasive. |
| Kev Muaj Peev Xwm Tshawb Pom Qhov Txhaum Cai | Reactive (nrhiav pom kev txav mus los uas tau tshwm sim ob peb teev ua ntej) | Ua ntej (saib xyuas cov kev hloov pauv dynamic, ntes tau kev tawm mus ua ntej) | Tiv thaiv cov wafer pov tseg uas puas tsuaj loj heev thiab cov qoob loo tsis zoo. |
Rooj 3: Kev Tshawb Fawb Sib Piv: Inline vs. Traditional Slurry Metrology
Kev tshuaj xyuas offline ib txwm muaj yuav tsum tau siv cov txheej txheem rho tawm thiab thauj cov qauv, uas ua rau muaj lub sijhawm ntev heev rau hauv lub voj voog metrology. Qhov kev ncua sijhawm no, uas tuaj yeem kav ntev li ntau teev, ua kom ntseeg tau tias thaum pom qhov kev txav mus los, ntau cov wafers twb tau raug cuam tshuam lawm. Ntxiv mus, kev tuav tes ua rau muaj kev hloov pauv thiab muaj kev pheej hmoo ntawm kev puas tsuaj ntawm cov qauv, tshwj xeeb tshaj yog vim qhov kub hloov pauv tom qab kuaj, uas tuaj yeem cuam tshuam cov nyeem viscosity.
Kev ntsuas hauv kab tshem tawm qhov kev ncua deb no, muab cov ntaub ntawv txuas ntxiv mus ncaj qha los ntawm kab faib khoom. Qhov ceev no yog qhov tseem ceeb rau kev kuaj pom qhov txhaum; thaum ua ke nrog kev tsim khoom ruaj khov, tsis txhaws uas tseem ceeb rau cov ntaub ntawv abrasive, nws muab cov ntaub ntawv pub rau kev ruaj khov rau tag nrho cov kab ke faib khoom. Thaum qhov nyuaj ntawm CMP yuam kom saib xyuas ntau yam kev ntsuas (xws li refractive index lossis pH), qhov ceev thiab viscosity muab cov lus teb ncaj qha tshaj plaws, lub sijhawm tiag tiag ntawm qhov ruaj khov ntawm cov khoom siv abrasive, uas feem ntau tsis cuam tshuam rau kev hloov pauv hauv cov kev ntsuas xws li pH lossis Oxidation-Reduction Potential (ORP) vim yog tshuaj lom neeg buffering.
5. Tej Yam Yuav Tsum Tau Ua Hauv Kev Lag Luam Thiab Kev Ua Haujlwm
Cov txiaj ntsig ntawm Kev Saib Xyuas Qhov Ceev thiab Viscosity tiag tiag
Rau txhua txoj kab tsim khoom siab heev uas qhovCMP hauv cov txheej txheem semiconductorYog siv, kev vam meej yog ntsuas los ntawm kev txhim kho cov txiaj ntsig tas mus li, kev ruaj khov ntawm cov txheej txheem siab tshaj plaws, thiab kev tswj hwm tus nqi zoo. Kev saib xyuas rheological tiag tiag muab cov ntaub ntawv tseem ceeb uas xav tau los ua tiav cov kev lag luam no.
Txhim kho Kev Ruaj Ntseg ntawm Cov Txheej Txheem
Kev saib xyuas cov slurry tas mus li, qhov tseeb siab lav tias cov kev ntsuas slurry tseem ceeb xa mus rau qhov chaw siv (POU) tseem nyob hauv qhov txwv tswj hwm nruj heev, tsis hais txog suab nrov ntawm cov txheej txheem. Piv txwv li, muab qhov sib txawv ntawm qhov ceev uas muaj nyob rau hauv cov khoom siv slurry nyoos tuaj, tsuas yog ua raws li daim ntawv qhia tsis txaus. Los ntawm kev saib xyuas qhov ceev hauv lub tank blender hauv lub sijhawm tiag tiag, lub kaw lus tswj hwm tuaj yeem hloov kho qhov sib piv dilution, xyuas kom meej tias qhov concentration ntawm lub hom phiaj raug tswj hwm thoob plaws hauv cov txheej txheem sib tov. Qhov no txo qhov sib txawv ntawm cov txheej txheem uas tshwm sim los ntawm cov khoom siv raw tsis sib xws, ua rau muaj kev ua haujlwm polishing kwv yees tau zoo thiab txo qhov zaus thiab qhov loj ntawm cov txheej txheem kim heev.
Ua rau cov qoob loo ntau ntxiv
Kev daws teeb meem ncaj qha rau cov kev puas tsuaj ntawm cov khoom siv thiab tshuaj lom neeg uas tshwm sim los ntawm cov xwm txheej tsis ruaj khov yog txoj hauv kev zoo tshaj plaws los txhawb nqakev tsim khoom ntawm cmp semiconductorcov nqi tsim tawm. Cov txheej txheem saib xyuas tiag tiag, kev kwv yees ua ntej tiv thaiv cov khoom muaj nqis siab. Cov Fab uas tau siv cov txheej txheem zoo li no tau sau tseg kev vam meej tseem ceeb, suav nrog cov ntawv ceeb toom txog li 25% txo qis ntawm qhov tsis zoo khiav tawm. Lub peev xwm tiv thaiv no hloov pauv tus qauv ua haujlwm los ntawm kev teb rau qhov tsis zoo tsis zam mus rau kev tiv thaiv lawv txoj kev tsim, yog li tiv thaiv ntau lab daus las ntawm cov wafers los ntawm kev khawb me me thiab lwm yam kev puas tsuaj los ntawm cov pej xeem tsis ruaj khov. Lub peev xwm los saib xyuas cov kev hloov pauv dynamic, xws li viscosity poob qis sai sai signaling thermal lossis shear kev ntxhov siab, ua rau muaj kev cuam tshuam ua ntej cov yam no kis cov teeb meem hla ntau wafers.
Txo Kev Ua Haujlwm Dua
Cov khoomua haujlwm duaTus nqi, txhais tias yog feem pua ntawm cov khoom tsim tawm uas xav tau kev rov ua dua vim muaj qhov yuam kev lossis qhov tsis zoo, yog KPI tseem ceeb uas ntsuas qhov tsis ua haujlwm zoo ntawm kev tsim khoom. Cov nqi rov ua dua siab siv cov neeg ua haujlwm muaj nqis, cov khoom pov tseg, thiab ua rau muaj kev ncua sijhawm ntau. Vim tias qhov tsis zoo xws li kev ntxuav, kev tshem tawm tsis sib xws, thiab kev khawb yog cov txiaj ntsig ncaj qha ntawm kev tsis ruaj khov ntawm rheological, kev tswj cov dej ntws los ntawm kev tswj hwm qhov ceev thiab viscosity txo qis qhov pib ntawm cov yuam kev tseem ceeb no. Los ntawm kev ua kom muaj kev ruaj khov ntawm cov txheej txheem, qhov tshwm sim ntawm cov qhov tsis zoo uas xav tau kev kho lossis rov ua dua raug txo qis, ua rau muaj kev ua haujlwm zoo dua thiab kev ua haujlwm zoo ntawm pab pawg.
Txhim Kho Cov Nqi Ua Haujlwm
Cov slurries CMP sawv cev rau tus nqi siv tau ntau hauv qhov chaw tsim khoom. Thaum qhov tsis paub meej ntawm cov txheej txheem hais txog kev siv cov npoo kev nyab xeeb dav dav, kev txuag nyiaj hauv kev sib xyaw thiab kev siv, qhov tshwm sim yog kev siv tsis zoo thiab cov nqi ua haujlwm siab. Kev saib xyuas lub sijhawm tiag tiag ua rau kev tswj hwm slurry lean, meej. Piv txwv li, kev tswj hwm tas mus li tso cai rau qhov sib xyaw sib xyaw kom raug, txo qis kev siv dej dilution thiab xyuas kom meej tias tus nqi kimcov khoom sib xyaw ua ke ntawm cmp slurrysiv tau zoo tshaj plaws, txo cov khoom pov tseg thiab kev siv nyiaj ua haujlwm. Ntxiv mus, kev kuaj mob rheological tiag tiag tuaj yeem muab cov cim ceeb toom ntxov ntawm cov teeb meem khoom siv - xws li hnav lub ncoo lossis lub twj tso kua mis tsis ua haujlwm - uas tso cai rau kev saib xyuas raws li qhov xwm txheej ua ntej qhov ua haujlwm tsis zoo ua rau muaj kev cuam tshuam loj heev thiab lub sijhawm ua haujlwm tsis ua haujlwm tom qab.
Kev tsim khoom siab ruaj khov yuav tsum tshem tawm qhov sib txawv hauv txhua qhov txheej txheem tseem ceeb. Lonnmeter resonant technology muab qhov tsim nyog robustness, ceev, thiab precision kom txo qhov kev pheej hmoo ntawm cov khoom siv slurry. Los ntawm kev koom ua ke cov ntaub ntawv ceev thiab viscosity tiag tiag, cov txheej txheem engineers tau nruab nrog kev txawj ntse tas mus li, ua kom ntseeg tau tias kev ua polishing kwv yees tau thiab tiv thaiv cov wafer yield tiv thaiv colloidal instability.
Yuav pib hloov pauv ntawm kev tswj cov qoob loo uas ua haujlwm rov qab mus rau kev tswj cov txheej txheem ua ntej:
Ua kom loj tshaj plawsLub sijhawm ua haujlwm thiabTxo kom tsawgUa haujlwm dua:Rub tawmPeb cov technical specifications thiabPibib qho RFQ Niaj hnub no.
Peb caw cov kws tshaj lij txheej txheem thiab cov kws tsim khoom los pabxaib daim ntawv qhia txog RFQ kom ntxaws. Peb cov kws tshaj lij yuav tsim ib daim ntawv qhia kev siv uas meej, kev koom ua ke ntawm cov thev naus laus zis Lonnmeter uas muaj qhov tseeb siab rau hauv koj cov khoom siv faib cov slurry kom ntsuas qhov kwv yees txo qis ntawm qhov tsis zoo thiab kev siv slurry.Tiv taujpeb Pab Pawg Ua Haujlwm Automation tam sim no raumuaj kev nyab xeebkoj qhov txiaj ntsig ntawm cov khoom tsim tau.Tshawb Pomqhov kev ua kom raug qhov tseem ceeb uas yuav tsum tau ua kom koj cov kauj ruam tseem ceeb tshaj plaws ntawm kev npaj ua kom ruaj khov.
